DE2603542C3 - Feuchteabhängiger keramischer Widerstand - Google Patents
Feuchteabhängiger keramischer WiderstandInfo
- Publication number
- DE2603542C3 DE2603542C3 DE2603542A DE2603542A DE2603542C3 DE 2603542 C3 DE2603542 C3 DE 2603542C3 DE 2603542 A DE2603542 A DE 2603542A DE 2603542 A DE2603542 A DE 2603542A DE 2603542 C3 DE2603542 C3 DE 2603542C3
- Authority
- DE
- Germany
- Prior art keywords
- oxide
- moisture
- ceramic
- dependent
- resistor according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000919 ceramic Substances 0.000 title claims description 53
- 230000001419 dependent effect Effects 0.000 title claims description 24
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 25
- 229910044991 metal oxide Inorganic materials 0.000 claims description 20
- 150000004706 metal oxides Chemical class 0.000 claims description 20
- 239000000654 additive Substances 0.000 claims description 17
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 16
- 230000000996 additive effect Effects 0.000 claims description 16
- 239000010409 thin film Substances 0.000 claims description 16
- 229910000480 nickel oxide Inorganic materials 0.000 claims description 13
- 239000011521 glass Substances 0.000 claims description 12
- 239000011787 zinc oxide Substances 0.000 claims description 12
- 239000011230 binding agent Substances 0.000 claims description 11
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims description 11
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims description 10
- 229910000423 chromium oxide Inorganic materials 0.000 claims description 10
- CXKCTMHTOKXKQT-UHFFFAOYSA-N cadmium oxide Inorganic materials [Cd]=O CXKCTMHTOKXKQT-UHFFFAOYSA-N 0.000 claims description 9
- CFEAAQFZALKQPA-UHFFFAOYSA-N cadmium(2+);oxygen(2-) Chemical compound [O-2].[Cd+2] CFEAAQFZALKQPA-UHFFFAOYSA-N 0.000 claims description 9
- 229910001925 ruthenium oxide Inorganic materials 0.000 claims description 9
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 9
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 claims description 8
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 8
- 239000000395 magnesium oxide Substances 0.000 claims description 8
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 8
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 8
- 229910001887 tin oxide Inorganic materials 0.000 claims description 8
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 7
- 229910052788 barium Inorganic materials 0.000 claims description 6
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 6
- 239000011651 chromium Substances 0.000 claims description 6
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 claims description 6
- 229910003437 indium oxide Inorganic materials 0.000 claims description 5
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 5
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 4
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 4
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 3
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 claims description 3
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 claims description 3
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims description 3
- 239000000292 calcium oxide Substances 0.000 claims description 3
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 3
- 229910003440 dysprosium oxide Inorganic materials 0.000 claims description 3
- NLQFUUYNQFMIJW-UHFFFAOYSA-N dysprosium(iii) oxide Chemical compound O=[Dy]O[Dy]=O NLQFUUYNQFMIJW-UHFFFAOYSA-N 0.000 claims description 3
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 claims description 3
- 229910000449 hafnium oxide Inorganic materials 0.000 claims description 3
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims description 3
- 229910000476 molybdenum oxide Inorganic materials 0.000 claims description 3
- 229910000484 niobium oxide Inorganic materials 0.000 claims description 3
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 3
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 claims description 3
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 3
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 claims description 3
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 claims description 3
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 3
- 229910001930 tungsten oxide Inorganic materials 0.000 claims description 3
- 229910001935 vanadium oxide Inorganic materials 0.000 claims description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 3
