DE3583912D1 - Feuchtigkeitsfuehler und verfahren zu dessen herstellung. - Google Patents

Feuchtigkeitsfuehler und verfahren zu dessen herstellung.

Info

Publication number
DE3583912D1
DE3583912D1 DE8585306352T DE3583912T DE3583912D1 DE 3583912 D1 DE3583912 D1 DE 3583912D1 DE 8585306352 T DE8585306352 T DE 8585306352T DE 3583912 T DE3583912 T DE 3583912T DE 3583912 D1 DE3583912 D1 DE 3583912D1
Authority
DE
Germany
Prior art keywords
production
humidity probe
probe
humidity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8585306352T
Other languages
English (en)
Inventor
Syotaro Oka
Shu Tahara
Junya Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Application granted granted Critical
Publication of DE3583912D1 publication Critical patent/DE3583912D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/126—Composition of the body, e.g. the composition of its sensitive layer comprising organic polymers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G01N2291/0257—Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02845—Humidity, wetness

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
DE8585306352T 1984-09-08 1985-09-06 Feuchtigkeitsfuehler und verfahren zu dessen herstellung. Expired - Fee Related DE3583912D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59188660A JPS6166160A (ja) 1984-09-08 1984-09-08 湿度センサ−及びその製造法

Publications (1)

Publication Number Publication Date
DE3583912D1 true DE3583912D1 (de) 1991-10-02

Family

ID=16227613

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585306352T Expired - Fee Related DE3583912D1 (de) 1984-09-08 1985-09-06 Feuchtigkeitsfuehler und verfahren zu dessen herstellung.

Country Status (4)

Country Link
US (1) US4696796A (de)
EP (1) EP0178071B1 (de)
JP (1) JPS6166160A (de)
DE (1) DE3583912D1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6347646A (ja) * 1986-08-13 1988-02-29 Nok Corp 感湿素子
JPS63137491A (ja) * 1986-11-29 1988-06-09 Shimadzu Corp 圧電素子型センサ
US4761710A (en) * 1987-06-23 1988-08-02 Industrial Technology Research Institute Polyimide capacitive humidity sensing element
JP2541246B2 (ja) * 1987-11-05 1996-10-09 エヌオーケー株式会社 薄膜感湿素子
US4894532A (en) * 1988-03-28 1990-01-16 Westinghouse Electric Corp. Optical fiber sensor with light absorbing moisture-sensitive coating
US4905701A (en) * 1988-06-15 1990-03-06 National Research Development Corporation Apparatus and method for detecting small changes in attached mass of piezoelectric devices used as sensors
DE3911812C2 (de) * 1989-04-11 1996-09-19 Siemens Ag Schneller Feuchtesensor auf Polymerbasis
US5079407A (en) * 1990-01-09 1992-01-07 Whirlpool Corporation Boil condition detection device for a range
US5369995A (en) * 1993-04-21 1994-12-06 Rutgers, The State University Of New Jersey Humidity sensor
US5533393A (en) * 1995-01-13 1996-07-09 Honeywell Inc. Determination of dew point or absolute humidity
US6566893B2 (en) 1997-02-28 2003-05-20 Ust Umweltsensortechnik Gmbh Method and arrangement for monitoring surfaces for the presence of dew
DE19708053B4 (de) * 1997-02-28 2006-06-08 Ust Umweltsensortechnik Gmbh Verfahren und Sensoranordnung zur Dedektion von Kondensationen an Oberflächen
EP0875752A1 (de) * 1997-05-02 1998-11-04 Yamatake-Honeywell Co. Ltd. Feuchtigkeitssensitiver Bestandteil und dessen Herstellungsverfahren
DE10015430C1 (de) 2000-03-28 2001-05-10 Preh Elektro Feinmechanik Kapazitiv arbeitender Sensor zur Detektion von Kondensation an Oberflächen
KR100539392B1 (ko) * 2003-08-12 2005-12-27 (주)해은켐텍 습도센서 감습막용 전해질 고분자 조성물, 그로부터제조되는 전해질 고분자 잉크 및 잉크젯 인쇄방식을이용하여 감습막을 형성하는 습도센서 제조방법
DE102004036578B4 (de) * 2004-07-28 2006-10-19 Alexandra Siegrist Mess- und Warngerät zur Schimmelpilzprävention
JP2010216895A (ja) * 2009-03-13 2010-09-30 Mitsubishi Materials Corp 微量質量センサ
EP2336757B1 (de) * 2009-12-07 2018-09-19 ams international AG Integrierte Schaltung mit Anordnung zur Erkennung der Anwesenheit von Wasser und Verfahren zu deren Herstellung
US8963421B2 (en) * 2012-09-14 2015-02-24 National Chiao Tung University Electroluminescent device including moisture barrier layer
US11079347B1 (en) 2017-07-20 2021-08-03 Enco Electronic Systems, Llc Moisture sensor including volume sensing

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2728831A (en) * 1951-11-09 1955-12-27 Phys Chemical Res Corp Electric hygrometer
DE1598446A1 (de) * 1966-05-03 1969-06-26 Hoechst Ag Feuchtigkeitsmessfuehler
US3703696A (en) * 1971-11-23 1972-11-21 Gen Electric Humidity sensor
JPS5431714B2 (de) * 1972-09-20 1979-10-09
SU543908A1 (ru) * 1975-07-28 1977-01-25 Агрофизический научно-исследовательский институт Сорбционный преобразователь влажности газовых сред
DE2920808A1 (de) * 1978-05-25 1979-11-29 Shinyei Kaisha Kobe Messfuehler und schaltung zur feuchtigkeitsmessung
JPS5529774A (en) * 1978-08-24 1980-03-03 Shinei Kk Relative humidity detector
US4379406A (en) * 1980-09-25 1983-04-12 Bennewitz Paul F Relative humidity detector systems and method of increasing the calibration period of relative humidity detector systems
DE3115961C2 (de) * 1981-04-22 1983-02-03 Wolfgang Prof. Dr. 4400 Münster Meyer zu Reckendorf Hygrometer
DE3224920C2 (de) * 1981-07-08 1986-11-20 Sharp K.K., Osaka Feuchtigkeitsempfindliches Widerstandselement
US4520341A (en) * 1981-12-08 1985-05-28 Sharp Kabushiki Kaisha Moisture responsive element with crosslinked organic membrane and protective layering
US4442422A (en) * 1982-03-31 1984-04-10 Murata Manufacturing Co., Ltd. Humidity sensitive resistor
US4562725A (en) * 1982-07-31 1986-01-07 Shimadzu Corporation Moisture sensor and a process for the production thereof
JPS59200951A (ja) * 1983-04-28 1984-11-14 Sharp Corp 感湿素子

Also Published As

Publication number Publication date
JPH0548411B2 (de) 1993-07-21
EP0178071A3 (en) 1989-02-22
US4696796A (en) 1987-09-29
JPS6166160A (ja) 1986-04-04
EP0178071A2 (de) 1986-04-16
EP0178071B1 (de) 1991-08-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee