US20080315717A1 - Piezoelectric Actuator and Method for Producing the Same - Google Patents

Piezoelectric Actuator and Method for Producing the Same Download PDF

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Publication number
US20080315717A1
US20080315717A1 US12/091,415 US9141506A US2008315717A1 US 20080315717 A1 US20080315717 A1 US 20080315717A1 US 9141506 A US9141506 A US 9141506A US 2008315717 A1 US2008315717 A1 US 2008315717A1
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United States
Prior art keywords
layers
recess
stack
zone
piezoelectric
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Abandoned
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US12/091,415
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English (en)
Inventor
Martin Schroder
Manfred Weigl
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Continental Automotive GmbH
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Continental Automotive GmbH
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Assigned to CONTINENTAL AUTOMOTIVE GMBH reassignment CONTINENTAL AUTOMOTIVE GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: WEIGL, MANFRED, SCHROEDER, MARTIN
Publication of US20080315717A1 publication Critical patent/US20080315717A1/en
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49126—Assembling bases
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49163—Manufacturing circuit on or in base with sintering of base

Definitions

  • the present invention relates to a piezoelectric actuator, preferably of monolithic multilayer construction, and to a method for producing the same.
  • Piezoelectric actuators usually consist of a number of piezoelectric elements arranged in a stack. Each of these elements in its turn consists of a piezoceramic layer on both sides of which metallic electrodes are provided. If a voltage is applied to these electrodes, the piezoceramic layer reacts with a lattice distortion, which leads along a main axis to a usable length expansion. Since this in its turn amounts to less than 2 thousandth of the layer thickness along the main axis, to achieve the desired absolute length expansion a correspondingly greater layer thickness of active piezoceramic must be provided. However, as the layer thickness of the piezoceramic layer of an individual piezoelectric element increases, the voltage required for the piezoelectric element to respond also increases. To keep this within manageable limits, the thicknesses of individual elements usually lie between 20 and 200 ⁇ m. A multilayer piezoelectric actuator must therefore have a corresponding number of individual elements or layers for a desired length expansion.
  • Known multilayer piezoelectric actuators thus generally consist of numerous individual layers in total.
  • piezoceramic layers are arranged alternately with electrode material to form a stack and are laminated and sintered together to form a monolithic assembly.
  • Such a method is known for example from European patent EP 0 894 340 B1.
  • an electrode material is printed onto piezoceramic green tapes. The printing is undertaken in accordance with a pattern, which includes printed areas and non-printed areas left free.
  • the electrode layers are stacked alternately such that a surface printed with electrode material in the next adjacent second electrode layer is arranged over each unprinted area in a first electrode layer.
  • the alternating arrangement means that every second electrode layer covers the same area in relation to its pattern of electrodes.
  • the unprinted areas left free are offset diagonally.
  • a piezoelectric actuator and a production method for the same can be specified, with polarization cracks being reduced or minimized despite inactive zones in the electrode layers.
  • a method for producing a piezoelectric actuator may comprise the following steps: Providing a number of layers of piezoelectric material able to be assembled into a stack; Application of electrode layers comprising a recess in each case to the number of layers of piezoelectric material such that an alternating sequence of layers of piezoelectric material and electrode layers is produced in the stack, with electrode layers being provided alternately in the stack with a recess in a first recess zone and electrode layers with a recess in a second zone differing from the first recess zone; and Provision of a stress-relieving material in the first and second recesses, which, after the stack is sintered, exhibits properties of electrical insulation and properties of preventing the adhesion of the individual material layers.
  • a metallization paste containing a noble metal with a low diffusion capability of the electrically-conductive particles during sintering of the stack may be printed as electrode layers onto the number of layers of piezoelectric material in each case.
  • a paste containing noble metals with a very high diffusion capability of the electrically-conductive particles during sintering of the stack may be printed into the recesses as stress-relieving material.
  • ceramic green tapes may be used as layers of piezoelectric material.
  • each second electrode layer may be embodied in the stack with a recess in a first corner zone and each electrode layer provided between said layers may be embodied with a recess in a second corner zone lying opposite the first corner zone.
  • the piezoelectric actuator may be embodied with at least two holes running in a longitudinal direction, with the recesses of the first recess zone in the area of the one hole and the recesses of the second recess zone in the area of the other hole in the stack being provided in an alternating sequence, with the holes being able to be linked in each case with an electrical contacting.
  • a piezoelectric actuator may comprise a number of layers of piezoelectric material assembled into a stack; and electrode layers, which are applied in each case to the number of layers of piezoelectric material such that an alternating sequence of piezoelectric material layers ( 2 ) and electrode layers is produced in the stack; and electrode layers being provided with a stress-relieving recess in a first recess zone and electrode layers with a stress relieving recess in a second recess zone differing from the first recess zone alternating in the stack.
  • the electrode layers may consist of a metallization paste containing a noble metal with a low diffusion capability of the electrically-conductive particles during sintering of the stack, for example made of a paste containing silver-palladium.
  • the number of layers of piezoelectric material may be embodied as ceramic green tapes.
  • each second electrode layer in the stack may feature a stress-relieving recess in a first corner area and each electrode layer provided between said layers may features a stress-relieving recess in a second corner area lying opposite the first corner area.
  • the piezoelectric actuator features at least two holes running in a longitudinal direction, with the recesses of the first recess zone in the area of the one hole and the recesses of the second recess zone in the area of the other holes in the stack being provided in alternating sequence, with the holes being able to be linked in each case with an electrical contacting.
  • FIG. 1 an exploded view of a number of ceramic layers able to be assembled into a stack with electrode layers applied in accordance with an exemplary embodiment
  • FIG. 2 the exploded view from FIG. 1 with stress-relieving material applied in the recesses in accordance with an exemplary embodiment
  • FIG. 3 a perspective view of a piezoelectric actuator in assembled monolithic multilayer construction in accordance with an exemplary embodiment.
  • the piezoelectric actuator is constructed from a number of layers of piezoelectric material able to be assembled into a stack, with electrode layers with a recess in each case being applied to the number of layers of piezoelectric material such that in the stack an alternating sequence of layers of piezoelectric material and electrode layers is produced, with electrode layers with a recess in a first recess zone and electrode layers with a recess in a second recess zone differing from the first recess zone being provided alternately in the stack. Further a stress-relieving material is provided in the first and second recesses respectively, which exhibits electrically-insulating properties and properties which cause the individual layers of material not to adhere to each other after the stack is sintered.
  • the various embodiments thus have the advantage over the known approaches that the free areas or recesses of the electrode layers provided are not completely filled with ceramic material during sintering of the stack, but because of the non-adhering properties of the stress-relieving material, create a mechanical separation point or stress-relieving recess between two consecutive ceramic layers in the zone of the recesses.
  • the separation points are embodied as hollow spaces between adjacent ceramic layers. This means that there is no adhesion between the ceramic layers in this zone, so that no significant mechanical stresses can occur in these inactive zones. The mechanical stresses—if present at all—do not expand further to form damaging cracks.
  • the various embodiments have the advantage that, in the recess zones, because of the electrically-insulating properties of the stress-relieving material, electrically-insulated areas are produced, which guarantee an external metallization of the piezoelectric actuator for an electrical activation of each second electrode layer in a simple and cost-effective manner.
  • a metallization paste containing noble metal with low diffusion capabilities of the electrically-conductive particles is printed onto the piezoelectric material layers as electrode layers during sintering of the stack.
  • a paste containing silver-palladium is used, with the proportion of palladium ensuring that the silver remains in the paste and the proportion of silver ensuring a good electrical conductivity of the paste.
  • a paste containing noble metal with a high diffusion capability of the electrically-conductive particles is printed onto the recesses as stress-relieving material during sintering of the stack.
  • a paste containing silver is used, with the silver being diffused during sintering into the adjacent electrode areas.
  • each second electrode layer in the stack is embodied with a recess in a first corner area and each electrode layer provided between said layers is embodied with a recess in a second corner area apposite to the first corner area.
  • the piezoelectric actuator is embodied with at least two holes running in a longitudinal direction, with the first recess zone being provided in the area of one hole and the second recess zone being provided in the area of the other hole in the stack in an alternating sequence.
