GB1348708A - Coupling mechanism - Google Patents

Coupling mechanism

Info

Publication number
GB1348708A
GB1348708A GB3255471A GB3255471A GB1348708A GB 1348708 A GB1348708 A GB 1348708A GB 3255471 A GB3255471 A GB 3255471A GB 3255471 A GB3255471 A GB 3255471A GB 1348708 A GB1348708 A GB 1348708A
Authority
GB
United Kingdom
Prior art keywords
shaft
holder
rotation
rotate
changing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3255471A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1348708A publication Critical patent/GB1348708A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H33/00—Gearings based on repeated accumulation and delivery of energy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/17—Socket type
    • Y10T279/17923—Transverse pin
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/17—Socket type
    • Y10T279/17931—Screw threaded

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

1348708 Shaft couplings INTERNATIONAL BUSINESS MACHINES CORP 12 July 1971 [13 Aug 1970] 32554/71 Heading F2U A coupling mechanism includes drive means (e.g. a motor connected to a shaft 128) to rotate a first element 190, 194, 212 into engagement with a second element (e.g. a holder 300 for semi-conductor substrates in a heated vacuum deposition apparatus 100, 110, 112) as a result of whose inertia, the first element is then moved axially without rotation and is subsequently rotated again with the second element. As shown the holder 300 is at rest upon a support 108. Upon rotation of the shaft 128, element 190 is rotated until arms 212 and 214 engage braking element 190. A nut 170 is then lowered to engage a plate 154 fixed via a part 140 to the shaft 128, whereupon the elements 190 and 300 are raised off the support 108 and start to rotate as the inertia of the holder 300, effectively increased by a spring 240, is overcome. The height of the holder 300 when rotating with the shaft 128 can be varied by changing the spring 240, or by changing the speed of rotation (e.g. from 8 r.p.m. to 16 r.p.m.). When vacuum deposition is finished the mechanism is disconnected by reversing the motor.
GB3255471A 1970-08-13 1971-07-12 Coupling mechanism Expired GB1348708A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6335170A 1970-08-13 1970-08-13

Publications (1)

Publication Number Publication Date
GB1348708A true GB1348708A (en) 1974-03-20

Family

ID=22048614

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3255471A Expired GB1348708A (en) 1970-08-13 1971-07-12 Coupling mechanism

Country Status (6)

Country Link
US (1) US3645229A (en)
JP (1) JPS5035627B1 (en)
CA (1) CA953099A (en)
DE (1) DE2135564C3 (en)
FR (1) FR2101512A5 (en)
GB (1) GB1348708A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4246996A (en) * 1978-11-20 1981-01-27 Borg-Warner Corporation Screw operated coupling
US4583488A (en) * 1984-03-23 1986-04-22 International Business Machines Corporation Variable axis rotary drive vacuum deposition system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2885232A (en) * 1958-02-05 1959-05-05 Sperry Rand Corp Coupling
US2960344A (en) * 1959-09-23 1960-11-15 Ettco Tool & Machine Co Inc Adjustable collet-type chuck
US3286776A (en) * 1964-06-23 1966-11-22 Kenneth Conklin Combination power hand tool

Also Published As

Publication number Publication date
CA953099A (en) 1974-08-20
DE2135564A1 (en) 1972-02-17
JPS5035627B1 (en) 1975-11-18
US3645229A (en) 1972-02-29
DE2135564B2 (en) 1974-02-07
FR2101512A5 (en) 1972-03-31
DE2135564C3 (en) 1974-09-19

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee