DE3048439C2 - Verfahren zur Herstellung eines Festelektrolyt-Sauerstoff-Meßelements mit Schichtstruktur - Google Patents
Verfahren zur Herstellung eines Festelektrolyt-Sauerstoff-Meßelements mit SchichtstrukturInfo
- Publication number
- DE3048439C2 DE3048439C2 DE3048439A DE3048439A DE3048439C2 DE 3048439 C2 DE3048439 C2 DE 3048439C2 DE 3048439 A DE3048439 A DE 3048439A DE 3048439 A DE3048439 A DE 3048439A DE 3048439 C2 DE3048439 C2 DE 3048439C2
- Authority
- DE
- Germany
- Prior art keywords
- layer
- electrode layer
- metal
- measuring electrode
- oxygen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000001301 oxygen Substances 0.000 title claims description 100
- 229910052760 oxygen Inorganic materials 0.000 title claims description 100
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims description 94
- 238000000034 method Methods 0.000 title claims description 72
- 239000007784 solid electrolyte Substances 0.000 title claims description 60
- 230000008569 process Effects 0.000 title claims description 31
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000010410 layer Substances 0.000 claims description 441
- 229910052751 metal Inorganic materials 0.000 claims description 86
- 239000002184 metal Substances 0.000 claims description 86
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 85
- 239000007789 gas Substances 0.000 claims description 70
- 238000010438 heat treatment Methods 0.000 claims description 37
- 239000000203 mixture Substances 0.000 claims description 33
- 238000000151 deposition Methods 0.000 claims description 19
- 230000008021 deposition Effects 0.000 claims description 16
- 238000004544 sputter deposition Methods 0.000 claims description 16
- 238000007738 vacuum evaporation Methods 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 13
- 239000011241 protective layer Substances 0.000 claims description 13
- 229910010293 ceramic material Inorganic materials 0.000 claims description 12
- 238000010304 firing Methods 0.000 claims description 12
- 238000007733 ion plating Methods 0.000 claims description 12
- 238000005245 sintering Methods 0.000 claims description 12
- 238000001704 evaporation Methods 0.000 claims description 10
- 230000008020 evaporation Effects 0.000 claims description 10
- 238000000992 sputter etching Methods 0.000 claims description 9
- 239000002923 metal particle Substances 0.000 claims description 7
- 239000003960 organic solvent Substances 0.000 claims description 7
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 6
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 6
- 238000007254 oxidation reaction Methods 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 5
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 4
- 229930195733 hydrocarbon Natural products 0.000 claims description 4
- 150000002430 hydrocarbons Chemical class 0.000 claims description 4
- 229910001111 Fine metal Inorganic materials 0.000 claims description 3
- 150000002739 metals Chemical class 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims 1
- 238000002604 ultrasonography Methods 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 description 40
- 239000000446 fuel Substances 0.000 description 29
- 238000002474 experimental method Methods 0.000 description 18
- 230000015572 biosynthetic process Effects 0.000 description 14
- 238000002485 combustion reaction Methods 0.000 description 14
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 12
- 230000035945 sensitivity Effects 0.000 description 12
- 239000007772 electrode material Substances 0.000 description 11
- 230000036961 partial effect Effects 0.000 description 11
- 229910001882 dioxygen Inorganic materials 0.000 description 10
- 230000000694 effects Effects 0.000 description 10
- 239000010408 film Substances 0.000 description 10
- -1 Oxygen ion Chemical class 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000011888 foil Substances 0.000 description 8
- 238000007650 screen-printing Methods 0.000 description 8
- 239000002245 particle Substances 0.000 description 7
- 238000004506 ultrasonic cleaning Methods 0.000 description 7
- 239000003054 catalyst Substances 0.000 description 6
- 230000008859 change Effects 0.000 description 6
- 230000004044 response Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000011148 porous material Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- VVTSZOCINPYFDP-UHFFFAOYSA-N [O].[Ar] Chemical compound [O].[Ar] VVTSZOCINPYFDP-UHFFFAOYSA-N 0.000 description 4
- 230000002776 aggregation Effects 0.000 description 4
- 238000000889 atomisation Methods 0.000 description 4
- 230000003197 catalytic effect Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 239000003792 electrolyte Substances 0.000 description 3
- 229910052762 osmium Inorganic materials 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- DJOYTAUERRJRAT-UHFFFAOYSA-N 2-(n-methyl-4-nitroanilino)acetonitrile Chemical compound N#CCN(C)C1=CC=C([N+]([O-])=O)C=C1 DJOYTAUERRJRAT-UHFFFAOYSA-N 0.000 description 2
- 229910052770 Uranium Inorganic materials 0.000 description 2
- 238000005054 agglomeration Methods 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000015271 coagulation Effects 0.000 description 2
- 238000005345 coagulation Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 101150096316 5 gene Proteins 0.000 description 1
- 241000134426 Ceratopogonidae Species 0.000 description 1
- 229910001260 Pt alloy Inorganic materials 0.000 description 1
- 229910018967 Pt—Rh Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000011149 active material Substances 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000003631 expected effect Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 229910052839 forsterite Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 230000009972 noncorrosive effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000007750 plasma spraying Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 230000002000 scavenging effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/90—Selection of catalytic material
- H01M4/9041—Metals or alloys
- H01M4/905—Metals or alloys specially used in fuel cell operating at high temperature, e.g. SOFC
- H01M4/9058—Metals or alloys specially used in fuel cell operating at high temperature, e.g. SOFC of noble metals or noble-metal based alloys
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
Landscapes
- Chemical & Material Sciences (AREA)
- Electrochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Molecular Biology (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16808479A JPS5692447A (en) | 1979-12-26 | 1979-12-26 | Production of film-structure oxygen sensor element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3048439A1 DE3048439A1 (de) | 1981-09-17 |
| DE3048439C2 true DE3048439C2 (de) | 1984-10-11 |
Family
ID=15861541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3048439A Expired DE3048439C2 (de) | 1979-12-26 | 1980-12-22 | Verfahren zur Herstellung eines Festelektrolyt-Sauerstoff-Meßelements mit Schichtstruktur |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4345985A (enrdf_load_stackoverflow) |
| JP (1) | JPS5692447A (enrdf_load_stackoverflow) |
| DE (1) | DE3048439C2 (enrdf_load_stackoverflow) |
| FR (1) | FR2472749A1 (enrdf_load_stackoverflow) |
| GB (1) | GB2066478B (enrdf_load_stackoverflow) |
Families Citing this family (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5734447A (en) * | 1980-08-12 | 1982-02-24 | Nissan Motor Co Ltd | Production of film structure oxygen sensor element |
| JPS57147049A (en) * | 1981-03-06 | 1982-09-10 | Nissan Motor Co Ltd | Oxygen sensor element |
| DE3112739A1 (de) * | 1981-03-31 | 1982-10-07 | Bosch Gmbh Robert | "strukturstabile elektrode fuer festelektrolyte fuer elektrochemische anwendungen sowie verwendung einer solchen elektrode in elektrochemischen messfuehlern zur bestimmung des sauerstoffgehaltes in gasen" |
| NL8105116A (nl) * | 1981-11-12 | 1983-06-01 | Philips Nv | Sensor voor het bepalen van het zuurstofgehalte in een fluidum. |
| JPS58124943A (ja) * | 1982-01-21 | 1983-07-25 | Toyota Central Res & Dev Lab Inc | マイクロヒ−タ付き限界電流式酸素センサとそれを用いた限界電流式酸素濃度検出装置 |
| JPS58148946A (ja) * | 1982-02-27 | 1983-09-05 | Nissan Motor Co Ltd | 空燃比検出器 |
| US4547281A (en) * | 1983-11-21 | 1985-10-15 | Gte Laboratories Incorporated | Gas analysis apparatus |
| JPS6126850A (ja) * | 1984-07-17 | 1986-02-06 | Ngk Spark Plug Co Ltd | 酸素センサ |
| US4656455A (en) * | 1984-07-20 | 1987-04-07 | Toyama Prefecture | Humidity-sensing element |
| JPS6130760A (ja) * | 1984-07-24 | 1986-02-13 | Toyota Central Res & Dev Lab Inc | 酸素センサ−及びその製造方法 |
| JPS61120055A (ja) * | 1984-11-16 | 1986-06-07 | Ngk Insulators Ltd | 酸素センサの製造法 |
| DE3773351D1 (de) * | 1986-12-19 | 1991-10-31 | Matsushita Electric Ind Co Ltd | Luft-brennstoff verhaeltnissensor. |
| JPH0786498B2 (ja) * | 1988-06-02 | 1995-09-20 | 日本碍子株式会社 | 加熱型酸素センサ |
| US5185179A (en) * | 1988-10-11 | 1993-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Plasma processing method and products thereof |
| US5407506A (en) * | 1992-06-04 | 1995-04-18 | Alliedsignal Inc. | Reaction bonding through activation by ion bombardment |
| US5427638A (en) * | 1992-06-04 | 1995-06-27 | Alliedsignal Inc. | Low temperature reaction bonding |
| WO1995014226A1 (en) * | 1993-11-19 | 1995-05-26 | Ceramatec, Inc. | Multi-functional sensor for combustion systems |
| JP3287096B2 (ja) * | 1993-12-27 | 2002-05-27 | 株式会社豊田中央研究所 | イオン導電体を用いたガスセンサおよびその製造方法 |
| US6143165A (en) * | 1994-07-28 | 2000-11-07 | Kabushiki Kaisha Riken | Nox sensor |
| US5827415A (en) * | 1994-09-26 | 1998-10-27 | The Board Of Trustees Of Leland Stanford Jun. Univ. | Oxygen sensor |
| US6051123A (en) * | 1995-06-15 | 2000-04-18 | Gas Research Institute | Multi-functional and NOx sensor for combustion systems |
| DE69633102T2 (de) * | 1995-12-06 | 2005-02-03 | Teledyne Technologies Inc., Los Angeles | Die Verwendung einer Sensorkathode für einen elektrochemischen Gassensor |
| DE19547150C2 (de) * | 1995-12-16 | 2000-08-03 | Draegerwerk Ag | Gassensor |
| JP3546590B2 (ja) * | 1996-04-12 | 2004-07-28 | 株式会社デンソー | 空燃比センサー |
| JP3811991B2 (ja) * | 1996-05-21 | 2006-08-23 | 株式会社デンソー | 酸素センサ素子の製造方法及び酸素センサ素子 |
| US5659127A (en) * | 1996-08-26 | 1997-08-19 | Opto Tech Corporation | Substrate structure of monolithic gas sensor |
| DE19833087A1 (de) | 1998-07-23 | 2000-01-27 | Bosch Gmbh Robert | Gassensor und Verfahren zu dessen Herstellung |
| US6346178B1 (en) * | 2000-04-10 | 2002-02-12 | Delphi Technologies, Inc. | Simplified wide range air fuel ratio sensor |
| US6709558B2 (en) * | 2002-05-08 | 2004-03-23 | Delphi Technologies, Inc. | Gas sensor |
| US7399501B2 (en) * | 2002-11-06 | 2008-07-15 | Ngk Spark Plug Co., Ltd. | Gas sensor manufacturing process |
| US20040180252A1 (en) * | 2003-03-14 | 2004-09-16 | General Electric Company | Fuel cell and method for manufacturing fuel cell |
| DE10313064A1 (de) * | 2003-03-24 | 2004-10-28 | Webasto Thermosysteme Gmbh | Gassensor und Verfahren zur Herstellung eines Gassensors |
| DE10337573B4 (de) * | 2003-08-14 | 2006-02-09 | Robert Bosch Gmbh | Sensorelement |
| US7664607B2 (en) | 2005-10-04 | 2010-02-16 | Teledyne Technologies Incorporated | Pre-calibrated gas sensor |
| DE102007000015B4 (de) * | 2007-01-15 | 2016-08-11 | Denso Corporation | Metallelektrode-Keramik-Verbundkörper und Verfahren zur Herstellung desselben |
| CA2870400A1 (en) | 2012-04-23 | 2013-10-31 | Technical University Of Denmark | Sensor employing internal reference electrode |
| DE102012108997A1 (de) * | 2012-09-24 | 2014-03-27 | Heinrich-Heine-Universität Düsseldorf | Sensoranordnung und Verfahren zum Herstellen einer Sensoranordnung |
| JP6274554B2 (ja) * | 2013-11-25 | 2018-02-07 | 株式会社Ｓｏｋｅｎ | ガスセンサ素子、及びガスセンサ |
| JP7086086B2 (ja) * | 2017-02-10 | 2022-06-17 | イーストマン ケミカル カンパニー | 電気化学センサーのための電極 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3978006A (en) * | 1972-02-10 | 1976-08-31 | Robert Bosch G.M.B.H. | Methods for producing oxygen-sensing element, particularly for use with internal combustion engine exhaust emission analysis |
| DE2206216C3 (de) * | 1972-02-10 | 1978-12-21 | Robert Bosch Gmbh, 7000 Stuttgart | Meßfühler für die Bestimmung des Sauerstoffgehaltes in Abgasen, vorwiegend von Verbrennungsmotoren, sowie Verfahren zur Herstellung solcher Meßfühler |
| US3843400A (en) * | 1972-09-18 | 1974-10-22 | Westinghouse Electric Corp | Solid electrolyte cell |
| US4040929A (en) * | 1975-09-15 | 1977-08-09 | Universal Oil Products Company | Oxygen sensor having thin film electrolyte |
| FR2350598A1 (fr) * | 1976-05-07 | 1977-12-02 | Thomson Csf | Senseur de concentration d'une espece dans un fluide |
| JPS5310491A (en) * | 1976-07-16 | 1978-01-30 | Nippon Denso Co Ltd | Oxygen concentration detector |
| JPS5329191A (en) * | 1976-08-31 | 1978-03-18 | Toyota Motor Co Ltd | Oxygen sensor and method of producing same |
| JPS5339791A (en) * | 1976-09-22 | 1978-04-11 | Nissan Motor | Oxygen sensor |
| JPS5348594A (en) * | 1976-10-14 | 1978-05-02 | Nissan Motor | Oxygen sensor |
| JPS5397896A (en) * | 1977-02-08 | 1978-08-26 | Hitachi Ltd | Oxygen concentration sensor and preparation thereof |
| DE2718907C2 (de) * | 1977-04-28 | 1984-04-12 | Robert Bosch Gmbh, 7000 Stuttgart | Meßfühler zur Bestimmung des Sauerstoffgehalts in Abgasen |
| JPS54151089A (en) * | 1978-05-18 | 1979-11-27 | Nissan Motor | Solid electrolyte paste |
| US4253931A (en) * | 1979-11-30 | 1981-03-03 | General Motors Corporation | Electrode sputtering process for exhaust gas oxygen sensor |
