GB1217037A - Improvements in glow discharge cathodes - Google Patents

Improvements in glow discharge cathodes

Info

Publication number
GB1217037A
GB1217037A GB05329/68A GB1532968A GB1217037A GB 1217037 A GB1217037 A GB 1217037A GB 05329/68 A GB05329/68 A GB 05329/68A GB 1532968 A GB1532968 A GB 1532968A GB 1217037 A GB1217037 A GB 1217037A
Authority
GB
United Kingdom
Prior art keywords
mask
electron beam
glow discharge
electron
gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB05329/68A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RTX Corp
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Publication of GB1217037A publication Critical patent/GB1217037A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
GB05329/68A 1967-06-16 1968-03-29 Improvements in glow discharge cathodes Expired GB1217037A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US64667767A 1967-06-16 1967-06-16

Publications (1)

Publication Number Publication Date
GB1217037A true GB1217037A (en) 1970-12-23

Family

ID=24594020

Family Applications (1)

Application Number Title Priority Date Filing Date
GB05329/68A Expired GB1217037A (en) 1967-06-16 1968-03-29 Improvements in glow discharge cathodes

Country Status (4)

Country Link
US (1) US3466487A (enExample)
DE (1) DE1764063B1 (enExample)
FR (1) FR1557568A (enExample)
GB (1) GB1217037A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1275261A (en) * 1968-06-04 1972-05-24 Atomic Energy Authority Uk Improvements in or relating to non thermionic cathode slow discharge devices
FR2039566A5 (enExample) * 1969-03-31 1971-01-15 Soudure Autogene Elect
JPS5523746Y2 (enExample) * 1976-02-05 1980-06-06
FR2346094A1 (fr) * 1976-03-29 1977-10-28 Sciaky Sa Pistolet de soudage
NL7906958A (nl) * 1979-09-19 1981-03-23 Philips Nv Metaaldraadkathode voor elektronenstraalapparaat.
GB8601421D0 (en) * 1986-01-21 1986-02-26 Welding Inst Charged particle beam generator
JPH02295040A (ja) * 1989-05-10 1990-12-05 Hitachi Ltd 集束イオンビーム装置
CN107078004B (zh) * 2014-11-07 2019-10-15 应用材料公司 用于利用电子束处理具有大宽度柔性基板的设备和方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1997986A (en) * 1930-06-24 1935-04-16 Earl R Thomas Electric circuit controlling apparatus
US3381157A (en) * 1964-12-10 1968-04-30 United Aircraft Corp Annular hollow cathode discharge apparatus
US3383541A (en) * 1965-11-17 1968-05-14 United Aircraft Corp Glow discharge cathode having a large electron beam emitting aperture

Also Published As

Publication number Publication date
DE1764063B1 (de) 1970-09-16
FR1557568A (enExample) 1969-02-14
US3466487A (en) 1969-09-09

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