- 239000000470 constituent Substances 0.000 claims description 2
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Chemical compound [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 claims 4
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 claims 2
- 239000005751 Copper oxide Substances 0.000 claims 2
- 229910000431 copper oxide Inorganic materials 0.000 claims 2
- 229910000464 lead oxide Inorganic materials 0.000 claims 2
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 claims 1
- 150000002736 metal compounds Chemical class 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 description 10
- 239000000203 mixture Substances 0.000 description 9
- 239000000843 powder Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 3
- 229910052793 cadmium Inorganic materials 0.000 description 3
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- 239000011701 zinc Substances 0.000 description 3
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000000839 emulsion Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- OQZCJRJRGMMSGK-UHFFFAOYSA-M potassium metaphosphate Chemical compound [K+].[O-]P(=O)=O OQZCJRJRGMMSGK-UHFFFAOYSA-M 0.000 description 2
- 229940099402 potassium metaphosphate Drugs 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000011669 selenium Substances 0.000 description 2
- 229910052711 selenium Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910052712 strontium Inorganic materials 0.000 description 2
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 2
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010411 cooking Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 229910000018 strontium carbonate Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
- Compositions Of Oxide Ceramics (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50014508A JPS5189188A (ja) | 1975-02-03 | 1975-02-03 | Kanshitsuteikotaisoseibutsu |
| JP50018244A JPS5193397A (ja) | 1975-02-12 | 1975-02-12 | Kanshitsuteikotai |
| JP50020136A JPS5194599A (ja) | 1975-02-17 | 1975-02-17 | Enamerukanshitsuteikotaisoseibutsu |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2603542A1 DE2603542A1 (de) | 1976-08-05 |
| DE2603542B2 DE2603542B2 (de) | 1978-03-09 |
| DE2603542C3 true DE2603542C3 (de) | 1978-10-26 |
Family
ID=27280665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2603542A Expired DE2603542C3 (de) | 1975-02-03 | 1976-01-29 | Feuchteabhängiger keramischer Widerstand |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4015230A (enExample) |
| DE (1) | DE2603542C3 (enExample) |
| FR (1) | FR2299709A1 (enExample) |
| GB (1) | GB1498384A (enExample) |
Families Citing this family (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4080564A (en) * | 1975-10-02 | 1978-03-21 | Matsushita Electric Industrial Co., Ltd. | Humidity sensitive resistor device |
| JPS5395097A (en) * | 1977-01-31 | 1978-08-19 | Toshiba Corp | Gas-sensitive element |
| JPS5439197A (en) * | 1977-09-02 | 1979-03-26 | Shibaura Denshi Seisakushiyo K | Method of making gas detector |
| US4137519A (en) * | 1977-10-25 | 1979-01-30 | Trw, Inc. | Resistor material, resistor made therefrom and method of making the same |
| US4147515A (en) * | 1977-12-22 | 1979-04-03 | The United States Of America As Represented By The Secretary Of The Navy | Electro-chemical sensors for gas detection in electron tubes |
| US4187201A (en) * | 1978-03-15 | 1980-02-05 | Electro Materials Corporation Of America | Thick film conductors |
| US4242303A (en) * | 1978-05-02 | 1980-12-30 | Tokyo Shibaura Denki Kabushiki Kaisha | Gas detecting element |
| DE2821267A1 (de) * | 1978-05-16 | 1979-11-22 | Siemens Ag | Gassensoren und verfahren zu ihrer herstellung |
| DE2966864D1 (en) * | 1978-12-26 | 1984-05-03 | Matsushita Electric Industrial Co Ltd | Humidity detecting apparatus using a humidity detecting resistor ceramic element |
| US4265844A (en) * | 1979-05-16 | 1981-05-05 | Marcon Electronics Co. Ltd. | Method of manufacturing a voltage-nonlinear resistor |
| JPS5814043B2 (ja) * | 1979-06-07 | 1983-03-17 | 秩父セメント株式会社 | 湿度センサ素子 |
| JPS602762B2 (ja) * | 1979-09-11 | 1985-01-23 | 株式会社村田製作所 | 湿度検出素子 |
| AU524439B2 (en) * | 1979-10-11 | 1982-09-16 | Matsushita Electric Industrial Co., Ltd. | Sputtered thin film thermistor |
| US4321577A (en) * | 1980-02-25 | 1982-03-23 | General Electric Company | Integral humidity sensor/heater configurations |
| JPS6054259B2 (ja) * | 1980-12-22 | 1985-11-29 | 株式会社村田製作所 | 感湿セラミツク |
| US4464647A (en) * | 1981-02-12 | 1984-08-07 | Marcon Electronics Co. Ltd. | Humidity sensor made of metal oxide |
| US4356150A (en) * | 1981-05-15 | 1982-10-26 | Honeywell Inc. | Humidity sensor with electrical rejection of contaminants |
| US4379195A (en) * | 1981-07-06 | 1983-04-05 | Rca Corporation | Low value resistor inks |
| JPS5897801A (ja) * | 1981-12-07 | 1983-06-10 | 株式会社豊田中央研究所 | 感湿素子 |
| EP0086415B1 (en) * | 1982-02-12 | 1988-01-07 | Matsushita Electric Industrial Co., Ltd. | Humidity sensitive device |
| US4456902A (en) * | 1982-03-30 | 1984-06-26 | Mitsubishi Denki Kabushiki Kaisha | Gas and humidity sensing element |
| JPS5999703A (ja) * | 1982-11-30 | 1984-06-08 | 株式会社東芝 | 感湿素子 |
| US4452844A (en) * | 1983-01-21 | 1984-06-05 | Rca Corporation | Low value resistor inks |
| US4484172A (en) * | 1983-04-01 | 1984-11-20 | Arthur D. Little, Inc. | Humidity sensor, comprised of compound metal oxides with perovskite structure |
| JPS6042234A (ja) * | 1983-08-11 | 1985-03-06 | Mitsubishi Chem Ind Ltd | ガリウムの回収法 |
| DE3671529D1 (de) * | 1985-02-12 | 1990-06-28 | New Cosmos Electric Co | Alkoholselektiver gassensor. |
| US4677415A (en) * | 1985-05-08 | 1987-06-30 | Motorola, Inc. | Ceramic humidity sensor |
| US4743881A (en) * | 1985-05-08 | 1988-05-10 | Motorola, Inc. | Ceramic temperature sensor |
| US4647895A (en) * | 1985-05-08 | 1987-03-03 | Motorola, Inc. | Ceramic temperature sensor |
| GB8704873D0 (en) * | 1987-03-02 | 1987-04-08 | Atomic Energy Authority Uk | Sensors |
| JPH0692268B2 (ja) * | 1988-06-03 | 1994-11-16 | 日本油脂株式会社 | 還元再酸化型半導体セラミックコンデンサ素子 |
| US5045170A (en) * | 1989-05-02 | 1991-09-03 | Globe-Union, Inc. | Electrodies containing a conductive metal oxide |
| JP2621488B2 (ja) * | 1989-07-11 | 1997-06-18 | 株式会社デンソー | 高温用サーミスタ素子 |
| US5855849A (en) * | 1996-01-16 | 1999-01-05 | Industrial Technology Research Institute | Solid state humidity sensor |
| US5668072A (en) * | 1996-05-09 | 1997-09-16 | Equity Enterprises | High emissivity coating |
| US6399230B1 (en) | 1997-03-06 | 2002-06-04 | Sarnoff Corporation | Multilayer ceramic circuit boards with embedded resistors |
| EP0923085A4 (en) * | 1997-06-16 | 2005-12-28 | Matsushita Electric Industrial Co Ltd | CONDUCTOR PLATE FOR RESISTORS AND METHOD FOR THE PRODUCTION THEREOF |
| US6835920B2 (en) * | 2001-08-07 | 2004-12-28 | Samsung Electronics Co., Ltd | Microwave oven |
| KR20030013234A (ko) * | 2001-08-07 | 2003-02-14 | 삼성전자주식회사 | 전자레인지 |
| JP3992647B2 (ja) * | 2003-05-28 | 2007-10-17 | Ｔｄｋ株式会社 | 抵抗体ペースト、抵抗体および電子部品 |
| CA2666370A1 (en) * | 2006-10-12 | 2008-04-17 | Nextech Materials, Ltd. | Hydrogen sensitive composite material, hydrogen gas sensor, and sensor for detecting hydrogen and other gases with improved baseline resistance |
| US8646311B1 (en) * | 2007-11-09 | 2014-02-11 | Atmospheric Sensors Ltd. | Sensors for hydrogen, ammonia |
| CN102226782B (zh) * | 2011-04-06 | 2013-02-27 | 上海远登环保科技发展有限公司 | 一种多层氧化锆固态电解质复合芯片及其制备 |
| KR101605664B1 (ko) * | 2012-10-10 | 2016-03-22 | 엔지케이 인슐레이터 엘티디 | 전압 비직선성 저항 소자 |
| KR20150079899A (ko) * | 2012-11-29 | 2015-07-08 | 엔지케이 인슐레이터 엘티디 | 전압 비직선성 저항 소자 |
| US11177152B2 (en) * | 2018-09-05 | 2021-11-16 | Shinko Electric Industries Co., Ltd. | Ceramic substrate containing aluminum oxide and electrostatic chuck having electrode containing tungsten with oxides |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3255324A (en) | 1962-05-28 | 1966-06-07 | Energy Conversion Devices Inc | Moisture responsive resistance device |
| US3715702A (en) | 1971-06-23 | 1973-02-06 | Honeywell Inc | Relative humidity sensor |
| US3721631A (en) | 1971-08-16 | 1973-03-20 | Shinyei Kaisha | Humidity sensors comprising alkalimetal oxide,divanadium pentoxide and silicon |
| US3748625A (en) * | 1972-01-06 | 1973-07-24 | Thunder Scient Corp | Moisture sensing element and method of making same |
| AU5805873A (en) * | 1972-07-25 | 1975-01-16 | Koichi Sugaya | Humidity sensor electrode assembly |
| US3961301A (en) * | 1973-12-13 | 1976-06-01 | Plessey Incorporated | Humidity sensor |
-
1976
- 1976-01-27 US US05/652,702 patent/US4015230A/en not_active Expired - Lifetime
- 1976-01-29 DE DE2603542A patent/DE2603542C3/de not_active Expired
- 1976-02-02 GB GB4034/76A patent/GB1498384A/en not_active Expired
- 1976-02-02 FR FR7602817*[A patent/FR2299709A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| GB1498384A (en) | 1978-01-18 |
| DE2603542A1 (de) | 1976-08-05 |
| DE2603542B2 (de) | 1978-03-09 |
| US4015230A (en) | 1977-03-29 |
| FR2299709A1 (fr) | 1976-08-27 |
| FR2299709B1 (enExample) | 1981-09-18 |
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| C3 | Grant after two publication steps (3rd publication) |