NL7204164A - - Google Patents
Info
- Publication number
- NL7204164A NL7204164A NL7204164A NL7204164A NL7204164A NL 7204164 A NL7204164 A NL 7204164A NL 7204164 A NL7204164 A NL 7204164A NL 7204164 A NL7204164 A NL 7204164A NL 7204164 A NL7204164 A NL 7204164A
- Authority
- NL
- Netherlands
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S118/00—Coating apparatus
- Y10S118/90—Semiconductor vapor doping
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19712131722 DE2131722A1 (de) | 1971-06-25 | 1971-06-25 | Anordnung zum Eindiffundieren von Dotierstoffen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7204164A true NL7204164A (de) | 1972-12-28 |
Family
ID=5811827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7204164A NL7204164A (de) | 1971-06-25 | 1972-03-28 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US3805734A (de) |
| AT (1) | AT336683B (de) |
| CA (1) | CA970885A (de) |
| CH (1) | CH570198A5 (de) |
| DE (1) | DE2131722A1 (de) |
| FR (1) | FR2143043B1 (de) |
| GB (1) | GB1345995A (de) |
| IT (1) | IT959878B (de) |
| NL (1) | NL7204164A (de) |
| SE (1) | SE374496B (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3020264A1 (de) * | 1980-05-28 | 1981-12-03 | Siemens AG, 1000 Berlin und 8000 München | Dichter, gekuehlter verschluss fuer prozessrohre, insbesondere in der halbleiterfertigung |
| DE3782608D1 (de) * | 1986-09-30 | 1992-12-17 | Siemens Ag | Verfahren zum erzeugen eines p-dotierten halbleitergebiets in einem n-leitenden halbleiterkoerper. |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL6700080A (de) * | 1966-01-03 | 1967-07-04 | ||
| DE1521481B1 (de) * | 1965-10-22 | 1969-12-04 | Siemens Ag | Anordnung zur Waermebehandlung von scheibenfoermigen Halbleiterkoerpern |
| DE1521494B1 (de) * | 1966-02-25 | 1970-11-26 | Siemens Ag | Vorrichtung zum Eindiffundieren von Fremdstoffen in Halbleiterkoerper |
| FR1597833A (de) * | 1968-01-15 | 1970-06-29 |
-
1971
- 1971-06-25 DE DE19712131722 patent/DE2131722A1/de active Pending
-
1972
- 1972-03-28 NL NL7204164A patent/NL7204164A/xx unknown
- 1972-03-29 CH CH472872A patent/CH570198A5/xx not_active IP Right Cessation
- 1972-04-26 AT AT365772A patent/AT336683B/de not_active IP Right Cessation
- 1972-05-15 GB GB2265272A patent/GB1345995A/en not_active Expired
- 1972-06-12 US US00261942A patent/US3805734A/en not_active Expired - Lifetime
- 1972-06-16 FR FR7221816A patent/FR2143043B1/fr not_active Expired
- 1972-06-21 IT IT25975/72A patent/IT959878B/it active
- 1972-06-22 SE SE7208353A patent/SE374496B/xx unknown
- 1972-06-23 CA CA145,521A patent/CA970885A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| ATA365772A (de) | 1976-09-15 |
| SE374496B (de) | 1975-03-10 |
| US3805734A (en) | 1974-04-23 |
| DE2131722A1 (de) | 1972-12-28 |
| IT959878B (it) | 1973-11-10 |
| FR2143043A1 (de) | 1973-02-02 |
| CA970885A (en) | 1975-07-08 |
| CH570198A5 (de) | 1975-12-15 |
| FR2143043B1 (de) | 1978-03-03 |
| GB1345995A (en) | 1974-02-06 |
| AT336683B (de) | 1977-05-25 |