DE3019387C2 - Dünnschicht-Halbleiter-Gassensor mit einem in den Sensoraufbau integrierten Heizelement - Google Patents

Dünnschicht-Halbleiter-Gassensor mit einem in den Sensoraufbau integrierten Heizelement

Info

Publication number
DE3019387C2
DE3019387C2 DE3019387A DE3019387A DE3019387C2 DE 3019387 C2 DE3019387 C2 DE 3019387C2 DE 3019387 A DE3019387 A DE 3019387A DE 3019387 A DE3019387 A DE 3019387A DE 3019387 C2 DE3019387 C2 DE 3019387C2
Authority
DE
Germany
Prior art keywords
thin
gas sensor
highly doped
heating
sensor according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3019387A
Other languages
German (de)
English (en)
Other versions
DE3019387A1 (de
Inventor
Brigitte Ing.(grad.) 8000 München Schneider-Gmelch
Peter Dipl.-Ing. Dr. 8021 Straßlach Tischer
Ludwig Dipl.-Ing. Dr. 8000 München Treitinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE3019387A priority Critical patent/DE3019387C2/de
Priority to US06/254,855 priority patent/US4338281A/en
Priority to FR8108444A priority patent/FR2484646A1/fr
Priority to JP7560881A priority patent/JPS5717849A/ja
Publication of DE3019387A1 publication Critical patent/DE3019387A1/de
Application granted granted Critical
Publication of DE3019387C2 publication Critical patent/DE3019387C2/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE3019387A 1980-05-21 1980-05-21 Dünnschicht-Halbleiter-Gassensor mit einem in den Sensoraufbau integrierten Heizelement Expired DE3019387C2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE3019387A DE3019387C2 (de) 1980-05-21 1980-05-21 Dünnschicht-Halbleiter-Gassensor mit einem in den Sensoraufbau integrierten Heizelement
US06/254,855 US4338281A (en) 1980-05-21 1981-04-16 Thin film semiconductor gas sensor having an integrated heating element
FR8108444A FR2484646A1 (fr) 1980-05-21 1981-04-28 Detecteur de gaz a couche mince et a semiconducteurs a element de chauffage integre
JP7560881A JPS5717849A (en) 1980-05-21 1981-05-19 Thin film gas sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3019387A DE3019387C2 (de) 1980-05-21 1980-05-21 Dünnschicht-Halbleiter-Gassensor mit einem in den Sensoraufbau integrierten Heizelement

Publications (2)

Publication Number Publication Date
DE3019387A1 DE3019387A1 (de) 1981-11-26
DE3019387C2 true DE3019387C2 (de) 1986-01-23

Family

ID=6102965

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3019387A Expired DE3019387C2 (de) 1980-05-21 1980-05-21 Dünnschicht-Halbleiter-Gassensor mit einem in den Sensoraufbau integrierten Heizelement

Country Status (4)

Country Link
US (1) US4338281A (enExample)
JP (1) JPS5717849A (enExample)
DE (1) DE3019387C2 (enExample)
FR (1) FR2484646A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19606272C2 (de) * 1996-02-21 2001-05-17 Ust Umweltsensortechnik Gmbh Halbleiter-Gassensor

