DE2252484A1 - Verfahren zum ueberwachen und steuern der zusammensetzung eines niederschlagsfilms - Google Patents
Verfahren zum ueberwachen und steuern der zusammensetzung eines niederschlagsfilmsInfo
- Publication number
- DE2252484A1 DE2252484A1 DE2252484A DE2252484A DE2252484A1 DE 2252484 A1 DE2252484 A1 DE 2252484A1 DE 2252484 A DE2252484 A DE 2252484A DE 2252484 A DE2252484 A DE 2252484A DE 2252484 A1 DE2252484 A1 DE 2252484A1
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- film
- composition
- evaporated
- electrical potential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/548—Controlling the composition
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US19578471A | 1971-11-04 | 1971-11-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE2252484A1 true DE2252484A1 (de) | 1973-05-10 |
Family
ID=22722795
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE2252484A Pending DE2252484A1 (de) | 1971-11-04 | 1972-10-26 | Verfahren zum ueberwachen und steuern der zusammensetzung eines niederschlagsfilms |
Country Status (12)
Country | Link |
---|---|
US (1) | US3756847A (it) |
JP (1) | JPS5216467B2 (it) |
AU (1) | AU464727B2 (it) |
BE (1) | BE790940A (it) |
CA (1) | CA975628A (it) |
CH (1) | CH590935A5 (it) |
DE (1) | DE2252484A1 (it) |
FR (1) | FR2156413B1 (it) |
GB (1) | GB1392865A (it) |
IT (1) | IT975345B (it) |
NL (1) | NL7214898A (it) |
SE (1) | SE379059B (it) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3889019A (en) * | 1969-03-13 | 1975-06-10 | United Aircraft Corp | Vapor randomization in vacuum deposition of coatings |
JPS5137667B2 (it) * | 1971-11-13 | 1976-10-16 | ||
US4021277A (en) * | 1972-12-07 | 1977-05-03 | Sprague Electric Company | Method of forming thin film resistor |
JPS5181791A (ja) * | 1975-01-13 | 1976-07-17 | Osaka Koon Denki Kk | Ionkapureeteinguhoho |
US4416912A (en) * | 1979-10-13 | 1983-11-22 | The Gillette Company | Formation of coatings on cutting edges |
US4617192A (en) * | 1982-12-21 | 1986-10-14 | At&T Bell Laboratories | Process for making optical INP devices |
US4472453A (en) * | 1983-07-01 | 1984-09-18 | Rca Corporation | Process for radiation free electron beam deposition |
JPS60251273A (ja) * | 1984-05-28 | 1985-12-11 | Mitsubishi Heavy Ind Ltd | 真空蒸発装置の蒸発量制御方法 |
US4842710A (en) * | 1987-03-23 | 1989-06-27 | Siemens Aktiengesellschaft | Method of making mixed nitride films with at least two metals |
US5514229A (en) * | 1993-11-24 | 1996-05-07 | Ramot-University Authority For Applied Research And Industrial Development Ltd., Tel Aviv University | Method of producing transparent and other electrically conductive materials |
US7250196B1 (en) | 1999-10-26 | 2007-07-31 | Basic Resources, Inc. | System and method for plasma plating |
US6521104B1 (en) * | 2000-05-22 | 2003-02-18 | Basic Resources, Inc. | Configurable vacuum system and method |
US6503379B1 (en) | 2000-05-22 | 2003-01-07 | Basic Research, Inc. | Mobile plating system and method |
US20030180450A1 (en) * | 2002-03-22 | 2003-09-25 | Kidd Jerry D. | System and method for preventing breaker failure |
US20050126497A1 (en) * | 2003-09-30 | 2005-06-16 | Kidd Jerry D. | Platform assembly and method |
US20080057195A1 (en) * | 2006-08-31 | 2008-03-06 | United Technologies Corporation | Non-line of sight coating technique |
-
0
- BE BE790940D patent/BE790940A/xx unknown
-
1971
- 1971-11-04 US US00195784A patent/US3756847A/en not_active Expired - Lifetime
-
1972
- 1972-10-04 CA CA153,262A patent/CA975628A/en not_active Expired
- 1972-10-11 SE SE7213094A patent/SE379059B/xx unknown
- 1972-10-12 CH CH1489772A patent/CH590935A5/xx not_active IP Right Cessation
- 1972-10-16 AU AU47782/72A patent/AU464727B2/en not_active Expired
- 1972-10-24 IT IT70339/72A patent/IT975345B/it active
- 1972-10-26 DE DE2252484A patent/DE2252484A1/de active Pending
- 1972-10-30 FR FR7238354A patent/FR2156413B1/fr not_active Expired
- 1972-11-02 JP JP47110167A patent/JPS5216467B2/ja not_active Expired
- 1972-11-03 NL NL7214898A patent/NL7214898A/xx unknown
- 1972-11-03 GB GB5076472A patent/GB1392865A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
AU464727B2 (en) | 1975-09-04 |
SE379059B (it) | 1975-09-22 |
NL7214898A (it) | 1973-05-08 |
US3756847A (en) | 1973-09-04 |
IT975345B (it) | 1974-07-20 |
JPS4855670A (it) | 1973-08-04 |
FR2156413A1 (it) | 1973-05-25 |
JPS5216467B2 (it) | 1977-05-10 |
BE790940A (fr) | 1973-03-01 |
FR2156413B1 (it) | 1976-05-21 |
CA975628A (en) | 1975-10-07 |
AU4778272A (en) | 1974-04-26 |
CH590935A5 (it) | 1977-08-31 |
GB1392865A (en) | 1975-05-07 |
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