FR2103051A5 - - Google Patents

Info

Publication number
FR2103051A5
FR2103051A5 FR7126290A FR7126290A FR2103051A5 FR 2103051 A5 FR2103051 A5 FR 2103051A5 FR 7126290 A FR7126290 A FR 7126290A FR 7126290 A FR7126290 A FR 7126290A FR 2103051 A5 FR2103051 A5 FR 2103051A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7126290A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of FR2103051A5 publication Critical patent/FR2103051A5/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
    • C30B31/165—Diffusion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
FR7126290A 1970-07-27 1971-07-19 Expired FR2103051A5 (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702037173 DE2037173A1 (de) 1970-07-27 1970-07-27 Anordnung zum Eindiffundieren von Dotierungsstoffen in Scheiben aus Halb leitermaterial

Publications (1)

Publication Number Publication Date
FR2103051A5 true FR2103051A5 (xx) 1972-04-07

Family

ID=5778005

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7126290A Expired FR2103051A5 (xx) 1970-07-27 1971-07-19

Country Status (9)

Country Link
JP (1) JPS4915102B1 (xx)
BE (1) BE770550A (xx)
CA (1) CA932481A (xx)
CH (1) CH561082A5 (xx)
DE (1) DE2037173A1 (xx)
FR (1) FR2103051A5 (xx)
GB (1) GB1312226A (xx)
NL (1) NL7107778A (xx)
SE (1) SE385785B (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2293793A1 (fr) * 1974-12-06 1976-07-02 Norton Co Accessoires d'enfournement en carbure de silicium pour fours de diffusion

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143428A (en) * 1981-02-27 1982-09-04 High Frequency Heattreat Co Ltd Induction heating and hardening method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2293793A1 (fr) * 1974-12-06 1976-07-02 Norton Co Accessoires d'enfournement en carbure de silicium pour fours de diffusion

Also Published As

Publication number Publication date
CH561082A5 (xx) 1975-04-30
GB1312226A (en) 1973-04-04
DE2037173A1 (de) 1972-02-03
JPS4915102B1 (xx) 1974-04-12
BE770550A (fr) 1972-01-27
NL7107778A (xx) 1972-01-31
SE385785B (sv) 1976-07-26
CA932481A (en) 1973-08-21

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Legal Events

Date Code Title Description
ST Notification of lapse