DE102005051289B3 - Piezoaktor und Verfahren zur Herstellung desselben - Google Patents

Piezoaktor und Verfahren zur Herstellung desselben Download PDF

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Publication number
DE102005051289B3
DE102005051289B3 DE102005051289A DE102005051289A DE102005051289B3 DE 102005051289 B3 DE102005051289 B3 DE 102005051289B3 DE 102005051289 A DE102005051289 A DE 102005051289A DE 102005051289 A DE102005051289 A DE 102005051289A DE 102005051289 B3 DE102005051289 B3 DE 102005051289B3
Authority
DE
Germany
Prior art keywords
recess
stack
electrode layers
layers
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE102005051289A
Other languages
English (en)
Inventor
Martin Schroeder
Manfred Weigl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Continental Automotive GmbH
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE102005051289A priority Critical patent/DE102005051289B3/de
Priority to PCT/EP2006/067612 priority patent/WO2007048756A1/de
Priority to US12/091,415 priority patent/US20080315717A1/en
Priority to EP06807430A priority patent/EP1949465A1/de
Priority to CN200680039823.9A priority patent/CN101356661B/zh
Application granted granted Critical
Publication of DE102005051289B3 publication Critical patent/DE102005051289B3/de
Priority to US12/954,245 priority patent/US8132304B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49126—Assembling bases
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49163—Manufacturing circuit on or in base with sintering of base

Abstract

Die Erfindung betrifft einen Piezoaktor und ein Verfahren zur Herstellung desselben mit folgenden Verfahrensschritten: DOLLAR A Vorsehen mehrerer zu einem Stapel zusammenfügbarer piezo-elektrischer Materialschichten; Aufbringen von jeweils eine Aussparung aufweisenden Elektrodenschichten auf die mehreren piezo-elektrischen Materialschichten derart, dass sich im Stapel einer alternierende Abfolge von piezo-elektrischen Materialschichten und Elektrodenschichten ergibt, wobei Elektrodenschichten mit einer Aussparung in einem ersten Aussparungsbereich und Elektrodenschichten mit einer Aussparung in einem zweiten, sich von dem ersten Aussparungsbereich unterscheidenden Aussparungsbereich im Stapel alternierend vorgesehen werden; und Vorsehen eines Entlastungsmaterials in den ersten und zweiten Aussparungen, welches nach einer Sinterung des Stapels elektrisch isolierende und die einzelnen Materialschichten nicht zusammenhaftende Eigenschaften aufweist.
DE102005051289A 2005-10-26 2005-10-26 Piezoaktor und Verfahren zur Herstellung desselben Expired - Fee Related DE102005051289B3 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE102005051289A DE102005051289B3 (de) 2005-10-26 2005-10-26 Piezoaktor und Verfahren zur Herstellung desselben
PCT/EP2006/067612 WO2007048756A1 (de) 2005-10-26 2006-10-20 Piezoaktor und verfahren zur herstellung desselben
US12/091,415 US20080315717A1 (en) 2005-10-26 2006-10-20 Piezoelectric Actuator and Method for Producing the Same
EP06807430A EP1949465A1 (de) 2005-10-26 2006-10-20 Piezoaktor und verfahren zur herstellung desselben
CN200680039823.9A CN101356661B (zh) 2005-10-26 2006-10-20 压电执行器及其制造方法
US12/954,245 US8132304B2 (en) 2005-10-26 2010-11-24 Method of manufacturing a piezoelectric actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005051289A DE102005051289B3 (de) 2005-10-26 2005-10-26 Piezoaktor und Verfahren zur Herstellung desselben

Publications (1)

Publication Number Publication Date
DE102005051289B3 true DE102005051289B3 (de) 2007-05-16

Family

ID=37763816

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102005051289A Expired - Fee Related DE102005051289B3 (de) 2005-10-26 2005-10-26 Piezoaktor und Verfahren zur Herstellung desselben

Country Status (5)

Country Link
US (2) US20080315717A1 (de)
EP (1) EP1949465A1 (de)
CN (1) CN101356661B (de)
DE (1) DE102005051289B3 (de)
WO (1) WO2007048756A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007123278A1 (ja) * 2006-04-24 2007-11-01 Ngk Insulators, Ltd. 圧電／電歪膜型素子
WO2008047460A1 (en) * 2006-10-20 2008-04-24 Kyocera Corporation Piezoelectric actuator unit and method for manufacturing the same
WO2008053569A1 (en) * 2006-10-31 2008-05-08 Kyocera Corporation Multi-layer piezoelectric element and injection apparatus employing the same
DE102007037500A1 (de) 2007-05-11 2008-11-13 Epcos Ag Piezoelektrisches Vielschichtbauelement
JP5597583B2 (ja) * 2011-03-28 2014-10-01 太陽誘電株式会社 タッチパネル装置及び電子機器
KR20150061411A (ko) * 2013-11-27 2015-06-04 삼성전기주식회사 압전 액추에이터 모듈 및 이를 포함하는 mems 센서

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3940619A1 (de) * 1989-06-09 1990-12-13 Avx Corp Elektrostriktive stellantriebe
DE19615694C1 (de) * 1996-04-19 1997-07-03 Siemens Ag Monolithischer Vielschicht-Piezoaktor und Verfahren zur Herstellung
DE10006352A1 (de) * 2000-02-12 2001-08-30 Bosch Gmbh Robert Piezoelektrischer Keramikkörper mit silberhaltigen Innenelektroden
DE10320161A1 (de) * 2002-05-06 2004-03-18 Epcos Ag Piezoaktor und Verfahren zu dessen Herstellung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60176282A (ja) 1984-02-22 1985-09-10 Toyota Motor Corp 積層型圧電磁器およびその製造方法
JPS61142780A (ja) 1984-12-17 1986-06-30 Toshiba Corp 積層型変位発生素子及びその製造方法
JPS63128683A (ja) * 1986-11-18 1988-06-01 Nec Corp 電歪効果素子の製造方法
DE69031839T2 (de) * 1989-04-07 1998-05-07 Mitsui Petrochemical Ind Geschichtete Keramikanordnung und Verfahren zur deren Herstellung
JPH04352481A (ja) 1991-05-30 1992-12-07 Nec Corp 電歪効果素子の製造方法
JPH1129748A (ja) * 1997-05-12 1999-02-02 Fujitsu Ltd 接着剤、接着方法及び実装基板の組み立て体
US6414417B1 (en) * 1999-08-31 2002-07-02 Kyocera Corporation Laminated piezoelectric actuator
JP4614214B2 (ja) * 1999-12-02 2011-01-19 信越化学工業株式会社 半導体装置素子用中空パッケージ
JP2004297041A (ja) * 2003-03-12 2004-10-21 Denso Corp 積層型圧電体素子
JP4140030B2 (ja) 2003-05-30 2008-08-27 澁谷工業株式会社 段積み装置
DE10335019A1 (de) 2003-07-31 2005-02-17 Robert Bosch Gmbh Piezoaktor
JP4670260B2 (ja) * 2004-05-25 2011-04-13 Ｔｄｋ株式会社 積層型電子部品
CN101253638B (zh) * 2005-08-29 2010-09-22 京瓷株式会社 层叠型压电元件以及使用该压电元件的喷射装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3940619A1 (de) * 1989-06-09 1990-12-13 Avx Corp Elektrostriktive stellantriebe
DE19615694C1 (de) * 1996-04-19 1997-07-03 Siemens Ag Monolithischer Vielschicht-Piezoaktor und Verfahren zur Herstellung
DE10006352A1 (de) * 2000-02-12 2001-08-30 Bosch Gmbh Robert Piezoelektrischer Keramikkörper mit silberhaltigen Innenelektroden
DE10320161A1 (de) * 2002-05-06 2004-03-18 Epcos Ag Piezoaktor und Verfahren zu dessen Herstellung

Also Published As

Publication number Publication date
US20110062830A1 (en) 2011-03-17
WO2007048756A1 (de) 2007-05-03
CN101356661A (zh) 2009-01-28
US20080315717A1 (en) 2008-12-25
CN101356661B (zh) 2011-11-16
EP1949465A1 (de) 2008-07-30
US8132304B2 (en) 2012-03-13

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Legal Events

Date Code Title Description
8100 Publication of patent without earlier publication of application
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: CONTINENTAL AUTOMOTIVE GMBH, 30165 HANNOVER, DE

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20130501