DE3543752A1 - Verfahren zum kontinuierlichen herstellen von siliciumnitrid und siliciumcarbid - Google Patents
Verfahren zum kontinuierlichen herstellen von siliciumnitrid und siliciumcarbidInfo
- Publication number
- DE3543752A1 DE3543752A1 DE19853543752 DE3543752A DE3543752A1 DE 3543752 A1 DE3543752 A1 DE 3543752A1 DE 19853543752 DE19853543752 DE 19853543752 DE 3543752 A DE3543752 A DE 3543752A DE 3543752 A1 DE3543752 A1 DE 3543752A1
- Authority
- DE
- Germany
- Prior art keywords
- silicon
- carbide
- whiskers
- silicon nitride
- starting material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 45
- 229910052581 Si3N4 Inorganic materials 0.000 title claims description 39
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 39
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 23
- 238000010924 continuous production Methods 0.000 title claims description 8
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 37
- 239000000463 material Substances 0.000 claims description 25
- 239000007858 starting material Substances 0.000 claims description 24
- 229910052710 silicon Inorganic materials 0.000 claims description 23
- 239000010703 silicon Substances 0.000 claims description 22
- 239000000203 mixture Substances 0.000 claims description 18
- 239000002253 acid Substances 0.000 claims description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 14
- 230000001590 oxidative effect Effects 0.000 claims description 13
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 13
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 10
- 239000000843 powder Substances 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052799 carbon Inorganic materials 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 7
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 5
- 230000002209 hydrophobic effect Effects 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- HMDDXIMCDZRSNE-UHFFFAOYSA-N [C].[Si] Chemical compound [C].[Si] HMDDXIMCDZRSNE-UHFFFAOYSA-N 0.000 claims description 2
- 239000000654 additive Substances 0.000 claims description 2
- 230000000996 additive effect Effects 0.000 claims description 2
- 239000011230 binding agent Substances 0.000 claims description 2
- 238000001354 calcination Methods 0.000 claims description 2
- 238000009835 boiling Methods 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- -1 silica Chemical class 0.000 claims 1
- 150000003377 silicon compounds Chemical class 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 16
- 239000013078 crystal Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 239000012535 impurity Substances 0.000 description 7
- 239000003350 kerosene Substances 0.000 description 6
- 239000007791 liquid phase Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 4
- 241000209094 Oryza Species 0.000 description 3
- 235000007164 Oryza sativa Nutrition 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 235000009566 rice Nutrition 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 239000001913 cellulose Substances 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 2
- 235000013339 cereals Nutrition 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000007792 gaseous phase Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000007790 solid phase Substances 0.000 description 2
- MTJGVAJYTOXFJH-UHFFFAOYSA-N 3-aminonaphthalene-1,5-disulfonic acid Chemical compound C1=CC=C(S(O)(=O)=O)C2=CC(N)=CC(S(O)(=O)=O)=C21 MTJGVAJYTOXFJH-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- 229910018540 Si C Inorganic materials 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 150000001413 amino acids Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 239000006023 eutectic alloy Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000005188 flotation Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000006396 nitration reaction Methods 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
- 230000003248 secreting effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
- 230000009182 swimming Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/005—Growth of whiskers or needles
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
- C01B32/963—Preparation from compounds containing silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
- C01B32/963—Preparation from compounds containing silicon
- C01B32/984—Preparation from elemental silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/38—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/10—Particle morphology extending in one dimension, e.g. needle-like
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59264814A JPS61146797A (ja) | 1984-12-14 | 1984-12-14 | 窒化珪素ならびに炭化珪素の連続的製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3543752A1 true DE3543752A1 (de) | 1986-07-10 |
| DE3543752C2 DE3543752C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-01-26 |
Family
ID=17408581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19853543752 Granted DE3543752A1 (de) | 1984-12-14 | 1985-12-11 | Verfahren zum kontinuierlichen herstellen von siliciumnitrid und siliciumcarbid |
Country Status (4)
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4987104A (en) * | 1986-03-14 | 1991-01-22 | Commonwealth Scientific & Industrial Research Organization | Method of forming a ceramic product |
| US4873069A (en) * | 1987-03-09 | 1989-10-10 | American Matrix, Inc. | Method for the preparation of silicon carbide whiskers |
| DE3906986C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1989-03-04 | 1990-07-19 | Linn High Therm Gmbh, 8459 Hirschbach, De | |
| JP2517854B2 (ja) * | 1991-08-16 | 1996-07-24 | 工業技術院長 | 繊維状ケイ素化合物の連続式製造方法 |
| JP2002321156A (ja) | 2001-04-19 | 2002-11-05 | Minebea Co Ltd | 研磨洗浄方法 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2818545A1 (de) * | 1977-04-28 | 1978-11-09 | Onoda Cement Co Ltd | Verfahren zur herstellung von siliziumnitrid |
| US4248844A (en) * | 1980-01-28 | 1981-02-03 | Great Lakes Carbon Corporation | Production of SiC from rice hulls and silica |
| US4284612A (en) * | 1980-01-28 | 1981-08-18 | Great Lakes Carbon Corporation | Preparation of SiC whiskers |
| WO1983002108A1 (en) * | 1981-12-16 | 1983-06-23 | Atlantic Richfield Co | Continuous silicon carbide whisker production |
| US4483839A (en) * | 1982-08-19 | 1984-11-20 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Process for producing silicon nitride |
| DE3516589A1 (de) * | 1984-05-08 | 1985-11-14 | Mitsubishi Gas Chemical Co., Inc., Tokio/Tokyo | Verfahren zur herstellung von siliciumnitrid, siliciumcarbid oder feinen, pulverfoermigen mischungen daraus |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3754076A (en) * | 1970-10-30 | 1973-08-21 | Univ Utah | Production of silicon carbide from rice hulls |
| US3855395A (en) * | 1972-09-06 | 1974-12-17 | Univ Utah | Production of silicon nitride from rice hulls |
| US4283375A (en) * | 1980-01-28 | 1981-08-11 | Great Lakes Carbon Corporation | Production of SiC whiskers |
| JPS6052120B2 (ja) * | 1982-06-04 | 1985-11-18 | タテホ化学工業株式会社 | 炭化珪素の製造方法 |
| JPS59128300A (ja) * | 1982-12-28 | 1984-07-24 | Tateho Kagaku Kogyo Kk | 窒化珪素ウイスカ−を回収後、炭化珪素ウイスカ−を製造する方法 |
-
1984
- 1984-12-14 JP JP59264814A patent/JPS61146797A/ja active Granted
-
1985
- 1985-12-04 GB GB08529847A patent/GB2168333B/en not_active Expired
- 1985-12-11 DE DE19853543752 patent/DE3543752A1/de active Granted
- 1985-12-11 FR FR858518332A patent/FR2574775B1/fr not_active Expired - Lifetime
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2818545A1 (de) * | 1977-04-28 | 1978-11-09 | Onoda Cement Co Ltd | Verfahren zur herstellung von siliziumnitrid |
| US4248844A (en) * | 1980-01-28 | 1981-02-03 | Great Lakes Carbon Corporation | Production of SiC from rice hulls and silica |
| US4284612A (en) * | 1980-01-28 | 1981-08-18 | Great Lakes Carbon Corporation | Preparation of SiC whiskers |
| WO1983002108A1 (en) * | 1981-12-16 | 1983-06-23 | Atlantic Richfield Co | Continuous silicon carbide whisker production |
| US4483839A (en) * | 1982-08-19 | 1984-11-20 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Process for producing silicon nitride |
| DE3516589A1 (de) * | 1984-05-08 | 1985-11-14 | Mitsubishi Gas Chemical Co., Inc., Tokio/Tokyo | Verfahren zur herstellung von siliciumnitrid, siliciumcarbid oder feinen, pulverfoermigen mischungen daraus |
Non-Patent Citations (7)
| Title |
|---|
| C-212, Febr. 29, 1984, Vol.8, No.46, 58-204813 * |
| C-245, Oct. 4, 1984, Vol.8, No.218, 59-102900 * |
| JP-Patents Abstracts of Japan: C-217, April 3, 1984, Vol.8, No.71, 58-223697 * |
| JP-Patents Abstracts of Japan: C-227, June 8, 1984, Vol.8, No.122, 59-35009 * |
| US-Z.: Chemical Abstracts, Vol.90, 1979, Ref. 89552 k * |
| US-Z: Chemical Abstracts,Vol.82,1975, Ref.61183b * |
| US-Z: Chemical Abstracts,Vol.90,1979, Ref.89552k * |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3543752C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-01-26 |
| FR2574775B1 (fr) | 1990-10-12 |
| JPH0227318B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-06-15 |
| GB2168333A (en) | 1986-06-18 |
| FR2574775A1 (fr) | 1986-06-20 |
| GB2168333B (en) | 1988-12-07 |
| GB8529847D0 (en) | 1986-01-15 |
| JPS61146797A (ja) | 1986-07-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE3305057C2 (de) | Verfahren zur Herstellung von Siliciumcarbid-Whiskern | |
| DE2642554C3 (de) | Verfahren zur Herstellung von a- Siliziumnitrid | |
| DE2612296B2 (de) | Verfahren zur Herstellung von Graphitmaterial | |
| DE2736861C3 (de) | Polykohlenstofffluoride und Verfahren zur Herstellung derselben | |
| EP0059899A1 (de) | Verfahren zur Herstellung eines porösen Siliziumkarbidkörpers | |
| DE2814235A1 (de) | Verfahren zur herstellung von alpha- siliziumnitridpulver | |
| DE3000463A1 (de) | Hochreines siliziumnitrid-pulver und verfahren zu seiner herstellung | |
| DE2910059C2 (de) | Verfahren zur Herstellung von feinteiligem Siliziumkarbid sowie dessen Verwendung zur Herstellung von hochdichten Sinterkörpern | |
| DE1187591B (de) | Verfahren zur Herstellung von Siliziumcarbid oder dieses enthaltenden Mischungen | |
| DE3343964A1 (de) | Verfahren zur herstellung von siliziumnitridpulver mit guten sintereigenschaften | |
| DE3227041A1 (de) | Verfahren zur herstellung eines graphitfluorids | |
| DE2533209C2 (de) | Verfahren zum Herstellen eines Molybdän-Eisen-Katalysators und dessen Verwendung zur Oxidation von Methanol zu Formaldehyd | |
| DE3543752C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| DE3485909T2 (de) | Verfahren zur herstellung von whiskers aus siliciumnitrid vom beta-typ. | |
| DD279465A5 (de) | Verfahren zur herstellung selbsttragender keramikkoerper mit gerader form | |
| DE19721082B4 (de) | Verfahren zur Herstellung von kubischem Bornitrid | |
| DE4204009C2 (de) | Verfahren zur Herstellung von amorphem ultrahartem Bornitrid und nach dem Verfahren hergestelltes Bornitrid | |
| DE1814113C3 (de) | Verfahren zur Herstellung eines bindemittelfreien Pb3 O4 -Granulats | |
| DE3536933A1 (de) | Verbessertes siliciumnitrid und verfahren zu dessen herstellung | |
| DE19854487B4 (de) | Verfahren zur Herstellung von kubischem Bornitrid | |
| DE2921570B2 (de) | Verfahren zur Herstellung von Siliciumcarbid | |
| DE2461821A1 (de) | Verfahren zur herstellung von hexagonalem bornitrid | |
| EP0347566A2 (de) | Aluminiumnitridpulver und Verfahren zu seiner Herstellung | |
| EP0479179B1 (de) | Verfahren zur Herstellung von polymeren Chlorsilazanen | |
| DE2227001C3 (de) | Verfahren zur Herstellung von mechanisch und thermisch widerstandsfähigen Werkstücken aus Kalksandstein und deren Verwendung |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OR8 | Request for search as to paragraph 43 lit. 1 sentence 1 patent law | ||
| 8105 | Search report available | ||
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |