AT336683B - Anordnung zum eindiffundieren von dotierstoffen - Google Patents

Anordnung zum eindiffundieren von dotierstoffen

Info

Publication number
AT336683B
AT336683B AT365772A AT365772A AT336683B AT 336683 B AT336683 B AT 336683B AT 365772 A AT365772 A AT 365772A AT 365772 A AT365772 A AT 365772A AT 336683 B AT336683 B AT 336683B
Authority
AT
Austria
Prior art keywords
doppants
diffusing
arrangement
diffusing doppants
Prior art date
Application number
AT365772A
Other languages
English (en)
Other versions
ATA365772A (de
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of ATA365772A publication Critical patent/ATA365772A/de
Application granted granted Critical
Publication of AT336683B publication Critical patent/AT336683B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S118/00—Coating apparatus
    • Y10S118/90—Semiconductor vapor doping

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
AT365772A 1971-06-25 1972-04-26 Anordnung zum eindiffundieren von dotierstoffen AT336683B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712131722 DE2131722A1 (de) 1971-06-25 1971-06-25 Anordnung zum Eindiffundieren von Dotierstoffen

Publications (2)

Publication Number Publication Date
ATA365772A ATA365772A (de) 1976-09-15
AT336683B true AT336683B (de) 1977-05-25

Family

ID=5811827

Family Applications (1)

Application Number Title Priority Date Filing Date
AT365772A AT336683B (de) 1971-06-25 1972-04-26 Anordnung zum eindiffundieren von dotierstoffen

Country Status (10)

Country Link
US (1) US3805734A (de)
AT (1) AT336683B (de)
CA (1) CA970885A (de)
CH (1) CH570198A5 (de)
DE (1) DE2131722A1 (de)
FR (1) FR2143043B1 (de)
GB (1) GB1345995A (de)
IT (1) IT959878B (de)
NL (1) NL7204164A (de)
SE (1) SE374496B (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3020264A1 (de) * 1980-05-28 1981-12-03 Siemens AG, 1000 Berlin und 8000 München Dichter, gekuehlter verschluss fuer prozessrohre, insbesondere in der halbleiterfertigung
DE3782608D1 (de) * 1986-09-30 1992-12-17 Siemens Ag Verfahren zum erzeugen eines p-dotierten halbleitergebiets in einem n-leitenden halbleiterkoerper.

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6700080A (de) * 1966-01-03 1967-07-04
DE1521481B1 (de) * 1965-10-22 1969-12-04 Siemens Ag Anordnung zur Waermebehandlung von scheibenfoermigen Halbleiterkoerpern
DE1521494B1 (de) * 1966-02-25 1970-11-26 Siemens Ag Vorrichtung zum Eindiffundieren von Fremdstoffen in Halbleiterkoerper
FR1597833A (de) * 1968-01-15 1970-06-29

Also Published As

Publication number Publication date
FR2143043A1 (de) 1973-02-02
SE374496B (de) 1975-03-10
ATA365772A (de) 1976-09-15
CH570198A5 (de) 1975-12-15
CA970885A (en) 1975-07-08
GB1345995A (en) 1974-02-06
IT959878B (it) 1973-11-10
NL7204164A (de) 1972-12-28
US3805734A (en) 1974-04-23
FR2143043B1 (de) 1978-03-03
DE2131722A1 (de) 1972-12-28

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee