CA970885A - Apparatus for diffusing a dopant into a plurality of semi-conductor wafers - Google Patents

Apparatus for diffusing a dopant into a plurality of semi-conductor wafers

Info

Publication number
CA970885A
CA970885A CA145,521A CA145521A CA970885A CA 970885 A CA970885 A CA 970885A CA 145521 A CA145521 A CA 145521A CA 970885 A CA970885 A CA 970885A
Authority
CA
Canada
Prior art keywords
dopant
diffusing
semi
conductor wafers
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA145,521A
Other languages
English (en)
Other versions
CA145521S (en
Inventor
Wolfgang Dietze
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of CA970885A publication Critical patent/CA970885A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S118/00—Coating apparatus
    • Y10S118/90—Semiconductor vapor doping

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CA145,521A 1971-06-25 1972-06-23 Apparatus for diffusing a dopant into a plurality of semi-conductor wafers Expired CA970885A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712131722 DE2131722A1 (de) 1971-06-25 1971-06-25 Anordnung zum Eindiffundieren von Dotierstoffen

Publications (1)

Publication Number Publication Date
CA970885A true CA970885A (en) 1975-07-08

Family

ID=5811827

Family Applications (1)

Application Number Title Priority Date Filing Date
CA145,521A Expired CA970885A (en) 1971-06-25 1972-06-23 Apparatus for diffusing a dopant into a plurality of semi-conductor wafers

Country Status (10)

Country Link
US (1) US3805734A (xx)
AT (1) AT336683B (xx)
CA (1) CA970885A (xx)
CH (1) CH570198A5 (xx)
DE (1) DE2131722A1 (xx)
FR (1) FR2143043B1 (xx)
GB (1) GB1345995A (xx)
IT (1) IT959878B (xx)
NL (1) NL7204164A (xx)
SE (1) SE374496B (xx)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3020264A1 (de) * 1980-05-28 1981-12-03 Siemens AG, 1000 Berlin und 8000 München Dichter, gekuehlter verschluss fuer prozessrohre, insbesondere in der halbleiterfertigung
DE3782608D1 (de) * 1986-09-30 1992-12-17 Siemens Ag Verfahren zum erzeugen eines p-dotierten halbleitergebiets in einem n-leitenden halbleiterkoerper.

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6700080A (xx) * 1966-01-03 1967-07-04
DE1521481B1 (de) * 1965-10-22 1969-12-04 Siemens Ag Anordnung zur Waermebehandlung von scheibenfoermigen Halbleiterkoerpern
DE1521494B1 (de) * 1966-02-25 1970-11-26 Siemens Ag Vorrichtung zum Eindiffundieren von Fremdstoffen in Halbleiterkoerper
FR1597833A (xx) * 1968-01-15 1970-06-29

Also Published As

Publication number Publication date
FR2143043B1 (xx) 1978-03-03
FR2143043A1 (xx) 1973-02-02
ATA365772A (de) 1976-09-15
NL7204164A (xx) 1972-12-28
AT336683B (de) 1977-05-25
CH570198A5 (xx) 1975-12-15
US3805734A (en) 1974-04-23
DE2131722A1 (de) 1972-12-28
GB1345995A (en) 1974-02-06
IT959878B (it) 1973-11-10
SE374496B (xx) 1975-03-10

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