DE2313604C3 - Mechanisch-elektrischer Wandler - Google Patents
Mechanisch-elektrischer WandlerInfo
- Publication number
- DE2313604C3 DE2313604C3 DE2313604A DE2313604A DE2313604C3 DE 2313604 C3 DE2313604 C3 DE 2313604C3 DE 2313604 A DE2313604 A DE 2313604A DE 2313604 A DE2313604 A DE 2313604A DE 2313604 C3 DE2313604 C3 DE 2313604C3
- Authority
- DE
- Germany
- Prior art keywords
- layer
- tin oxide
- mechanical
- oxide layer
- electrical converter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/50—Devices controlled by mechanical forces, e.g. pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/117—Shapes of semiconductor bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/82—Heterojunctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2878872A JPS5317031B2 (enExample) | 1972-03-21 | 1972-03-21 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2313604A1 DE2313604A1 (de) | 1973-12-06 |
| DE2313604B2 DE2313604B2 (enExample) | 1979-01-04 |
| DE2313604C3 true DE2313604C3 (de) | 1979-09-06 |
Family
ID=12258155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2313604A Expired DE2313604C3 (de) | 1972-03-21 | 1973-03-19 | Mechanisch-elektrischer Wandler |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS5317031B2 (enExample) |
| CA (1) | CA959975A (enExample) |
| DE (1) | DE2313604C3 (enExample) |
| FR (1) | FR2180687B1 (enExample) |
| GB (1) | GB1418519A (enExample) |
| IT (1) | IT981527B (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220111299A (ko) * | 2019-12-05 | 2022-08-09 | 아톰 에이치투오, 엘엘씨 | 단일벽 탄소 나노튜브 막과 그 제조 방법 및 제조 장치 |
-
1972
- 1972-03-21 JP JP2878872A patent/JPS5317031B2/ja not_active Expired
-
1973
- 1973-03-19 CA CA166,425A patent/CA959975A/en not_active Expired
- 1973-03-19 DE DE2313604A patent/DE2313604C3/de not_active Expired
- 1973-03-21 IT IT21904/73A patent/IT981527B/it active
- 1973-03-21 GB GB1359073A patent/GB1418519A/en not_active Expired
- 1973-03-21 FR FR7310201A patent/FR2180687B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2313604B2 (enExample) | 1979-01-04 |
| FR2180687A1 (enExample) | 1973-11-30 |
| JPS4896088A (enExample) | 1973-12-08 |
| IT981527B (it) | 1974-10-10 |
| FR2180687B1 (enExample) | 1977-07-29 |
| DE2313604A1 (de) | 1973-12-06 |
| GB1418519A (en) | 1975-12-24 |
| JPS5317031B2 (enExample) | 1978-06-05 |
| CA959975A (en) | 1974-12-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| EHJ | Ceased/non-payment of the annual fee |