DE2135564C3 - Einrichtung zum Antrieb und zur Halterung eines drehbaren Substrathalters - Google Patents

Einrichtung zum Antrieb und zur Halterung eines drehbaren Substrathalters

Info

Publication number
DE2135564C3
DE2135564C3 DE2135564A DE2135564A DE2135564C3 DE 2135564 C3 DE2135564 C3 DE 2135564C3 DE 2135564 A DE2135564 A DE 2135564A DE 2135564 A DE2135564 A DE 2135564A DE 2135564 C3 DE2135564 C3 DE 2135564C3
Authority
DE
Germany
Prior art keywords
substrate holder
rotatable
substrates
rotation
driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2135564A
Other languages
German (de)
English (en)
Other versions
DE2135564A1 (de
DE2135564B2 (de
Inventor
Richard Ross Milton Vt. Phinney (V.St.A.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE2135564A1 publication Critical patent/DE2135564A1/de
Publication of DE2135564B2 publication Critical patent/DE2135564B2/de
Application granted granted Critical
Publication of DE2135564C3 publication Critical patent/DE2135564C3/de
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H33/00—Gearings based on repeated accumulation and delivery of energy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/17—Socket type
    • Y10T279/17923—Transverse pin
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/17—Socket type
    • Y10T279/17931—Screw threaded

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Transmission Devices (AREA)
DE2135564A 1970-08-13 1971-07-16 Einrichtung zum Antrieb und zur Halterung eines drehbaren Substrathalters Expired DE2135564C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6335170A 1970-08-13 1970-08-13

Publications (3)

Publication Number Publication Date
DE2135564A1 DE2135564A1 (de) 1972-02-17
DE2135564B2 DE2135564B2 (de) 1974-02-07
DE2135564C3 true DE2135564C3 (de) 1974-09-19

Family

ID=22048614

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2135564A Expired DE2135564C3 (de) 1970-08-13 1971-07-16 Einrichtung zum Antrieb und zur Halterung eines drehbaren Substrathalters

Country Status (6)

Country Link
US (1) US3645229A (https=)
JP (1) JPS5035627B1 (https=)
CA (1) CA953099A (https=)
DE (1) DE2135564C3 (https=)
FR (1) FR2101512A5 (https=)
GB (1) GB1348708A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4246996A (en) * 1978-11-20 1981-01-27 Borg-Warner Corporation Screw operated coupling
US4583488A (en) * 1984-03-23 1986-04-22 International Business Machines Corporation Variable axis rotary drive vacuum deposition system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2885232A (en) * 1958-02-05 1959-05-05 Sperry Rand Corp Coupling
US2960344A (en) * 1959-09-23 1960-11-15 Ettco Tool & Machine Co Inc Adjustable collet-type chuck
US3286776A (en) * 1964-06-23 1966-11-22 Kenneth Conklin Combination power hand tool

Also Published As

Publication number Publication date
CA953099A (en) 1974-08-20
US3645229A (en) 1972-02-29
DE2135564A1 (de) 1972-02-17
DE2135564B2 (de) 1974-02-07
FR2101512A5 (https=) 1972-03-31
GB1348708A (en) 1974-03-20
JPS5035627B1 (https=) 1975-11-18

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977
8339 Ceased/non-payment of the annual fee