DE2625383C2 - Verbindungsträger zur Bildung der elektrischen Verbindungen zwischen Anschlußleitern eines Packungsrahmens und Kontaktierungsstellen mindestens einer innerhalb des Packungsrahmens gelegenen integrierten Schaltung und Verfahren zur Herstellung eines solchen Verbindungsträgers - Google Patents
Verbindungsträger zur Bildung der elektrischen Verbindungen zwischen Anschlußleitern eines Packungsrahmens und Kontaktierungsstellen mindestens einer innerhalb des Packungsrahmens gelegenen integrierten Schaltung und Verfahren zur Herstellung eines solchen VerbindungsträgersInfo
- Publication number
- DE2625383C2 DE2625383C2 DE2625383A DE2625383A DE2625383C2 DE 2625383 C2 DE2625383 C2 DE 2625383C2 DE 2625383 A DE2625383 A DE 2625383A DE 2625383 A DE2625383 A DE 2625383A DE 2625383 C2 DE2625383 C2 DE 2625383C2
- Authority
- DE
- Germany
- Prior art keywords
- connection
- integrated circuit
- connection carrier
- integrated
- chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004020 conductor Substances 0.000 title claims description 32
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 238000004806 packaging method and process Methods 0.000 title claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 24
- 238000012360 testing method Methods 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 11
- 238000003466 welding Methods 0.000 claims description 11
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000013078 crystal Substances 0.000 claims description 4
- 238000012856 packing Methods 0.000 claims description 2
- 239000000523 sample Substances 0.000 claims 8
- 239000000463 material Substances 0.000 claims 2
- 238000010998 test method Methods 0.000 claims 2
- 239000000969 carrier Substances 0.000 claims 1
- 238000011835 investigation Methods 0.000 claims 1
- 230000003068 static effect Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000000919 ceramic Substances 0.000 description 9
- 238000001465 metallisation Methods 0.000 description 8
- 235000012239 silicon dioxide Nutrition 0.000 description 8
- 239000010453 quartz Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- 238000009413 insulation Methods 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/22—Connection or disconnection of sub-entities or redundant parts of a device in response to a measurement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/147—Semiconductor insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/50—Tape automated bonding [TAB] connectors, i.e. film carriers; Manufacturing methods related thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/86—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using tape automated bonding [TAB]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01015—Phosphorus [P]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01023—Vanadium [V]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01024—Chromium [Cr]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01027—Cobalt [Co]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01032—Germanium [Ge]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01039—Yttrium [Y]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49121—Beam lead frame or beam lead device
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- General Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Lead Frames For Integrated Circuits (AREA)
- Measuring Leads Or Probes (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/583,739 US3984620A (en) | 1975-06-04 | 1975-06-04 | Integrated circuit chip test and assembly package |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2625383A1 DE2625383A1 (de) | 1976-12-16 |
| DE2625383C2 true DE2625383C2 (de) | 1985-02-21 |
Family
ID=24334363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2625383A Expired DE2625383C2 (de) | 1975-06-04 | 1976-06-04 | Verbindungsträger zur Bildung der elektrischen Verbindungen zwischen Anschlußleitern eines Packungsrahmens und Kontaktierungsstellen mindestens einer innerhalb des Packungsrahmens gelegenen integrierten Schaltung und Verfahren zur Herstellung eines solchen Verbindungsträgers |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US3984620A (OSRAM) |
| JP (1) | JPS5850024B2 (OSRAM) |
| CA (1) | CA1068829A (OSRAM) |
| DE (1) | DE2625383C2 (OSRAM) |
| FR (1) | FR2313775A1 (OSRAM) |
| GB (1) | GB1492015A (OSRAM) |
| IT (1) | IT1074474B (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19904138A1 (de) * | 1999-02-03 | 2000-08-10 | Deutsche Telekom Ag | Verfahren zur Herstellung von Kontakthügeln für die Chipeinbettung in Dünnfilmanordnungen |
