JPS5216467B2 - - Google Patents
Info
- Publication number
- JPS5216467B2 JPS5216467B2 JP47110167A JP11016772A JPS5216467B2 JP S5216467 B2 JPS5216467 B2 JP S5216467B2 JP 47110167 A JP47110167 A JP 47110167A JP 11016772 A JP11016772 A JP 11016772A JP S5216467 B2 JPS5216467 B2 JP S5216467B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/548—Controlling the composition
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US19578471A | 1971-11-04 | 1971-11-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4855670A JPS4855670A (ja) | 1973-08-04 |
| JPS5216467B2 true JPS5216467B2 (ja) | 1977-05-10 |
Family
ID=22722795
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47110167A Expired JPS5216467B2 (ja) | 1971-11-04 | 1972-11-02 |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US3756847A (ja) |
| JP (1) | JPS5216467B2 (ja) |
| AU (1) | AU464727B2 (ja) |
| BE (1) | BE790940A (ja) |
| CA (1) | CA975628A (ja) |
| CH (1) | CH590935A5 (ja) |
| DE (1) | DE2252484A1 (ja) |
| FR (1) | FR2156413B1 (ja) |
| GB (1) | GB1392865A (ja) |
| IT (1) | IT975345B (ja) |
| NL (1) | NL7214898A (ja) |
| SE (1) | SE379059B (ja) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3889019A (en) * | 1969-03-13 | 1975-06-10 | United Aircraft Corp | Vapor randomization in vacuum deposition of coatings |
| JPS5137667B2 (ja) * | 1971-11-13 | 1976-10-16 | ||
| US4021277A (en) * | 1972-12-07 | 1977-05-03 | Sprague Electric Company | Method of forming thin film resistor |
| JPS5181791A (ja) * | 1975-01-13 | 1976-07-17 | Osaka Koon Denki Kk | Ionkapureeteinguhoho |
| US4416912A (en) * | 1979-10-13 | 1983-11-22 | The Gillette Company | Formation of coatings on cutting edges |
| US4617192A (en) * | 1982-12-21 | 1986-10-14 | At&T Bell Laboratories | Process for making optical INP devices |
| US4472453A (en) * | 1983-07-01 | 1984-09-18 | Rca Corporation | Process for radiation free electron beam deposition |
| JPS60251273A (ja) * | 1984-05-28 | 1985-12-11 | Mitsubishi Heavy Ind Ltd | 真空蒸発装置の蒸発量制御方法 |
| US4842710A (en) * | 1987-03-23 | 1989-06-27 | Siemens Aktiengesellschaft | Method of making mixed nitride films with at least two metals |
| US5514229A (en) * | 1993-11-24 | 1996-05-07 | Ramot-University Authority For Applied Research And Industrial Development Ltd., Tel Aviv University | Method of producing transparent and other electrically conductive materials |
| US7250196B1 (en) | 1999-10-26 | 2007-07-31 | Basic Resources, Inc. | System and method for plasma plating |
| US6503379B1 (en) * | 2000-05-22 | 2003-01-07 | Basic Research, Inc. | Mobile plating system and method |
| US6521104B1 (en) * | 2000-05-22 | 2003-02-18 | Basic Resources, Inc. | Configurable vacuum system and method |
| US20030180450A1 (en) * | 2002-03-22 | 2003-09-25 | Kidd Jerry D. | System and method for preventing breaker failure |
| US20050126497A1 (en) * | 2003-09-30 | 2005-06-16 | Kidd Jerry D. | Platform assembly and method |
| US20080057195A1 (en) * | 2006-08-31 | 2008-03-06 | United Technologies Corporation | Non-line of sight coating technique |
-
0
- BE BE790940D patent/BE790940A/xx unknown
-
1971
- 1971-11-04 US US00195784A patent/US3756847A/en not_active Expired - Lifetime
-
1972
- 1972-10-04 CA CA153,262A patent/CA975628A/en not_active Expired
- 1972-10-11 SE SE7213094A patent/SE379059B/xx unknown
- 1972-10-12 CH CH1489772A patent/CH590935A5/xx not_active IP Right Cessation
- 1972-10-16 AU AU47782/72A patent/AU464727B2/en not_active Expired
- 1972-10-24 IT IT70339/72A patent/IT975345B/it active
- 1972-10-26 DE DE2252484A patent/DE2252484A1/de active Pending
- 1972-10-30 FR FR7238354A patent/FR2156413B1/fr not_active Expired
- 1972-11-02 JP JP47110167A patent/JPS5216467B2/ja not_active Expired
- 1972-11-03 NL NL7214898A patent/NL7214898A/xx unknown
- 1972-11-03 GB GB5076472A patent/GB1392865A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1392865A (en) | 1975-05-07 |
| CH590935A5 (ja) | 1977-08-31 |
| AU464727B2 (en) | 1975-09-04 |
| DE2252484A1 (de) | 1973-05-10 |
| CA975628A (en) | 1975-10-07 |
| SE379059B (ja) | 1975-09-22 |
| JPS4855670A (ja) | 1973-08-04 |
| US3756847A (en) | 1973-09-04 |
| IT975345B (it) | 1974-07-20 |
| FR2156413A1 (ja) | 1973-05-25 |
| AU4778272A (en) | 1974-04-26 |
| BE790940A (fr) | 1973-03-01 |
| FR2156413B1 (ja) | 1976-05-21 |
| NL7214898A (ja) | 1973-05-08 |