DE2131722A1 - Anordnung zum Eindiffundieren von Dotierstoffen - Google Patents

Anordnung zum Eindiffundieren von Dotierstoffen

Info

Publication number
DE2131722A1
DE2131722A1 DE19712131722 DE2131722A DE2131722A1 DE 2131722 A1 DE2131722 A1 DE 2131722A1 DE 19712131722 DE19712131722 DE 19712131722 DE 2131722 A DE2131722 A DE 2131722A DE 2131722 A1 DE2131722 A1 DE 2131722A1
Authority
DE
Germany
Prior art keywords
tubes
semiconductor wafers
diameter
tube
smaller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19712131722
Other languages
German (de)
English (en)
Inventor
Wolfgang Dipl-Chem Dr Dietze
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19712131722 priority Critical patent/DE2131722A1/de
Priority to NL7204164A priority patent/NL7204164A/xx
Priority to CH472872A priority patent/CH570198A5/xx
Priority to AT365772A priority patent/AT336683B/de
Priority to GB2265272A priority patent/GB1345995A/en
Priority to US00261942A priority patent/US3805734A/en
Priority to FR7221816A priority patent/FR2143043B1/fr
Priority to IT25975/72A priority patent/IT959878B/it
Priority to SE7208353A priority patent/SE374496B/xx
Priority to CA145,521A priority patent/CA970885A/en
Publication of DE2131722A1 publication Critical patent/DE2131722A1/de
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S118/00—Coating apparatus
    • Y10S118/90—Semiconductor vapor doping

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE19712131722 1971-06-25 1971-06-25 Anordnung zum Eindiffundieren von Dotierstoffen Pending DE2131722A1 (de)

Priority Applications (10)

Application Number Priority Date Filing Date Title
DE19712131722 DE2131722A1 (de) 1971-06-25 1971-06-25 Anordnung zum Eindiffundieren von Dotierstoffen
NL7204164A NL7204164A (xx) 1971-06-25 1972-03-28
CH472872A CH570198A5 (xx) 1971-06-25 1972-03-29
AT365772A AT336683B (de) 1971-06-25 1972-04-26 Anordnung zum eindiffundieren von dotierstoffen
GB2265272A GB1345995A (en) 1971-06-25 1972-05-15 Diffusion of dopants into semiconductor wafers
US00261942A US3805734A (en) 1971-06-25 1972-06-12 Device for the diffusion of doping material
FR7221816A FR2143043B1 (xx) 1971-06-25 1972-06-16
IT25975/72A IT959878B (it) 1971-06-25 1972-06-21 Disposizione per incorporare median te diffusione sostanze di drogaggio
SE7208353A SE374496B (xx) 1971-06-25 1972-06-22
CA145,521A CA970885A (en) 1971-06-25 1972-06-23 Apparatus for diffusing a dopant into a plurality of semi-conductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712131722 DE2131722A1 (de) 1971-06-25 1971-06-25 Anordnung zum Eindiffundieren von Dotierstoffen

Publications (1)

Publication Number Publication Date
DE2131722A1 true DE2131722A1 (de) 1972-12-28

Family

ID=5811827

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712131722 Pending DE2131722A1 (de) 1971-06-25 1971-06-25 Anordnung zum Eindiffundieren von Dotierstoffen

Country Status (10)

Country Link
US (1) US3805734A (xx)
AT (1) AT336683B (xx)
CA (1) CA970885A (xx)
CH (1) CH570198A5 (xx)
DE (1) DE2131722A1 (xx)
FR (1) FR2143043B1 (xx)
GB (1) GB1345995A (xx)
IT (1) IT959878B (xx)
NL (1) NL7204164A (xx)
SE (1) SE374496B (xx)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3020264A1 (de) * 1980-05-28 1981-12-03 Siemens AG, 1000 Berlin und 8000 München Dichter, gekuehlter verschluss fuer prozessrohre, insbesondere in der halbleiterfertigung
EP0263270B1 (de) * 1986-09-30 1992-11-11 Siemens Aktiengesellschaft Verfahren zum Erzeugen eines p-dotierten Halbleitergebiets in einem n-leitenden Halbleiterkörper

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6700080A (xx) * 1966-01-03 1967-07-04
DE1521481B1 (de) * 1965-10-22 1969-12-04 Siemens Ag Anordnung zur Waermebehandlung von scheibenfoermigen Halbleiterkoerpern
DE1521494B1 (de) * 1966-02-25 1970-11-26 Siemens Ag Vorrichtung zum Eindiffundieren von Fremdstoffen in Halbleiterkoerper
FR1597833A (xx) * 1968-01-15 1970-06-29

Also Published As

Publication number Publication date
IT959878B (it) 1973-11-10
GB1345995A (en) 1974-02-06
NL7204164A (xx) 1972-12-28
SE374496B (xx) 1975-03-10
ATA365772A (de) 1976-09-15
US3805734A (en) 1974-04-23
FR2143043B1 (xx) 1978-03-03
FR2143043A1 (xx) 1973-02-02
CH570198A5 (xx) 1975-12-15
CA970885A (en) 1975-07-08
AT336683B (de) 1977-05-25

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Legal Events

Date Code Title Description
OHA Expiration of time for request for examination