FR2143043A1 - - Google Patents

Info

Publication number
FR2143043A1
FR2143043A1 FR7221816A FR7221816A FR2143043A1 FR 2143043 A1 FR2143043 A1 FR 2143043A1 FR 7221816 A FR7221816 A FR 7221816A FR 7221816 A FR7221816 A FR 7221816A FR 2143043 A1 FR2143043 A1 FR 2143043A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7221816A
Other languages
French (fr)
Other versions
FR2143043B1 (xx
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of FR2143043A1 publication Critical patent/FR2143043A1/fr
Application granted granted Critical
Publication of FR2143043B1 publication Critical patent/FR2143043B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S118/00—Coating apparatus
    • Y10S118/90—Semiconductor vapor doping

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR7221816A 1971-06-25 1972-06-16 Expired FR2143043B1 (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712131722 DE2131722A1 (de) 1971-06-25 1971-06-25 Anordnung zum Eindiffundieren von Dotierstoffen

Publications (2)

Publication Number Publication Date
FR2143043A1 true FR2143043A1 (xx) 1973-02-02
FR2143043B1 FR2143043B1 (xx) 1978-03-03

Family

ID=5811827

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7221816A Expired FR2143043B1 (xx) 1971-06-25 1972-06-16

Country Status (10)

Country Link
US (1) US3805734A (xx)
AT (1) AT336683B (xx)
CA (1) CA970885A (xx)
CH (1) CH570198A5 (xx)
DE (1) DE2131722A1 (xx)
FR (1) FR2143043B1 (xx)
GB (1) GB1345995A (xx)
IT (1) IT959878B (xx)
NL (1) NL7204164A (xx)
SE (1) SE374496B (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0040646A1 (de) * 1980-05-28 1981-12-02 Siemens Aktiengesellschaft Dichter, gekühlter Verschluss für Prozessrohre, insbesondere in der Halbleiterfertigung

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0263270B1 (de) * 1986-09-30 1992-11-11 Siemens Aktiengesellschaft Verfahren zum Erzeugen eines p-dotierten Halbleitergebiets in einem n-leitenden Halbleiterkörper

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6700080A (xx) * 1966-01-03 1967-07-04
DE1521481B1 (de) * 1965-10-22 1969-12-04 Siemens Ag Anordnung zur Waermebehandlung von scheibenfoermigen Halbleiterkoerpern
DE1521494B1 (de) * 1966-02-25 1970-11-26 Siemens Ag Vorrichtung zum Eindiffundieren von Fremdstoffen in Halbleiterkoerper
FR1597833A (xx) * 1968-01-15 1970-06-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0040646A1 (de) * 1980-05-28 1981-12-02 Siemens Aktiengesellschaft Dichter, gekühlter Verschluss für Prozessrohre, insbesondere in der Halbleiterfertigung

Also Published As

Publication number Publication date
IT959878B (it) 1973-11-10
GB1345995A (en) 1974-02-06
NL7204164A (xx) 1972-12-28
DE2131722A1 (de) 1972-12-28
SE374496B (xx) 1975-03-10
ATA365772A (de) 1976-09-15
US3805734A (en) 1974-04-23
FR2143043B1 (xx) 1978-03-03
CH570198A5 (xx) 1975-12-15
CA970885A (en) 1975-07-08
AT336683B (de) 1977-05-25

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Legal Events

Date Code Title Description
ST Notification of lapse