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|---|---|---|---|---|
| US4177519A (en) * | 1975-07-28 | 1979-12-04 | Sharp Kabushiki Kaisha | Electronic control assembly mounted on a flexible carrier and manufacture thereof |
| GB1602898A (en) * | 1977-04-26 | 1981-11-18 | Suwa Seikosha Kk | Circuit for detecting a voltage |
| JPS5474674A (en) * | 1977-11-26 | 1979-06-14 | Shinkawa Seisakusho Kk | Method of connecting semiconductor |
| DE2840973A1 (de) * | 1978-09-20 | 1980-03-27 | Siemens Ag | Verfahren zur herstellung pruefbarer halbleiter-miniaturgehaeuse in bandform |
| JPS5562732A (en) * | 1978-11-06 | 1980-05-12 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Preparation of aperture stop |
| US4329642A (en) * | 1979-03-09 | 1982-05-11 | Siliconix, Incorporated | Carrier and test socket for leadless integrated circuit |
| US4288841A (en) * | 1979-09-20 | 1981-09-08 | Bell Telephone Laboratories, Incorporated | Double cavity semiconductor chip carrier |
| CA1115852A (en) * | 1980-01-09 | 1982-01-05 | Jacques R. St. Louis | Mounting and packaging of silicon devices on ceramic substrates, and assemblies containing silicon devices |
| US4308339A (en) * | 1980-02-07 | 1981-12-29 | Westinghouse Electric Corp. | Method for manufacturing tape including lead frames |
| DE3019207A1 (de) * | 1980-05-20 | 1981-11-26 | GAO Gesellschaft für Automation und Organisation mbH, 8000 München | Traegerelement fuer einen ic-chip |
| US4439754A (en) * | 1981-04-03 | 1984-03-27 | Electro-Films, Inc. | Apertured electronic circuit package |
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| JPS58162045A (ja) * | 1982-03-23 | 1983-09-26 | Telmec Co Ltd | ウエハ−プロ−ビング用探針ユニツトの構造 |
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| TWI368743B (en) | 2008-11-04 | 2012-07-21 | King Yuan Electronics Co Ltd | Probe card assembly and probes therein |
| CN101975921A (zh) * | 2010-09-29 | 2011-02-16 | 上海天臣威讯信息技术有限公司 | 芯片测试板及测试方法、dfn封装器件测试板及测试方法 |
| US9093442B1 (en) | 2013-03-15 | 2015-07-28 | Lockheed Martin Corporation | Apparatus and method for achieving wideband RF performance and low junction to case thermal resistance in non-flip bump RFIC configuration |
| US20240206066A1 (en) * | 2022-12-20 | 2024-06-20 | Qualcomm Incorporated | Hybrid circuit board device to support circuit reuse and method of manufacture |
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| US3480836A (en) * | 1966-08-11 | 1969-11-25 | Ibm | Component mounted in a printed circuit |
| GB1184319A (en) * | 1967-12-27 | 1970-03-11 | Rca Corp | Semiconductor Device Assembly |
| US3577037A (en) * | 1968-07-05 | 1971-05-04 | Ibm | Diffused electrical connector apparatus and method of making same |
| US3698075A (en) * | 1969-11-05 | 1972-10-17 | Motorola Inc | Ultrasonic metallic sheet-frame bonding |
| DE2151765C2 (de) * | 1970-11-05 | 1983-06-16 | Honeywell Information Systems Italia S.p.A., Caluso, Torino | Verfahren zum Kontaktieren von integrierten Schaltungen mit Beam-Lead-Anschlüssen |
| US3709424A (en) * | 1971-02-19 | 1973-01-09 | Signetics Corp | Integrated circuit bonder |
| GB1383297A (en) * | 1972-02-23 | 1974-02-12 | Plessey Co Ltd | Electrical integrated circuit package |
| JPS5128980B2 (OSRAM) * | 1972-12-26 | 1976-08-23 |
-
1975
- 1975-06-04 US US05/583,739 patent/US3984620A/en not_active Expired - Lifetime
-
1976
- 1976-03-15 US US05/666,826 patent/US4096348A/en not_active Expired - Lifetime
- 1976-05-07 CA CA252,049A patent/CA1068829A/en not_active Expired
- 1976-05-28 GB GB22331/76A patent/GB1492015A/en not_active Expired
- 1976-05-28 IT IT49710/76A patent/IT1074474B/it active
- 1976-06-01 JP JP51064023A patent/JPS5850024B2/ja not_active Expired
- 1976-06-02 FR FR7616659A patent/FR2313775A1/fr active Granted
- 1976-06-04 DE DE2625383A patent/DE2625383C2/de not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19904138A1 (de) * | 1999-02-03 | 2000-08-10 | Deutsche Telekom Ag | Verfahren zur Herstellung von Kontakthügeln für die Chipeinbettung in Dünnfilmanordnungen |
| DE19904138B4 (de) * | 1999-02-03 | 2008-10-16 | Deutsche Telekom Ag | Verfahren zur Herstellung von Kontakthügeln für die Chipeinbettung in Dünnfilmanordnungen |
Also Published As
| Publication number | Publication date |
|---|---|
| US4096348A (en) | 1978-06-20 |
| IT1074474B (it) | 1985-04-20 |
| JPS51148358A (en) | 1976-12-20 |
| US3984620A (en) | 1976-10-05 |
| JPS5850024B2 (ja) | 1983-11-08 |
| CA1068829A (en) | 1979-12-25 |
| FR2313775B1 (OSRAM) | 1982-07-02 |
| FR2313775A1 (fr) | 1976-12-31 |
| DE2625383A1 (de) | 1976-12-16 |
| GB1492015A (en) | 1977-11-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |