DE2261672A1 - Verfahren zur herstellung eines gegenstandes und durch dieses verfahren hergestellter gegenstand - Google Patents

Verfahren zur herstellung eines gegenstandes und durch dieses verfahren hergestellter gegenstand

Info

Publication number
DE2261672A1
DE2261672A1 DE19722261672 DE2261672A DE2261672A1 DE 2261672 A1 DE2261672 A1 DE 2261672A1 DE 19722261672 DE19722261672 DE 19722261672 DE 2261672 A DE2261672 A DE 2261672A DE 2261672 A1 DE2261672 A1 DE 2261672A1
Authority
DE
Germany
Prior art keywords
platinum
layer
pattern
substance
complementary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19722261672
Other languages
German (de)
English (en)
Inventor
Hermanus Josephus Henr Wilting
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of DE2261672A1 publication Critical patent/DE2261672A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/04—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching
    • H05K3/046—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching by selective transfer or selective detachment of a conductive layer
    • H05K3/048—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching by selective transfer or selective detachment of a conductive layer using a lift-off resist pattern or a release layer pattern
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Weting (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • ing And Chemical Polishing (AREA)
  • Electrodes Of Semiconductors (AREA)
DE19722261672 1971-12-18 1972-12-16 Verfahren zur herstellung eines gegenstandes und durch dieses verfahren hergestellter gegenstand Pending DE2261672A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7117429A NL7117429A (enExample) 1971-12-18 1971-12-18

Publications (1)

Publication Number Publication Date
DE2261672A1 true DE2261672A1 (de) 1973-06-20

Family

ID=19814730

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19722261672 Pending DE2261672A1 (de) 1971-12-18 1972-12-16 Verfahren zur herstellung eines gegenstandes und durch dieses verfahren hergestellter gegenstand

Country Status (8)

Country Link
US (1) US3853613A (enExample)
JP (1) JPS5125225B2 (enExample)
CA (1) CA964384A (enExample)
DE (1) DE2261672A1 (enExample)
FR (1) FR2163609A1 (enExample)
GB (1) GB1372459A (enExample)
IT (1) IT976061B (enExample)
NL (1) NL7117429A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2930395A1 (de) * 1978-07-28 1980-02-14 Fuji Electric Co Ltd Verfahren zum auftragen von kontaktschichten auf einen halbleiterkoerper
DE3042503A1 (de) * 1979-11-30 1981-06-19 Mitsubishi Denki K.K., Tokyo Halbleitervorrichtung

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52153137U (enExample) * 1976-05-17 1977-11-19
JPS53157435U (enExample) * 1977-05-17 1978-12-09
US4442137A (en) * 1982-03-18 1984-04-10 International Business Machines Corporation Maskless coating of metallurgical features of a dielectric substrate
US11011381B2 (en) * 2018-07-27 2021-05-18 Texas Instruments Incorporated Patterning platinum by alloying and etching platinum alloy

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3686080A (en) * 1971-07-21 1972-08-22 Rca Corp Method of fabrication of semiconductor devices

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2930395A1 (de) * 1978-07-28 1980-02-14 Fuji Electric Co Ltd Verfahren zum auftragen von kontaktschichten auf einen halbleiterkoerper
DE3042503A1 (de) * 1979-11-30 1981-06-19 Mitsubishi Denki K.K., Tokyo Halbleitervorrichtung

Also Published As

Publication number Publication date
US3853613A (en) 1974-12-10
CA964384A (en) 1975-03-11
JPS5125225B2 (enExample) 1976-07-29
FR2163609A1 (enExample) 1973-07-27
NL7117429A (enExample) 1973-06-20
JPS4868437A (enExample) 1973-09-18
GB1372459A (en) 1974-10-30
IT976061B (it) 1974-08-20

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