| US4253934A (en) * | 1979-04-17 | 1981-03-03 | General Motors Corporation | Aging treatment for exhaust gas oxygen sensor |
-
1979
- 1979-12-26 JP JP16808479A patent/JPS5692447A/ja active Granted
-
1980
- 1980-12-18 GB GB8040509A patent/GB2066478B/en not_active Expired
- 1980-12-22 DE DE3048439A patent/DE3048439C2/de not_active Expired
- 1980-12-23 US US06/219,841 patent/US4345985A/en not_active Expired - Fee Related
- 1980-12-24 FR FR8027536A patent/FR2472749A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| GB2066478A (en) | 1981-07-08 |
| FR2472749B1 (enrdf_load_stackoverflow) | 1984-07-13 |
| DE3048439A1 (de) | 1981-09-17 |
| FR2472749A1 (fr) | 1981-07-03 |
| US4345985A (en) | 1982-08-24 |
| GB2066478B (en) | 1984-02-08 |
| JPS6321862B2 (enrdf_load_stackoverflow) | 1988-05-09 |
| JPS5692447A (en) | 1981-07-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE3048439C2 (de) | Verfahren zur Herstellung eines Festelektrolyt-Sauerstoff-Meßelements mit Schichtstruktur | |
| DE69501506T2 (de) | Festoxid-elektrolyt Brennstoffzelle | |
| DE3019072C2 (de) | Vorrichtung zur Bestimmung der Sauerstoffkonzentration in Verbrennungsgasen | |
| DE3022282C2 (de) | Vorrichtung zur Bestimmung des Luft/Brennstoff-Verhältnisses | |
| DE2906459C2 (de) | Vorrichtung zur Messung der Sauerstoffkonzentration in einem Fluid | |
| DE4004172C2 (de) | Sauerstoffsensor zur Luft-Brennstoffgemisch-Kontrolle mit einer Schutzschicht, die eine Sauerstoff einschließende Substanz umfaßt, und Verfahren zur Herstellung des Sensors | |
| DE3811713C2 (enrdf_load_stackoverflow) | ||
| DE4343748C2 (de) | Sauerstoffühler | |
| DE2718907C2 (de) | Meßfühler zur Bestimmung des Sauerstoffgehalts in Abgasen | |
| DE19938416A1 (de) | Mehrlagiges Luft-Kraftstoff-Verhältnis-Fühlerelement | |
| DE3024077C2 (de) | Sauerstoffmeßfühler | |
| DE2657437C3 (de) | Sauerstoff-Meßfühler | |
| DE2746381A1 (de) | Sauerstoff-sensor | |
| DE3021745A1 (de) | Vorrichtung zur bestimmung des luft/brennstoff-verhaeltnisses in einem auspuffgas | |
| DE19949431A1 (de) | Festoxidbrennstoffzelle mit einem Mischungsgradienten zwischen Elektrode und Elektrolyt | |
| DE112013005603T5 (de) | Elektrode zur Verwendung in Gassensor und Gassensorelement, das diese verwendet | |
| DE2206216B2 (de) | Meßfühler für die Bestimmung des Sauerstoffgehaltes in Abgasen, vorwiegend von Verbrennungsmotoren, sowie Verfahren zur Herstellung solcher Meßfühler | |
| DE10247144A1 (de) | Gasdetektorelement und diese enthaltendes Gasdetektorgerät | |
| EP0007621B1 (de) | Sauerstoffsensor | |
| DE3028599C2 (de) | Einrichtung zum Erzeugen eines Steuersignals für die Rückkopplungssteuerung des Luft-Kraftstoff-Verhältnisses bei einer Brennkraftmaschine | |
| DE2733906A1 (de) | Detektor zur bestimmung der gaszusammensetzung und verfahren zu seiner herstellung | |
| DE3020132A1 (de) | Vorrichtung zur abtastung des luft-brennstoff-verhaeltnisses eines luft-brennstoff-gemisches | |
| DE19703636A1 (de) | Luft/Kraftstoff-Verhältnissensor | |
| DE68924370T2 (de) | Gassensor für die Messung des Luft/Treibstoff-Verhältnisses und Herstellungsverfahren für den Gassensor. | |
| DE3131927A1 (de) | "verfahren zur herstellung eines festkoerperelektrolytsauerstofffuehlerelementes mit lamellenstruktur, dessen aeussere elektrode aus der dampfphase niedergeschlagen ist." |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |