GB1418519A - Pressure sensitive semiconductor device and method of manufacture thereof - Google Patents
Pressure sensitive semiconductor device and method of manufacture thereofInfo
- Publication number
- GB1418519A GB1418519A GB1359073A GB1359073A GB1418519A GB 1418519 A GB1418519 A GB 1418519A GB 1359073 A GB1359073 A GB 1359073A GB 1359073 A GB1359073 A GB 1359073A GB 1418519 A GB1418519 A GB 1418519A
- Authority
- GB
- United Kingdom
- Prior art keywords
- film
- sio
- layer
- sno
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title 1
- 229910004298 SiO 2 Inorganic materials 0.000 abstract 9
- 229910006404 SnO 2 Inorganic materials 0.000 abstract 7
- 239000000758 substrate Substances 0.000 abstract 7
- 239000007789 gas Substances 0.000 abstract 3
- 230000015556 catabolic process Effects 0.000 abstract 2
- 239000002131 composite material Substances 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 2
- 239000011261 inert gas Substances 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 230000004048 modification Effects 0.000 abstract 2
- 238000012986 modification Methods 0.000 abstract 2
- 239000010453 quartz Substances 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 abstract 1
- 229910005793 GeO 2 Inorganic materials 0.000 abstract 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 230000001419 dependent effect Effects 0.000 abstract 1
- 239000008246 gaseous mixture Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 125000005842 heteroatom Chemical group 0.000 abstract 1
- 238000005286 illumination Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 229910052697 platinum Inorganic materials 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/26—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, elements provided for in two or more of the groups H01L29/16, H01L29/18, H01L29/20, H01L29/22, H01L29/24, e.g. alloys
- H01L29/267—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, elements provided for in two or more of the groups H01L29/16, H01L29/18, H01L29/20, H01L29/22, H01L29/24, e.g. alloys in different semiconductor regions, e.g. heterojunctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Pressure Sensors (AREA)
Abstract
1418519 Semiconductor electromechanical transducers OMRON TATEISI ELECTRONICS CO 21 March 1973 [21 March 1972] 13590/73 Heading H1K An electromechanical transducer (Fig. 1) comprises a N-type Si monocrystal substrate 1 with a layer 2 of SiO 2 thereon overlain with a layer 3 of SnO 2 constituting an N-type semiconductor. A metal electrode 5 underlies the substrate and an electrode 4 overlies part of layer 3 with an ammeter and reverse bias voltage in series across the electrodes. Mechanical pressure is applied over a glass or metal rod with a spherical tip bearing on layer 3, to vary reverse current. The composite has a rectifying characteristic and exhibits photoelectric properties to radiation applied to the hetero junction within the composite. . In fabrication (Fig. 2) a quartz tube 21 encircled by an electric heater 22 has tube 11 supplying oxygen or air controlled by valves 13, 29 and flow meter 12, a tube 18 supplying water vapour from evaporator 17, and tube 15 supplying a gaseous mixture of (CH 3 ) 2 SnCl 2 and inert gas through evaporator 14 and valve 16 under control of valves 29<SP>1</SP>, 13<SP>1</SP> and flow meter 12<SP>1</SP>. Exhaust gas emerges from exit 27 at a controlled rate, and in the tube 21 a quartz support carries Si wafer 1. The wafer is initially polished or rough finished, washed in HF, and inserted in the reaction zone, heated to working temperature, and the oxident and the water vapur are fed in. An SiO 2 film forms on the surface and its thickness is controlled by varying temperature and/or exposure time. Thereafter preheated inert gas and organic tin vapour are admixed and admitted at reduced pressure due to vacuum exhaustion of outlet 27. Prolysis and oxidation of the admixed gas deposits a transparent conductive SnO 2 film on the SiO 2 film, and conductivity is improved by addition of SbCl 3 into the gas mixture. Substrate may be P-type Si, Ge, or GeAs and SiO 2 is replaceable by Si 3 N 4 or GeO 2 as insulant. An alternative device (Fig. 3) comprises annular SiO 2 layer 2<SP>1</SP>, a further film 2 thereof deposited in the aperture thereof, and SiO 2 film 3 depositied on films 2, 2<SP>1</SP> with an electrode 4 thereupon. Rectifying, statistical breakdown distribution with reverse voltage, reverse leakage current and reverse breakdown voltage related to film thickness are discussed and compared with similar characteristics of prior art devices with SnO 2 directly overlying Si without illumination or application of mechanical force (Figs. 4 to 7, not shown). The reverse current is shown to be linearly related to the mechanical force applied for constant energization voltage with sensitivity critically dependent on SiO 2 film thickness (Figs. 8, 9, 10, not shown). A modified transducer (Fig. 11, not shown) may be pressurized by a spherical member and (Fig. 12, not shown) by using a substrate with an uneven surface produced, e.g. by etching on the SiO 2 and SnO 2 layers are applied. Greater sensivitivity of response of reverse current to applied pressure is obtained due to shear deformation (Fig. 13, not shown). A theoretical explanation is given. A further modification (Fig. 14) comprise a substrate 51 presenting mesas divided by a lattice of etched grooves 50 with insulant film 52 of, e.g. Si 3 N 4 deposited on the peaks (which may be used to mask the groove etching). A SiO 2 film 54 and SnO 2 film 53 are deposited on the surface including the grooves. In further modifications the device of Fig. 1 may be exposed to light applied through the SnO 2 film to give photoelectric response, and (Fig. 15, not shown) an obturating layer, e.g. of N may overly the SnO 2 layer 3 (Fig. 3) to exclude light and also serve as an electrode. The obturant layer may alternatively be of Mo, Wo, Pt, Cr or of Al 2 O 3 . Where the substrate is uneven its crystallographic plane is unimportant, but where it is polished, senstitivity and stability are improved using a (100) plane instead of a (111) plane. Pressure resistivity diminishes and stability of reverse current is improved with increasing specific resistivity of substrate. Reference has been directed by the Comptroller to Specification 1,328,707.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2878872A JPS5317031B2 (en) | 1972-03-21 | 1972-03-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1418519A true GB1418519A (en) | 1975-12-24 |
Family
ID=12258155
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1359073A Expired GB1418519A (en) | 1972-03-21 | 1973-03-21 | Pressure sensitive semiconductor device and method of manufacture thereof |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS5317031B2 (en) |
CA (1) | CA959975A (en) |
DE (1) | DE2313604C3 (en) |
FR (1) | FR2180687B1 (en) |
GB (1) | GB1418519A (en) |
IT (1) | IT981527B (en) |
-
1972
- 1972-03-21 JP JP2878872A patent/JPS5317031B2/ja not_active Expired
-
1973
- 1973-03-19 CA CA166,425A patent/CA959975A/en not_active Expired
- 1973-03-19 DE DE19732313604 patent/DE2313604C3/en not_active Expired
- 1973-03-21 IT IT2190473A patent/IT981527B/en active
- 1973-03-21 GB GB1359073A patent/GB1418519A/en not_active Expired
- 1973-03-21 FR FR7310201A patent/FR2180687B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS4896088A (en) | 1973-12-08 |
FR2180687A1 (en) | 1973-11-30 |
CA959975A (en) | 1974-12-24 |
DE2313604B2 (en) | 1979-01-04 |
DE2313604C3 (en) | 1979-09-06 |
JPS5317031B2 (en) | 1978-06-05 |
FR2180687B1 (en) | 1977-07-29 |
IT981527B (en) | 1974-10-10 |
DE2313604A1 (en) | 1973-12-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |