GB1392865A - Method for controlling the composition of a deposited film - Google Patents

Method for controlling the composition of a deposited film

Info

Publication number
GB1392865A
GB1392865A GB5076472A GB5076472A GB1392865A GB 1392865 A GB1392865 A GB 1392865A GB 5076472 A GB5076472 A GB 5076472A GB 5076472 A GB5076472 A GB 5076472A GB 1392865 A GB1392865 A GB 1392865A
Authority
GB
United Kingdom
Prior art keywords
substrate
compound
heated
nov
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5076472A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Publication of GB1392865A publication Critical patent/GB1392865A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
GB5076472A 1971-11-04 1972-11-03 Method for controlling the composition of a deposited film Expired GB1392865A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US19578471A 1971-11-04 1971-11-04

Publications (1)

Publication Number Publication Date
GB1392865A true GB1392865A (en) 1975-05-07

Family

ID=22722795

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5076472A Expired GB1392865A (en) 1971-11-04 1972-11-03 Method for controlling the composition of a deposited film

Country Status (12)

Country Link
US (1) US3756847A (it)
JP (1) JPS5216467B2 (it)
AU (1) AU464727B2 (it)
BE (1) BE790940A (it)
CA (1) CA975628A (it)
CH (1) CH590935A5 (it)
DE (1) DE2252484A1 (it)
FR (1) FR2156413B1 (it)
GB (1) GB1392865A (it)
IT (1) IT975345B (it)
NL (1) NL7214898A (it)
SE (1) SE379059B (it)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3889019A (en) * 1969-03-13 1975-06-10 United Aircraft Corp Vapor randomization in vacuum deposition of coatings
JPS5137667B2 (it) * 1971-11-13 1976-10-16
US4021277A (en) * 1972-12-07 1977-05-03 Sprague Electric Company Method of forming thin film resistor
JPS5181791A (ja) * 1975-01-13 1976-07-17 Osaka Koon Denki Kk Ionkapureeteinguhoho
US4416912A (en) * 1979-10-13 1983-11-22 The Gillette Company Formation of coatings on cutting edges
US4617192A (en) * 1982-12-21 1986-10-14 At&T Bell Laboratories Process for making optical INP devices
US4472453A (en) * 1983-07-01 1984-09-18 Rca Corporation Process for radiation free electron beam deposition
JPS60251273A (ja) * 1984-05-28 1985-12-11 Mitsubishi Heavy Ind Ltd 真空蒸発装置の蒸発量制御方法
US4842710A (en) * 1987-03-23 1989-06-27 Siemens Aktiengesellschaft Method of making mixed nitride films with at least two metals
US5514229A (en) * 1993-11-24 1996-05-07 Ramot-University Authority For Applied Research And Industrial Development Ltd., Tel Aviv University Method of producing transparent and other electrically conductive materials
US7250196B1 (en) 1999-10-26 2007-07-31 Basic Resources, Inc. System and method for plasma plating
US6503379B1 (en) * 2000-05-22 2003-01-07 Basic Research, Inc. Mobile plating system and method
US6521104B1 (en) * 2000-05-22 2003-02-18 Basic Resources, Inc. Configurable vacuum system and method
US20030180450A1 (en) * 2002-03-22 2003-09-25 Kidd Jerry D. System and method for preventing breaker failure
US20050126497A1 (en) * 2003-09-30 2005-06-16 Kidd Jerry D. Platform assembly and method
US20080057195A1 (en) * 2006-08-31 2008-03-06 United Technologies Corporation Non-line of sight coating technique

Also Published As

Publication number Publication date
JPS5216467B2 (it) 1977-05-10
CH590935A5 (it) 1977-08-31
AU464727B2 (en) 1975-09-04
DE2252484A1 (de) 1973-05-10
CA975628A (en) 1975-10-07
SE379059B (it) 1975-09-22
JPS4855670A (it) 1973-08-04
US3756847A (en) 1973-09-04
IT975345B (it) 1974-07-20
FR2156413A1 (it) 1973-05-25
AU4778272A (en) 1974-04-26
BE790940A (fr) 1973-03-01
FR2156413B1 (it) 1976-05-21
NL7214898A (it) 1973-05-08

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee