DE2037173A1 - Anordnung zum Eindiffundieren von Dotierungsstoffen in Scheiben aus Halb leitermaterial - Google Patents

Anordnung zum Eindiffundieren von Dotierungsstoffen in Scheiben aus Halb leitermaterial

Info

Publication number
DE2037173A1
DE2037173A1 DE19702037173 DE2037173A DE2037173A1 DE 2037173 A1 DE2037173 A1 DE 2037173A1 DE 19702037173 DE19702037173 DE 19702037173 DE 2037173 A DE2037173 A DE 2037173A DE 2037173 A1 DE2037173 A1 DE 2037173A1
Authority
DE
Germany
Prior art keywords
rod
arrangement according
semiconductor wafers
tube
recesses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19702037173
Other languages
German (de)
English (en)
Inventor
Konrad Dipl Chem Dr phil nat 8011 Vaterstetten Dietze Wolfgang Dipl Chem Dr rer nat Suß Manfred 8000 München Reuschel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19702037173 priority Critical patent/DE2037173A1/de
Priority to JP12193270A priority patent/JPS4915102B1/ja
Priority to NL7107778A priority patent/NL7107778A/xx
Priority to CH867371A priority patent/CH561082A5/xx
Priority to GB2860671A priority patent/GB1312226A/en
Priority to FR7126290A priority patent/FR2103051A5/fr
Priority to CA119193A priority patent/CA932481A/en
Priority to BE770550A priority patent/BE770550A/xx
Priority to SE964071A priority patent/SE385785B/xx
Publication of DE2037173A1 publication Critical patent/DE2037173A1/de
Priority to US00348258A priority patent/US3805735A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
    • C30B31/165—Diffusion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE19702037173 1970-07-27 1970-07-27 Anordnung zum Eindiffundieren von Dotierungsstoffen in Scheiben aus Halb leitermaterial Pending DE2037173A1 (de)

Priority Applications (10)

Application Number Priority Date Filing Date Title
DE19702037173 DE2037173A1 (de) 1970-07-27 1970-07-27 Anordnung zum Eindiffundieren von Dotierungsstoffen in Scheiben aus Halb leitermaterial
JP12193270A JPS4915102B1 (xx) 1970-07-27 1970-12-29
NL7107778A NL7107778A (xx) 1970-07-27 1971-06-07
CH867371A CH561082A5 (xx) 1970-07-27 1971-06-15
GB2860671A GB1312226A (en) 1970-07-27 1971-06-18 Diffusion of doping substances into wafers of semiconductor material
FR7126290A FR2103051A5 (xx) 1970-07-27 1971-07-19
CA119193A CA932481A (en) 1970-07-27 1971-07-27 Method of diffusing a doping substance into wafers of semiconducting material
BE770550A BE770550A (fr) 1970-07-27 1971-07-27 Agencement de diffusion de matieres de dopage dans des rondelles de matiere semiconductrice
SE964071A SE385785B (sv) 1970-07-27 1971-07-27 Anordning for indiffusion av dopningsemnen i skivor av halvledarmaterial
US00348258A US3805735A (en) 1970-07-27 1973-04-05 Device for indiffusing dopants into semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702037173 DE2037173A1 (de) 1970-07-27 1970-07-27 Anordnung zum Eindiffundieren von Dotierungsstoffen in Scheiben aus Halb leitermaterial

Publications (1)

Publication Number Publication Date
DE2037173A1 true DE2037173A1 (de) 1972-02-03

Family

ID=5778005

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19702037173 Pending DE2037173A1 (de) 1970-07-27 1970-07-27 Anordnung zum Eindiffundieren von Dotierungsstoffen in Scheiben aus Halb leitermaterial

Country Status (9)

Country Link
JP (1) JPS4915102B1 (xx)
BE (1) BE770550A (xx)
CA (1) CA932481A (xx)
CH (1) CH561082A5 (xx)
DE (1) DE2037173A1 (xx)
FR (1) FR2103051A5 (xx)
GB (1) GB1312226A (xx)
NL (1) NL7107778A (xx)
SE (1) SE385785B (xx)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3951587A (en) * 1974-12-06 1976-04-20 Norton Company Silicon carbide diffusion furnace components
JPS57143428A (en) * 1981-02-27 1982-09-04 High Frequency Heattreat Co Ltd Induction heating and hardening method

Also Published As

Publication number Publication date
SE385785B (sv) 1976-07-26
FR2103051A5 (xx) 1972-04-07
NL7107778A (xx) 1972-01-31
BE770550A (fr) 1972-01-27
JPS4915102B1 (xx) 1974-04-12
GB1312226A (en) 1973-04-04
CA932481A (en) 1973-08-21
CH561082A5 (xx) 1975-04-30

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