IT959878B - Disposizione per incorporare median te diffusione sostanze di drogaggio - Google Patents

Disposizione per incorporare median te diffusione sostanze di drogaggio

Info

Publication number
IT959878B
IT959878B IT25975/72A IT2597572A IT959878B IT 959878 B IT959878 B IT 959878B IT 25975/72 A IT25975/72 A IT 25975/72A IT 2597572 A IT2597572 A IT 2597572A IT 959878 B IT959878 B IT 959878B
Authority
IT
Italy
Prior art keywords
dissemination
provision
drug substances
incorporate drug
incorporate
Prior art date
Application number
IT25975/72A
Other languages
English (en)
Italian (it)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of IT959878B publication Critical patent/IT959878B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S118/00—Coating apparatus
    • Y10S118/90—Semiconductor vapor doping

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
IT25975/72A 1971-06-25 1972-06-21 Disposizione per incorporare median te diffusione sostanze di drogaggio IT959878B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712131722 DE2131722A1 (de) 1971-06-25 1971-06-25 Anordnung zum Eindiffundieren von Dotierstoffen

Publications (1)

Publication Number Publication Date
IT959878B true IT959878B (it) 1973-11-10

Family

ID=5811827

Family Applications (1)

Application Number Title Priority Date Filing Date
IT25975/72A IT959878B (it) 1971-06-25 1972-06-21 Disposizione per incorporare median te diffusione sostanze di drogaggio

Country Status (10)

Country Link
US (1) US3805734A (xx)
AT (1) AT336683B (xx)
CA (1) CA970885A (xx)
CH (1) CH570198A5 (xx)
DE (1) DE2131722A1 (xx)
FR (1) FR2143043B1 (xx)
GB (1) GB1345995A (xx)
IT (1) IT959878B (xx)
NL (1) NL7204164A (xx)
SE (1) SE374496B (xx)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3020264A1 (de) * 1980-05-28 1981-12-03 Siemens AG, 1000 Berlin und 8000 München Dichter, gekuehlter verschluss fuer prozessrohre, insbesondere in der halbleiterfertigung
DE3782608D1 (de) * 1986-09-30 1992-12-17 Siemens Ag Verfahren zum erzeugen eines p-dotierten halbleitergebiets in einem n-leitenden halbleiterkoerper.

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6700080A (xx) * 1966-01-03 1967-07-04
DE1521481B1 (de) * 1965-10-22 1969-12-04 Siemens Ag Anordnung zur Waermebehandlung von scheibenfoermigen Halbleiterkoerpern
DE1521494B1 (de) * 1966-02-25 1970-11-26 Siemens Ag Vorrichtung zum Eindiffundieren von Fremdstoffen in Halbleiterkoerper
FR1597833A (xx) * 1968-01-15 1970-06-29

Also Published As

Publication number Publication date
FR2143043B1 (xx) 1978-03-03
FR2143043A1 (xx) 1973-02-02
ATA365772A (de) 1976-09-15
NL7204164A (xx) 1972-12-28
AT336683B (de) 1977-05-25
CH570198A5 (xx) 1975-12-15
US3805734A (en) 1974-04-23
DE2131722A1 (de) 1972-12-28
GB1345995A (en) 1974-02-06
SE374496B (xx) 1975-03-10
CA970885A (en) 1975-07-08

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