DE1961492B2 - Auf druck ansprechendes halbleiterbauelement und verfahren zum herstellen - Google Patents

Auf druck ansprechendes halbleiterbauelement und verfahren zum herstellen

Info

Publication number
DE1961492B2
DE1961492B2 DE19691961492 DE1961492A DE1961492B2 DE 1961492 B2 DE1961492 B2 DE 1961492B2 DE 19691961492 DE19691961492 DE 19691961492 DE 1961492 A DE1961492 A DE 1961492A DE 1961492 B2 DE1961492 B2 DE 1961492B2
Authority
DE
Germany
Prior art keywords
pressure
gold
alloy
area
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19691961492
Other languages
German (de)
English (en)
Other versions
DE1961492A1 (de
Inventor
Gota Nagaoka; Yokozawa Masami Katanocho; Kawasaki Tatsuo Shiroyamacho; Fujiwara Shohei; Hasegawa Hiromasa; Takatsuki; Kano (Japan)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Publication of DE1961492A1 publication Critical patent/DE1961492A1/de
Publication of DE1961492B2 publication Critical patent/DE1961492B2/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Thyristors (AREA)
  • Electrodes Of Semiconductors (AREA)
DE19691961492 1968-12-10 1969-12-08 Auf druck ansprechendes halbleiterbauelement und verfahren zum herstellen Pending DE1961492B2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9217368 1968-12-10
JP43668 1968-12-27

Publications (2)

Publication Number Publication Date
DE1961492A1 DE1961492A1 (de) 1970-07-30
DE1961492B2 true DE1961492B2 (de) 1972-04-13

Family

ID=26333417

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19691961492 Pending DE1961492B2 (de) 1968-12-10 1969-12-08 Auf druck ansprechendes halbleiterbauelement und verfahren zum herstellen

Country Status (10)

Country Link
US (1) US3634931A (https=)
AT (1) AT294961B (https=)
BE (1) BE742874A (https=)
CH (1) CH516872A (https=)
DE (1) DE1961492B2 (https=)
ES (1) ES374318A1 (https=)
FR (1) FR2025792B1 (https=)
GB (1) GB1268406A (https=)
NL (1) NL157457B (https=)
SE (1) SE360772B (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2013220A1 (de) * 1970-03-19 1971-11-25 Siemens Ag Verfahren zum Herstellen einer Transistor anordnung aus Silicium
JPS5520388B1 (https=) * 1970-08-12 1980-06-02
US4054893A (en) * 1975-12-29 1977-10-18 Hutson Jearld L Semiconductor switching devices utilizing nonohmic current paths across P-N junctions
JPS5837713B2 (ja) * 1978-12-01 1983-08-18 富士通株式会社 半導体レ−ザ−装置の製造方法
JPS6188563A (ja) * 1984-10-08 1986-05-06 Toshiba Corp 半導体スイツチ
EP0695927A3 (en) * 1994-08-01 1996-06-26 Motorola Inc Transducer-detector using a Schottky junction and having a high voltage signal at the output
JP4772135B2 (ja) * 2008-06-09 2011-09-14 ルネサスエレクトロニクス株式会社 半導体素子、および、その製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL107648C (https=) * 1956-05-15
US3248616A (en) * 1962-03-08 1966-04-26 Westinghouse Electric Corp Monolithic bistable flip-flop
GB985380A (en) * 1963-02-26 1965-03-10 Westinghouse Electric Corp Semiconductor devices
US3261989A (en) * 1964-01-17 1966-07-19 Int Rectifier Corp Four-layer semiconductor device strain switch
DE1277374B (de) * 1964-09-30 1968-09-12 Hitachi Ltd Mechanisch-elektrischer Wandler
US3523038A (en) * 1965-06-02 1970-08-04 Texas Instruments Inc Process for making ohmic contact to planar germanium semiconductor devices
FR1547292A (fr) * 1966-12-19 1968-11-22 Gen Electric Perfectionnements aux dispositifs à semiconducteur

Also Published As

Publication number Publication date
BE742874A (https=) 1970-05-14
NL157457B (nl) 1978-07-17
NL6918487A (https=) 1970-06-12
US3634931A (en) 1972-01-18
DE1961492A1 (de) 1970-07-30
FR2025792A1 (https=) 1970-09-11
CH516872A (de) 1971-12-15
ES374318A1 (es) 1972-03-16
FR2025792B1 (https=) 1975-01-10
SE360772B (https=) 1973-10-01
AT294961B (de) 1971-11-15
GB1268406A (en) 1972-03-29

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Legal Events

Date Code Title Description
SH Request for examination between 03.10.1968 and 22.04.1971