DE2060333C3 - Verfahren zur Herstellung einer Halbleiteranordnung mit einem Feldeffekttransistor mit isolierter Gateelektrode - Google Patents
Verfahren zur Herstellung einer Halbleiteranordnung mit einem Feldeffekttransistor mit isolierter GateelektrodeInfo
- Publication number
- DE2060333C3 DE2060333C3 DE2060333A DE2060333A DE2060333C3 DE 2060333 C3 DE2060333 C3 DE 2060333C3 DE 2060333 A DE2060333 A DE 2060333A DE 2060333 A DE2060333 A DE 2060333A DE 2060333 C3 DE2060333 C3 DE 2060333C3
- Authority
- DE
- Germany
- Prior art keywords
- layer
- gate electrode
- source
- electrode layers
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title claims description 56
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 230000005669 field effect Effects 0.000 title claims description 14
- 229910052782 aluminium Inorganic materials 0.000 claims description 73
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 73
- 238000000034 method Methods 0.000 claims description 40
- 150000002500 ions Chemical class 0.000 claims description 31
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 30
- 229910052750 molybdenum Inorganic materials 0.000 claims description 29
- 239000011733 molybdenum Substances 0.000 claims description 29
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 22
- 239000011810 insulating material Substances 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 229910052759 nickel Inorganic materials 0.000 claims description 11
- 238000010849 ion bombardment Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 18
- 238000002513 implantation Methods 0.000 description 18
- 229910052710 silicon Inorganic materials 0.000 description 18
- 239000010703 silicon Substances 0.000 description 18
- -1 boron ions Chemical class 0.000 description 15
- 238000005530 etching Methods 0.000 description 15
- 229910052796 boron Inorganic materials 0.000 description 14
- ZXEYZECDXFPJRJ-UHFFFAOYSA-N $l^{3}-silane;platinum Chemical compound [SiH3].[Pt] ZXEYZECDXFPJRJ-UHFFFAOYSA-N 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 9
- 239000002131 composite material Substances 0.000 description 9
- 229910021339 platinum silicide Inorganic materials 0.000 description 9
- 230000000873 masking effect Effects 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000005468 ion implantation Methods 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000000137 annealing Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 210000004027 cell Anatomy 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 210000002969 egg yolk Anatomy 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000012549 training Methods 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/02—Contacts, special
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/053—Field effect transistors fets
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB6290969 | 1969-12-24 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2060333A1 DE2060333A1 (de) | 1971-07-01 |
| DE2060333B2 DE2060333B2 (de) | 1977-10-13 |
| DE2060333C3 true DE2060333C3 (de) | 1978-06-01 |
Family
ID=10488614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2060333A Expired DE2060333C3 (de) | 1969-12-24 | 1970-12-08 | Verfahren zur Herstellung einer Halbleiteranordnung mit einem Feldeffekttransistor mit isolierter Gateelektrode |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US3739237A (es) |
| JP (1) | JPS4827506B1 (es) |
| AT (1) | AT323809B (es) |
| BE (1) | BE760707A (es) |
| CH (1) | CH519791A (es) |
| DE (1) | DE2060333C3 (es) |
| ES (1) | ES386734A1 (es) |
| FR (1) | FR2073494B1 (es) |
| GB (1) | GB1289740A (es) |
| NL (1) | NL7018547A (es) |
| SE (1) | SE355696B (es) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE28952E (en) * | 1971-03-17 | 1976-08-31 | Rca Corporation | Shaped riser on substrate step for promoting metal film continuity |
| FR2184535B1 (es) * | 1972-05-19 | 1980-03-21 | Commissariat Energie Atomique | |
| US3895392A (en) * | 1973-04-05 | 1975-07-15 | Signetics Corp | Bipolar transistor structure having ion implanted region and method |
| US3947866A (en) * | 1973-06-25 | 1976-03-30 | Signetics Corporation | Ion implanted resistor having controlled temperature coefficient and method |
| US4065847A (en) * | 1974-01-04 | 1978-01-03 | Commissariat A L'energie Atomique | Method of fabrication of a charge-coupled device |
| FR2257145B1 (es) * | 1974-01-04 | 1976-11-26 | Commissariat Energie Atomique | |
| JPS5532032B2 (es) * | 1975-02-20 | 1980-08-22 | ||
| JPS52156576A (en) * | 1976-06-23 | 1977-12-27 | Hitachi Ltd | Production of mis semiconductor device |
| DE2631873C2 (de) * | 1976-07-15 | 1986-07-31 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur Herstellung eines Halbleiterbauelements mit einem Schottky-Kontakt auf einem zu einem anderen Bereich justierten Gatebereich und mit kleinem Serienwiderstand |
| US4224733A (en) * | 1977-10-11 | 1980-09-30 | Fujitsu Limited | Ion implantation method |
| US4190466A (en) * | 1977-12-22 | 1980-02-26 | International Business Machines Corporation | Method for making a bipolar transistor structure utilizing self-passivating diffusion sources |
| JPS5553462A (en) * | 1978-10-13 | 1980-04-18 | Int Rectifier Corp | Mosfet element |
| US5191396B1 (en) * | 1978-10-13 | 1995-12-26 | Int Rectifier Corp | High power mosfet with low on-resistance and high breakdown voltage |
| US4523368A (en) * | 1980-03-03 | 1985-06-18 | Raytheon Company | Semiconductor devices and manufacturing methods |
| JPS5827363A (ja) * | 1981-08-10 | 1983-02-18 | Fujitsu Ltd | 電界効果トランジスタの製造法 |
| US4499653A (en) * | 1983-11-03 | 1985-02-19 | Westinghouse Electric Corp. | Small dimension field effect transistor using phosphorous doped silicon glass reflow process |
| NL8400789A (nl) * | 1984-03-13 | 1985-10-01 | Philips Nv | Werkwijze omvattende het gelijktijdig vervaardigen van halfgeleidergebieden met verschillende dotering. |
| US4748103A (en) * | 1986-03-21 | 1988-05-31 | Advanced Power Technology | Mask-surrogate semiconductor process employing dopant protective region |
| US5139869A (en) * | 1988-09-01 | 1992-08-18 | Wolfgang Euen | Thin dielectric layer on a substrate |
| US5169796A (en) * | 1991-09-19 | 1992-12-08 | Teledyne Industries, Inc. | Process for fabricating self-aligned metal gate field effect transistors |
| US5869371A (en) * | 1995-06-07 | 1999-02-09 | Stmicroelectronics, Inc. | Structure and process for reducing the on-resistance of mos-gated power devices |
| US5843827A (en) * | 1996-09-30 | 1998-12-01 | Lucent Technologies Inc. | Method of reducing dielectric damage from plasma etch charging |
| US5869727A (en) * | 1997-08-08 | 1999-02-09 | Osi Specialties, Inc. | Vacuum process for the manufacture of siloxane-oxyalkylene copolymers |
| JP3769208B2 (ja) * | 2001-06-04 | 2006-04-19 | 株式会社東芝 | 半導体装置の製造方法と半導体装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3451912A (en) * | 1966-07-15 | 1969-06-24 | Ibm | Schottky-barrier diode formed by sputter-deposition processes |
| US3472712A (en) * | 1966-10-27 | 1969-10-14 | Hughes Aircraft Co | Field-effect device with insulated gate |
| GB1244225A (en) * | 1968-12-31 | 1971-08-25 | Associated Semiconductor Mft | Improvements in and relating to methods of manufacturing semiconductor devices |
-
1969
- 1969-12-24 GB GB6290969A patent/GB1289740A/en not_active Expired
-
1970
- 1970-12-08 DE DE2060333A patent/DE2060333C3/de not_active Expired
- 1970-12-18 US US00099616A patent/US3739237A/en not_active Expired - Lifetime
- 1970-12-19 NL NL7018547A patent/NL7018547A/xx unknown
- 1970-12-21 AT AT1146770A patent/AT323809B/de not_active IP Right Cessation
- 1970-12-21 SE SE17311/70A patent/SE355696B/xx unknown
- 1970-12-21 JP JP45115000A patent/JPS4827506B1/ja active Pending
- 1970-12-21 CH CH1888570A patent/CH519791A/de not_active IP Right Cessation
- 1970-12-22 ES ES386734A patent/ES386734A1/es not_active Expired
- 1970-12-22 BE BE760707A patent/BE760707A/xx unknown
- 1970-12-23 FR FR7046397A patent/FR2073494B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US3739237A (en) | 1973-06-12 |
| GB1289740A (es) | 1972-09-20 |
| DE2060333A1 (de) | 1971-07-01 |
| FR2073494B1 (es) | 1975-01-10 |
| DE2060333B2 (de) | 1977-10-13 |
| FR2073494A1 (es) | 1971-10-01 |
| SE355696B (es) | 1973-04-30 |
| NL7018547A (es) | 1971-06-28 |
| BE760707A (fr) | 1971-06-22 |
| ES386734A1 (es) | 1973-03-16 |
| AT323809B (de) | 1975-07-25 |
| CH519791A (de) | 1972-02-29 |
| JPS4827506B1 (es) | 1973-08-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| 8339 | Ceased/non-payment of the annual fee |