DE112011102492T5 - Röntgenbeugungsverfahren und tragbares Röntgenbeugungsgerät, das dieses verwendet - Google Patents

Röntgenbeugungsverfahren und tragbares Röntgenbeugungsgerät, das dieses verwendet Download PDF

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Publication number
DE112011102492T5
DE112011102492T5 DE112011102492T DE112011102492T DE112011102492T5 DE 112011102492 T5 DE112011102492 T5 DE 112011102492T5 DE 112011102492 T DE112011102492 T DE 112011102492T DE 112011102492 T DE112011102492 T DE 112011102492T DE 112011102492 T5 DE112011102492 T5 DE 112011102492T5
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Germany
Prior art keywords
rays
ray
diffracted
sample
collimated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
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DE112011102492T
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German (de)
English (en)
Inventor
Asao Nakano
Yoshinori Ueji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Denki Co Ltd
Rigaku Corp
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Rigaku Denki Co Ltd
Rigaku Corp
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Application filed by Rigaku Denki Co Ltd, Rigaku Corp filed Critical Rigaku Denki Co Ltd
Publication of DE112011102492T5 publication Critical patent/DE112011102492T5/de
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/05—Investigating materials by wave or particle radiation by diffraction, scatter or reflection
    • G01N2223/056—Investigating materials by wave or particle radiation by diffraction, scatter or reflection diffraction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/301—Accessories, mechanical or electrical features portable apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/33—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts

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  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE112011102492T 2010-07-28 2011-07-28 Röntgenbeugungsverfahren und tragbares Röntgenbeugungsgerät, das dieses verwendet Withdrawn DE112011102492T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010-169338 2010-07-28
JP2010169338A JP5788153B2 (ja) 2010-07-28 2010-07-28 Ｘ線回折方法及びそれを用いた可搬型ｘ線回折装置
PCT/JP2011/067278 WO2012014982A1 (ja) 2010-07-28 2011-07-28 Ｘ線回折方法及びそれを用いた可搬型ｘ線回折装置

Publications (1)

Publication Number Publication Date
DE112011102492T5 true DE112011102492T5 (de) 2013-07-25

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
DE112011102492T Withdrawn DE112011102492T5 (de) 2010-07-28 2011-07-28 Röntgenbeugungsverfahren und tragbares Röntgenbeugungsgerät, das dieses verwendet

Country Status (6)

Country Link
US (1) US9518940B2 (https=)
JP (1) JP5788153B2 (https=)
CN (1) CN103026215B (https=)
DE (1) DE112011102492T5 (https=)
GB (1) GB2495260B (https=)
WO (1) WO2012014982A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5695589B2 (ja) * 2012-03-02 2015-04-08 株式会社リガク Ｘ線強度補正方法およびｘ線回折装置
CN102625555A (zh) * 2012-04-05 2012-08-01 无锡日联科技有限公司 一种可用于连续工作状态下的物理聚焦微焦点x射线源
KR20140145682A (ko) * 2013-06-13 2014-12-24 삼성전자주식회사 엑스선 영상 장치 및 그 제어방법
US10161887B2 (en) * 2015-01-20 2018-12-25 United Technologies Corporation Systems and methods for materials analysis
CN104897705B (zh) * 2015-06-26 2019-05-21 北京师范大学 一种识别液体种类的x射线衍射谱仪与方法
KR101867318B1 (ko) * 2016-11-23 2018-06-15 (주)이림전자 휴대용 엑스레이장치의 엑스레이 모듈 어셈블리
JP6776181B2 (ja) * 2017-05-31 2020-10-28 株式会社神戸製鋼所 応力測定方法
WO2019117276A1 (ja) * 2017-12-15 2019-06-20 株式会社堀場製作所 放射線検出器及び放射線検出装置
CN113302481B (zh) * 2018-11-22 2024-10-11 株式会社理学 单晶x射线结构解析装置用试样保持架、试样保持架组件以及吸藏方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7646847B2 (en) 2008-05-01 2010-01-12 Bruker Axs Inc. Handheld two-dimensional X-ray diffractometer

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JP2852682B2 (ja) * 1990-03-19 1999-02-03 マツダ株式会社 セラミック部品の強度測定法
US5497008A (en) * 1990-10-31 1996-03-05 X-Ray Optical Systems, Inc. Use of a Kumakhov lens in analytic instruments
JP2000146872A (ja) * 1998-11-17 2000-05-26 Rigaku Corp Ｘ線回折装置
JP2000314709A (ja) * 1999-04-30 2000-11-14 Agency Of Ind Science & Technol 結晶構造データと構成元素データを同時に計測するシステム及び方法
JP2001194325A (ja) * 2000-01-06 2001-07-19 Ours Tex Kk Ｘ線分析装置および方法
JP4777539B2 (ja) * 2001-05-29 2011-09-21 エスアイアイ・ナノテクノロジー株式会社 複合ｘ線分析装置
US6697453B1 (en) * 2002-02-08 2004-02-24 Metscan Technologies, Llc Portable X-ray diffractometer
JP4753872B2 (ja) * 2003-08-04 2011-08-24 エックス−レイ オプティカル システムズ インコーポレーテッド Ｘ線回折装置及びその方法
JP3912606B2 (ja) 2004-10-26 2007-05-09 株式会社リガク Ｘ線薄膜検査装置と、プロダクトウエーハの薄膜検査装置およびその方法
US7321652B2 (en) * 2005-09-15 2008-01-22 Jordan Valley Semiconductors Ltd. Multi-detector EDXRD
WO2008097345A2 (en) * 2006-08-10 2008-08-14 X-Ray Optical Systems, Inc. Wide parallel beam diffraction imaging method and system
EP2260294A4 (en) * 2008-02-25 2012-02-08 X Ray Optical Sys Inc SAMPLE MODULE WITH SAMPLE FLOWS WINDOW SPLIT, FOR X-RAY ANALYSIS SYSTEM
JP5150316B2 (ja) * 2008-03-12 2013-02-20 理研計器株式会社 エックス線分析装置用支持台
GB0807474D0 (en) * 2008-04-24 2008-12-03 Durham Scient Crystals Ltd Determination of Composition of Liquids
JP2012013423A (ja) * 2010-06-29 2012-01-19 Nippon Steel Corp Ｘ線応力測定装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7646847B2 (en) 2008-05-01 2010-01-12 Bruker Axs Inc. Handheld two-dimensional X-ray diffractometer

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
International Center for Diffraction Data 2003, Advances in X-ray Analysis, Vol. 14, pp98-105
Jenkins & Snyder, Introduction to X-ray Powder Diffractometry, 1966, John Wiley & Sons, Inc. pp178-203

Also Published As

Publication number Publication date
GB2495260A (en) 2013-04-03
JP2012032164A (ja) 2012-02-16
US9518940B2 (en) 2016-12-13
WO2012014982A1 (ja) 2012-02-02
GB201301244D0 (en) 2013-03-06
GB2495260B (en) 2016-11-02
JP5788153B2 (ja) 2015-09-30
US20130129051A1 (en) 2013-05-23
CN103026215A (zh) 2013-04-03
CN103026215B (zh) 2016-08-31

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