DE2458847A1 - Schottky-diode - Google Patents
Schottky-diodeInfo
- Publication number
- DE2458847A1 DE2458847A1 DE19742458847 DE2458847A DE2458847A1 DE 2458847 A1 DE2458847 A1 DE 2458847A1 DE 19742458847 DE19742458847 DE 19742458847 DE 2458847 A DE2458847 A DE 2458847A DE 2458847 A1 DE2458847 A1 DE 2458847A1
- Authority
- DE
- Germany
- Prior art keywords
- schottky diode
- substrate
- metal electrode
- layer
- insulation layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 21
- 238000009413 insulation Methods 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 6
- 235000012239 silicon dioxide Nutrition 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 230000015556 catabolic process Effects 0.000 description 26
- 238000000034 method Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000002411 adverse Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002784 hot electron Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/60—Electrodes characterised by their materials
- H10D64/64—Electrodes comprising a Schottky barrier to a semiconductor
Landscapes
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US43712074A | 1974-01-28 | 1974-01-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2458847A1 true DE2458847A1 (de) | 1975-07-31 |
Family
ID=23735155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19742458847 Pending DE2458847A1 (de) | 1974-01-28 | 1974-12-12 | Schottky-diode |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS5415675A (enrdf_load_stackoverflow) |
| CA (1) | CA1016663A (enrdf_load_stackoverflow) |
| DE (1) | DE2458847A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2259440B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1448525A (enrdf_load_stackoverflow) |
| IT (1) | IT1027870B (enrdf_load_stackoverflow) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2149494A1 (de) * | 1971-10-04 | 1973-04-12 | Artos Meier Windhorst Kg | Verfahren und vorrichtung zum befeuchten von laufenden getrockneten textilbahnen bei waermebehandlungen in gasfoermigen behandlungsmedien |
-
1974
- 1974-11-28 FR FR7441924A patent/FR2259440B1/fr not_active Expired
- 1974-11-29 CA CA214,985A patent/CA1016663A/en not_active Expired
- 1974-12-12 DE DE19742458847 patent/DE2458847A1/de active Pending
- 1974-12-16 GB GB5416974A patent/GB1448525A/en not_active Expired
- 1974-12-20 IT IT30794/74A patent/IT1027870B/it active
- 1974-12-24 JP JP14771774A patent/JPS5415675A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| FR2259440B1 (enrdf_load_stackoverflow) | 1979-06-08 |
| FR2259440A1 (enrdf_load_stackoverflow) | 1975-08-22 |
| GB1448525A (en) | 1976-09-08 |
| IT1027870B (it) | 1978-12-20 |
| JPS5415675A (en) | 1979-02-05 |
| CA1016663A (en) | 1977-08-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OHJ | Non-payment of the annual fee |