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5766347A (en) * 1980-10-09 1982-04-22 Hitachi Ltd Detector for mixture gas
JPS57178147A (en) * 1981-04-27 1982-11-02 Nippon Soken Inc Detector for gaseous component
JPS57194345A (en) * 1981-05-25 1982-11-29 Nippon Soken Inc Gas component detector
JPS57200844A (en) * 1981-06-04 1982-12-09 Ngk Insulators Ltd Oxygen concentration detector
US4387165A (en) * 1982-04-22 1983-06-07 Youngblood James L H2 S Detector having semiconductor and noncontinuous inert film deposited thereon
DE3217883A1 (de) * 1982-05-12 1983-11-17 Siemens AG, 1000 Berlin und 8000 München Gassensor
US4453151A (en) * 1982-06-07 1984-06-05 Leary David J Semiconductor gas sensor
US4601914A (en) * 1982-06-07 1986-07-22 Airtech, Inc. Method for fabricating a semiconductor gas sensor
JPS5927253A (ja) * 1982-08-06 1984-02-13 Shinei Kk ガスセンサおよびその製造法
US4442420A (en) * 1982-09-30 1984-04-10 Ford Motor Company Partial pressure of oxygen sensor-II
JPS59143945A (ja) * 1983-02-07 1984-08-17 Richo Seiki Kk ガス検出装置
JPS59188549A (ja) * 1983-04-11 1984-10-25 Shinkosumosu Denki Kk ２端子形半導体ガス検知素子
US4916935A (en) * 1983-11-09 1990-04-17 Bacharach, Inc. Low power solid state gas sensor with linear output and method of making the same
US4541988A (en) * 1983-12-13 1985-09-17 Bacharach Instrument Company Constant temperature catalytic gas detection instrument
US4587105A (en) * 1984-05-17 1986-05-06 Honeywell Inc. Integratable oxygen sensor
EP0265834B1 (en) * 1986-10-28 1992-07-22 Figaro Engineering Inc. Sensor and method of producing same
US5128514A (en) * 1987-07-31 1992-07-07 Siemens Aktiengesellschaft Black radiator for use as an emitter in calibratable gas sensors
JP2542643B2 (ja) * 1987-10-31 1996-10-09 株式会社東芝 センサの製造方法
JPH01284747A (ja) * 1988-05-10 1989-11-16 Ricoh Co Ltd ガスセンサ
JP2679811B2 (ja) * 1988-07-06 1997-11-19 株式会社リコー ガス検出装置
DE3818052A1 (de) * 1988-05-27 1989-12-07 Geraetebau Gmbh Atemschutzmaske
FI82774C (fi) * 1988-06-08 1991-04-10 Vaisala Oy Integrerad uppvaermbar sensor.
US4953387A (en) * 1989-07-31 1990-09-04 The Regents Of The University Of Michigan Ultrathin-film gas detector
WO1991006001A1 (de) * 1989-10-17 1991-05-02 E.T.R. Elektronik Technologie Rump Gmbh Gas-sensor-anordnung
DE4105025C1 (enExample) * 1991-02-19 1992-07-02 Robert Bosch Gmbh, 7000 Stuttgart, De
US5994144A (en) * 1992-03-04 1999-11-30 Fujitsu Limited Simplified environmental atmosphere measuring method
US5382341A (en) * 1992-09-10 1995-01-17 Aroutiounian; Vladimir M. Method of making smoke detector
GB2274336B (en) * 1993-01-13 1997-04-30 British Gas Plc Gas sensors
US5466605A (en) * 1993-03-15 1995-11-14 Arizona Board Of Regents Method for detection of chemical components
FI101911B (fi) * 1993-04-07 1998-09-15 Valtion Teknillinen Sähköisesti moduloitava terminen säteilylähde ja menetelmä sen valmist amiseksi
EP0646791B1 (en) * 1993-09-30 2001-09-05 Nittan Company, Limited Sensor device, and electronic equipment each having sensor device incorporated therein
WO1996019724A1 (en) * 1994-12-22 1996-06-27 Senova Corporation Apparatus for detecting selected chemical components of fluid streams
US5985673A (en) * 1994-12-22 1999-11-16 Arizona Baord Of Regents Method for regeneration of a sensor
DE19547150C2 (de) * 1995-12-16 2000-08-03 Draegerwerk Ag Gassensor
US6596236B2 (en) * 1999-01-15 2003-07-22 Advanced Technology Materials, Inc. Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same
EP1165187A1 (de) * 1999-03-17 2002-01-02 T.E.M.! Technische Entwicklungen und Management GmbH Sensorvorrichtung und verfahren zur detektion von in luft enthaltenen gasen oder dämpfen
US7080545B2 (en) * 2002-10-17 2006-07-25 Advanced Technology Materials, Inc. Apparatus and process for sensing fluoro species in semiconductor processing systems
US20040163445A1 (en) * 2002-10-17 2004-08-26 Dimeo Frank Apparatus and process for sensing fluoro species in semiconductor processing systems
ITTO20030318A1 (it) * 2003-04-24 2004-10-25 Sacmi Dispositivo sensore di gas a film sottile semiconduttore.
US20060211253A1 (en) * 2005-03-16 2006-09-21 Ing-Shin Chen Method and apparatus for monitoring plasma conditions in an etching plasma processing facility
US7827852B2 (en) * 2007-12-20 2010-11-09 General Electric Company Gas sensor and method of making
EP3096585B1 (de) * 2015-05-18 2017-12-20 E.G.O. ELEKTRO-GERÄTEBAU GmbH Heizeinrichtung zum erhitzen von fluiden und verfahren zum betrieb einer solchen heizeinrichtung
DE102016003283B4 (de) 2016-03-18 2022-05-19 Dräger Safety AG & Co. KGaA Gasmessvorrichtung mit einer Prüfvorrichtung zur Überprüfung eines Gassensors
DE102016003284B4 (de) 2016-03-18 2022-05-19 Dräger Safety AG & Co. KGaA Gasmessvorrichtung mit einer Prüfvorrichtung zur Überprüfung eines Gassensors
US11275051B2 (en) 2016-03-23 2022-03-15 Vaon, Llc Metal oxide-based chemical sensors
US10132769B2 (en) 2016-07-13 2018-11-20 Vaon, Llc Doped, metal oxide-based chemical sensors
US11243192B2 (en) 2016-09-27 2022-02-08 Vaon, Llc 3-D glass printable hand-held gas chromatograph for biomedical and environmental applications
US11203183B2 (en) 2016-09-27 2021-12-21 Vaon, Llc Single and multi-layer, flat glass-sensor structures
WO2018160650A1 (en) 2017-02-28 2018-09-07 Vaon, Llc Bimetal doped-metal oxide-based chemical sensors
EP3715842B1 (en) * 2019-03-26 2021-05-19 Infineon Technologies AG Mems gas sensor

