DE3586135D1 - Kryo-elektroplattieren. - Google Patents

Kryo-elektroplattieren.

Info

Publication number
DE3586135D1
DE3586135D1 DE8585300371T DE3586135T DE3586135D1 DE 3586135 D1 DE3586135 D1 DE 3586135D1 DE 8585300371 T DE8585300371 T DE 8585300371T DE 3586135 T DE3586135 T DE 3586135T DE 3586135 D1 DE3586135 D1 DE 3586135D1
Authority
DE
Germany
Prior art keywords
cryo
substrate
electric plating
electrolyte
establishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585300371T
Other languages
English (en)
Other versions
DE3586135T2 (de
Inventor
Robert M Rose
Donald R Sadoway
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE3586135D1 publication Critical patent/DE3586135D1/de
Application granted granted Critical
Publication of DE3586135T2 publication Critical patent/DE3586135T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/66Electroplating: Baths therefor from melts
    • C25D3/665Electroplating: Baths therefor from melts from ionic liquids
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00Processes for servicing or operating cells for electrolytic coating
    • C25D21/02Heating or cooling
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/003Electroplating using gases, e.g. pressure influence
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/007Electroplating using magnetic fields, e.g. magnets
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/605Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12528Semiconductor component
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12639Adjacent, identical composition, components
    • Y10T428/12646Group VIII or IB metal-base
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12639Adjacent, identical composition, components
    • Y10T428/12646Group VIII or IB metal-base
    • Y10T428/12653Fe, containing 0.01-1.7% carbon [i.e., steel]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12674Ge- or Si-base component
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12681Ga-, In-, Tl- or Group VA metal-base component
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12708Sn-base component
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12736Al-base component
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12736Al-base component
    • Y10T428/1275Next to Group VIII or IB metal-base component
    • Y10T428/12757Fe
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771Transition metal-base component
    • Y10T428/12861Group VIII or IB metal-base component
    • Y10T428/12951Fe-base component
    • Y10T428/12972Containing 0.01-1.7% carbon [i.e., steel]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • External Artificial Organs (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
DE8585300371T 1984-01-23 1985-01-21 Kryo-elektroplattieren. Expired - Lifetime DE3586135T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/572,822 US4517253A (en) 1984-01-23 1984-01-23 Cryoelectrodeposition

Publications (2)

Publication Number Publication Date
DE3586135D1 true DE3586135D1 (de) 1992-07-09
DE3586135T2 DE3586135T2 (de) 1992-12-03

Family

ID=24289492

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585300371T Expired - Lifetime DE3586135T2 (de) 1984-01-23 1985-01-21 Kryo-elektroplattieren.

Country Status (5)

Country Link
US (1) US4517253A (de)
EP (1) EP0155749B1 (de)
JP (1) JPH0633496B2 (de)
AT (1) ATE76906T1 (de)
DE (1) DE3586135T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60111926A (ja) * 1983-11-22 1985-06-18 Aisin Seiki Co Ltd 液体ヘリウム液面計
JPS61175526A (ja) * 1985-01-29 1986-08-07 Aisin Seiki Co Ltd 液体ヘリウム液面計
US4911800A (en) * 1988-04-08 1990-03-27 Massachusetts Institute Of Technology Electrochemically controlled superconductivity
US4971663A (en) * 1988-04-08 1990-11-20 Massachusetts Institute Of Technology Cryoelectrosynthesis
US5077523A (en) * 1989-11-03 1991-12-31 John H. Blanz Company, Inc. Cryogenic probe station having movable chuck accomodating variable thickness probe cards
US5166606A (en) * 1989-11-03 1992-11-24 John H. Blanz Company, Inc. High efficiency cryogenic test station
US5160883A (en) * 1989-11-03 1992-11-03 John H. Blanz Company, Inc. Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support
US6350363B1 (en) 1997-04-16 2002-02-26 Drexel University Electric field directed construction of diodes using free-standing three-dimensional components
US6120669A (en) * 1997-04-16 2000-09-19 Drexel University Bipolar electrochemical connection of materials
US6830827B2 (en) * 2000-03-07 2004-12-14 Ebara Corporation Alloy coating, method for forming the same, and member for high temperature apparatuses
US6677233B2 (en) 2002-01-02 2004-01-13 Intel Corporation Material deposition from a liquefied gas solution
US7615385B2 (en) 2006-09-20 2009-11-10 Hypres, Inc Double-masking technique for increasing fabrication yield in superconducting electronics
DE102007020577B4 (de) * 2007-04-26 2021-09-09 Carl Zeiss Microscopy Gmbh Probenhalterung für ein Mikroskop und Verwendung eines Mikroskops mit einer solchen Probenhalterung

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE231657C (de) *
DE237014C (de) *
GB189517190A (en) * 1895-09-14 1896-09-12 Henry Ryan Lewis Improvements relating to the Separation or Extraction of Copper, Zinc, Lead, Silver, Gold, and other Metals from Ores or Compounds Containing the same, and to the Recovery of Chlorine Used in the Treatment of such Ores or Compounds.
GB320818A (en) * 1928-12-31 1929-10-24 Laurence St Clair Broughall Improvements in or relating to the electrolytic preparation or purification of metals
US3778360A (en) * 1970-02-25 1973-12-11 J Gordy Process for the electrolytic recovery of copper from its ores
GB1367872A (en) * 1972-06-26 1974-09-25 Atomic Energy Commission Anhydrous hydrogen fluoride electrolyte battery
US3990953A (en) * 1975-11-17 1976-11-09 Battelle Development Corporation Silicon electrodeposition
US4003804A (en) * 1975-12-31 1977-01-18 Scientific Mining & Manufacturing Company Method of electroplating of aluminum and plating baths therefor
JPS5312453A (en) * 1976-07-22 1978-02-03 Yotsuchiyan Shiyokuhin Kougiyo Method of producing seasoned torn cuttlefish
JPS5817269B2 (ja) * 1976-12-17 1983-04-06 ソニー株式会社 チタン又はチタン合金の電着法
US4227291A (en) * 1978-06-22 1980-10-14 J. C. Schumacher Co. Energy efficient process for continuous production of thin semiconductor films on metallic substrates
US4192720A (en) * 1978-10-16 1980-03-11 Exxon Research & Engineering Co. Electrodeposition process for forming amorphous silicon
JPS5745318A (en) * 1980-09-01 1982-03-15 Yasuro Ito Liquid seperating method for water or the like adhered to particle
JPS5836066B2 (ja) * 1981-10-31 1983-08-06 ソニー株式会社 電着法
DE3202265A1 (de) * 1982-01-25 1983-07-28 Siemens AG, 1000 Berlin und 8000 München Elektrolyt zur galvanischen abscheidung von aluminium

Also Published As

Publication number Publication date
US4517253A (en) 1985-05-14
EP0155749B1 (de) 1992-06-03
ATE76906T1 (de) 1992-06-15
EP0155749A3 (en) 1987-08-26
DE3586135T2 (de) 1992-12-03
JPS60169586A (ja) 1985-09-03
EP0155749A2 (de) 1985-09-25
JPH0633496B2 (ja) 1994-05-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee