IT975345B - Procedimento per regolare la compo sione di una pellicola depositata - Google Patents

Procedimento per regolare la compo sione di una pellicola depositata

Info

Publication number
IT975345B
IT975345B IT70339/72A IT7033972A IT975345B IT 975345 B IT975345 B IT 975345B IT 70339/72 A IT70339/72 A IT 70339/72A IT 7033972 A IT7033972 A IT 7033972A IT 975345 B IT975345 B IT 975345B
Authority
IT
Italy
Prior art keywords
regulating
procedure
composition
film stored
film
Prior art date
Application number
IT70339/72A
Other languages
English (en)
Original Assignee
Rca Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rca Corp filed Critical Rca Corp
Application granted granted Critical
Publication of IT975345B publication Critical patent/IT975345B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
IT70339/72A 1971-11-04 1972-10-24 Procedimento per regolare la compo sione di una pellicola depositata IT975345B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US19578471A 1971-11-04 1971-11-04

Publications (1)

Publication Number Publication Date
IT975345B true IT975345B (it) 1974-07-20

Family

ID=22722795

Family Applications (1)

Application Number Title Priority Date Filing Date
IT70339/72A IT975345B (it) 1971-11-04 1972-10-24 Procedimento per regolare la compo sione di una pellicola depositata

Country Status (12)

Country Link
US (1) US3756847A (it)
JP (1) JPS5216467B2 (it)
AU (1) AU464727B2 (it)
BE (1) BE790940A (it)
CA (1) CA975628A (it)
CH (1) CH590935A5 (it)
DE (1) DE2252484A1 (it)
FR (1) FR2156413B1 (it)
GB (1) GB1392865A (it)
IT (1) IT975345B (it)
NL (1) NL7214898A (it)
SE (1) SE379059B (it)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3889019A (en) * 1969-03-13 1975-06-10 United Aircraft Corp Vapor randomization in vacuum deposition of coatings
JPS5137667B2 (it) * 1971-11-13 1976-10-16
US4021277A (en) * 1972-12-07 1977-05-03 Sprague Electric Company Method of forming thin film resistor
JPS5181791A (ja) * 1975-01-13 1976-07-17 Osaka Koon Denki Kk Ionkapureeteinguhoho
US4416912A (en) * 1979-10-13 1983-11-22 The Gillette Company Formation of coatings on cutting edges
US4617192A (en) * 1982-12-21 1986-10-14 At&T Bell Laboratories Process for making optical INP devices
US4472453A (en) * 1983-07-01 1984-09-18 Rca Corporation Process for radiation free electron beam deposition
JPS60251273A (ja) * 1984-05-28 1985-12-11 Mitsubishi Heavy Ind Ltd 真空蒸発装置の蒸発量制御方法
US4842710A (en) * 1987-03-23 1989-06-27 Siemens Aktiengesellschaft Method of making mixed nitride films with at least two metals
US5514229A (en) * 1993-11-24 1996-05-07 Ramot-University Authority For Applied Research And Industrial Development Ltd., Tel Aviv University Method of producing transparent and other electrically conductive materials
US7250196B1 (en) 1999-10-26 2007-07-31 Basic Resources, Inc. System and method for plasma plating
US6503379B1 (en) * 2000-05-22 2003-01-07 Basic Research, Inc. Mobile plating system and method
US6521104B1 (en) * 2000-05-22 2003-02-18 Basic Resources, Inc. Configurable vacuum system and method
US20030180450A1 (en) * 2002-03-22 2003-09-25 Kidd Jerry D. System and method for preventing breaker failure
US20050126497A1 (en) * 2003-09-30 2005-06-16 Kidd Jerry D. Platform assembly and method
US20080057195A1 (en) * 2006-08-31 2008-03-06 United Technologies Corporation Non-line of sight coating technique

Also Published As

Publication number Publication date
JPS5216467B2 (it) 1977-05-10
GB1392865A (en) 1975-05-07
CH590935A5 (it) 1977-08-31
AU464727B2 (en) 1975-09-04
DE2252484A1 (de) 1973-05-10
CA975628A (en) 1975-10-07
SE379059B (it) 1975-09-22
JPS4855670A (it) 1973-08-04
US3756847A (en) 1973-09-04
FR2156413A1 (it) 1973-05-25
AU4778272A (en) 1974-04-26
BE790940A (fr) 1973-03-01
FR2156413B1 (it) 1976-05-21
NL7214898A (it) 1973-05-08

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