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3865550A (en) * 1970-08-26 1975-02-11 Nat Res Dev Semi-conducting gas sensitive devices
US3751968A (en) * 1971-01-22 1973-08-14 Inficon Inc Solid state sensor
US3901067A (en) * 1973-06-21 1975-08-26 Gen Monitors Semiconductor gas detector and method therefor
DE2651160C3 (de) * 1975-11-08 1979-05-31 Matsushita Electric Industrial Co., Ltd., Kadoma, Osaka (Japan) Sensor für reduzierende Gase
US4045178A (en) * 1975-11-08 1977-08-30 Matsushita Electric Industrial Co., Ltd. Reducing gas sensor
GB1557921A (en) * 1977-01-10 1979-12-19 British Steel Corp Gas monitors
US4224280A (en) * 1977-07-18 1980-09-23 Fuji Electric Co., Ltd. Carbon monoxide detecting device
JPS5421397A (en) * 1977-07-18 1979-02-17 Fuji Electric Co Ltd Carbon monoxide detector
DE2735222A1 (de) 1977-08-04 1979-02-15 Siemens Ag Verfahren und vorrichtung zur messung des aethylalkoholgehaltes von luft
DE2737385A1 (de) * 1977-08-19 1979-03-22 Licentia Gmbh Gasspuerelement zum nachweis von fetten und geruchsstoffen in duensten
JPS5473097A (en) * 1977-11-22 1979-06-12 Seiko Epson Corp Gas sensor
DE2933971C2 (de) 1979-08-22 1983-12-15 Siemens AG, 1000 Berlin und 8000 München Gassensor hoher Empfindlichkeit und Stabilität zum Nachweis und zur Messung des Verunreinigungsgehaltes von Luft auf der Basis von Metalloxidhalbleitern

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19606272C2 (de) * 1996-02-21 2001-05-17 Ust Umweltsensortechnik Gmbh Halbleiter-Gassensor

Also Published As

Publication number Publication date
US4338281A (en) 1982-07-06
FR2484646B1 (enExample) 1985-02-08
JPS5717849A (en) 1982-01-29
FR2484646A1 (fr) 1981-12-18
DE3019387A1 (de) 1981-11-26

Similar Documents

Publication Publication Date Title
DE3019387C2 (de) Dünnschicht-Halbleiter-Gassensor mit einem in den Sensoraufbau integrierten Heizelement
DE3780560T2 (de) Fuehler und verfahren zu dessen herstellung.
DE3028249C2 (de) Elektrische Heizeinrichtung für einen Gasdetektor
DE2658273C3 (de) Gasdetektor
DE2826515A1 (de) Festkoerper-sensorelement
DE10011562A1 (de) Gassensor
DE2933971C2 (de) Gassensor hoher Empfindlichkeit und Stabilität zum Nachweis und zur Messung des Verunreinigungsgehaltes von Luft auf der Basis von Metalloxidhalbleitern
EP0046989B1 (de) Selektiver Dünnschicht-Gassensor hoher Empfindlichkeit und Stabilität zum Nachweis und zur Messung von gasförmigen Kohlenwasserstoff-Verunreinigungen in der Luft auf der Basis von Wolframoxid (WOx)-Halbleitern, sowie ein Verfahren zu seiner Herstellung
WO2012041539A1 (de) Mikromechanisches substrat für membran mit diffusionssperrschicht
DE102013212735B4 (de) Sensorbauteil für einen Gas- und/oder Flüssigkeitssensor, Herstellungsverfahren für ein Sensorbauteil für einen Gas- und/oder Flüssigkeitssensor und Verfahren zum Detektieren mindestens eines Stoffs in einem gasförmigen und/oder flüssigen Medium
DE2029065A1 (de) Elektrisches Widerstandsthermometer
DE69018471T2 (de) Selbsttragender dünnschichtsensor, verfahren zu seiner herstellung und anwendung in der gasdetektion und gaschromatographie.
DE1648241C3 (de) Maximumthermometer für Oberflächentemperaturen
EP1010002B1 (de) Wasserstoffsensor
DE3139617A1 (de) Gassensor und verfahren zu seiner hertellung
DE19718584C1 (de) Sensor zur Detektion von oxidierenden und/oder reduzierenden Gasen oder Gasgemischen
DE4334410C2 (de) Dünnschicht-Gassensor
EP0421158A1 (de) Katalytischer Gassensor und Verfahren zum Herstellen desselben
EP0645621A2 (de) Sensoranordnung
EP1248968A1 (de) Anordnung zur temperaturmessung und -regelung
DE4318327C2 (de) Gassensor
JP3845937B2 (ja) ガスセンサ
WO2007071513A1 (de) Festelektrolyt-gassensorelement
DE4037528A1 (de) Verfahren zur herstellung eines metalloxid-gassensors in hybridtechnik
DE19756894A1 (de) Gassensor und Verfahren zur Messung von Sauerstoff in Gasgemischen

Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee