DE1764063B1 - Elektrodensystem zur erzeugung eines elektronenstrahlbuendels - Google Patents

Elektrodensystem zur erzeugung eines elektronenstrahlbuendels

Info

Publication number
DE1764063B1
DE1764063B1 DE19681764063 DE1764063A DE1764063B1 DE 1764063 B1 DE1764063 B1 DE 1764063B1 DE 19681764063 DE19681764063 DE 19681764063 DE 1764063 A DE1764063 A DE 1764063A DE 1764063 B1 DE1764063 B1 DE 1764063B1
Authority
DE
Germany
Prior art keywords
cathode
electron beam
electrode system
shield
emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19681764063
Other languages
German (de)
English (en)
Inventor
Ferreira Fernand Joaquin
Davis Jack William
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RTX Corp
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Publication of DE1764063B1 publication Critical patent/DE1764063B1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
DE19681764063 1967-06-16 1968-03-28 Elektrodensystem zur erzeugung eines elektronenstrahlbuendels Pending DE1764063B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US64667767A 1967-06-16 1967-06-16

Publications (1)

Publication Number Publication Date
DE1764063B1 true DE1764063B1 (de) 1970-09-16

Family

ID=24594020

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19681764063 Pending DE1764063B1 (de) 1967-06-16 1968-03-28 Elektrodensystem zur erzeugung eines elektronenstrahlbuendels

Country Status (4)

Country Link
US (1) US3466487A (enExample)
DE (1) DE1764063B1 (enExample)
FR (1) FR1557568A (enExample)
GB (1) GB1217037A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1275261A (en) * 1968-06-04 1972-05-24 Atomic Energy Authority Uk Improvements in or relating to non thermionic cathode slow discharge devices
FR2039566A5 (enExample) * 1969-03-31 1971-01-15 Soudure Autogene Elect
JPS5523746Y2 (enExample) * 1976-02-05 1980-06-06
FR2346094A1 (fr) * 1976-03-29 1977-10-28 Sciaky Sa Pistolet de soudage
NL7906958A (nl) * 1979-09-19 1981-03-23 Philips Nv Metaaldraadkathode voor elektronenstraalapparaat.
GB8601421D0 (en) * 1986-01-21 1986-02-26 Welding Inst Charged particle beam generator
JPH02295040A (ja) * 1989-05-10 1990-12-05 Hitachi Ltd 集束イオンビーム装置
CN107078004B (zh) * 2014-11-07 2019-10-15 应用材料公司 用于利用电子束处理具有大宽度柔性基板的设备和方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1589006C (de) * United Aircraft Corp.. East Hartford, Conn. (V.St.A.) Elektrodensystem zur Erzeugung eines Elektronenstrahles
FR1455620A (fr) * 1964-12-10 1966-10-14 United Aircraft Corp Cathode creuse annulaire et appareil à décharge en comportant application

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1997986A (en) * 1930-06-24 1935-04-16 Earl R Thomas Electric circuit controlling apparatus
US3383541A (en) * 1965-11-17 1968-05-14 United Aircraft Corp Glow discharge cathode having a large electron beam emitting aperture

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1589006C (de) * United Aircraft Corp.. East Hartford, Conn. (V.St.A.) Elektrodensystem zur Erzeugung eines Elektronenstrahles
FR1455620A (fr) * 1964-12-10 1966-10-14 United Aircraft Corp Cathode creuse annulaire et appareil à décharge en comportant application

Also Published As

Publication number Publication date
FR1557568A (enExample) 1969-02-14
GB1217037A (en) 1970-12-23
US3466487A (en) 1969-09-09

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