  • the individual electrode layers can be coupled via the holes with an electrical contacting such that once again only each second electrode layer is electrically contacted for each hole.
  • the two holes typically, but not necessarily, have a relatively large diameter in the mm range since, because it is too stiff, a massive wire cannot simply be soldered in, but instead a wire featuring very fine wires (e.g. similar to a bottle brush) can be used.
  • the piezoelectric actuator according to various embodiments and the method of constructing it are generally independent of the materials used.
  • Any PZT (lead-zirconate-titanate) ceramics can be used for example as piezoelectric material layers.
  • so called green tapes are drawn or cast from this material, which have a thickness of for example 20 to 200 ⁇ m after drying.
  • Electrode layers for example printed with a suitable silver-palladium paste.
  • the paste preferably contains the particles of a silver/palladium alloy in a binder with a printable consistency overall.
  • the proportion of silver in the paste guarantees the good electrical conductivity of the electrode layer after sintering, whereas the palladium proportion guarantees that, despite the high diffusion capability of the silver at the temperature occurring during a sintering, this remains in the printed electrode layer.
  • the silver contained in the paste reaches an even distribution in concentration in the palladium. The diffusion capability of palladium is small enough for this not to require further consideration.
  • FIG. 1 illustrates an exploded view of four piezoelectric ceramic layers 2 , which are each printed on one side with an electrode layer 3 , for example made of the silver-palladium paste described above. Although just four ceramic layers are illustrated in FIGS. 1 and 2 by way of example, it is obvious to the person skilled in the art that any number of piezoelectric ceramic layers can be connected to each other in a stack in a similar manner.
  • the ceramic layers 2 are printed in accordance with a pattern such that a printed electrode area 3 and an unprinted, recess zone 4 or 4 ′ which remains free is provided on each ceramic layer.
  • a printed electrode area 3 and an unprinted, recess zone 4 or 4 ′ which remains free is provided on each ceramic layer.
  • the electrode layers 3 as much of the silver-palladium paste is printed onto one side on the assigned ceramic layers 2 for a 2-3 ⁇ m thickness of contiguous electrode layer 3 to be produced after the sintering.
  • the piezoceramic layers 2 printed with the electrode material are dried if necessary and subsequently stacked above one another in a suitable manner, with an alternating arrangement of piezoceramic layers 2 and electrode layers 3 being produced.
  • the stacking is likewise alternating such that over each recess 4 or 4 ′ in a first electrode layer which corresponds to the unprinted electrode areas 4 or 4 ′, a surface printed with electrode material is arranged in the next adjacent electrode layer, as can be seen in FIG. 1 .
  • the recesses 4 or 4 ′ are each provided alternately in diagonally-opposite corner areas. It is however obvious for a person skilled in the art that the recesses 4 or 4 ′ can also be provided at any other point in an alternating sequence on the ceramic layers.
  • each second layer covers the same area as regards its electrode pattern with the recesses 4 provided.
  • the recesses 4 ′ are arranged offset in relation to the recesses 4 .
  • a stack is embodied from as many individual layers arranged above one another as to obtain a desired total height of the piezoelectric actuator.
  • each layer consists of an electrode area 3 printed with a silver-palladium paste and a recess zone printed with a silver paste 5 .
  • a sintering is undertaken for example under light pressure in an oxidizing atmosphere for a predefined period and at a predefined sinter temperature, which can amount to more than 1000° C. for example.
  • a predefined sinter temperature which can amount to more than 1000° C. for example.
  • the silver in the silver paste 5 diffuses into the recesses 4 or 4 ′ because of its high diffusion capabilities almost completely out of the recess zones 4 or 4 ′ and into the adjacent silver-palladium electrode zones 3 .
  • stress-relieving recesses 6 or 6 ′ are embodied in the areas of the recesses 4 or 4 ′, as is indicated schematically in FIG. 3 by the broken lines.
  • FIG. 3 illustrates a perspective view of a finished piezoelectric actuator 1 , which is contacted in the form of strips with an external metallization 8 for electrical contacting at corners opposite one another. Because of the electrode structure which alternates from individual layer to individual layer this type of external contact 8 only reaches every second electrode layer, whereas the external contact 8 attached at the opposite edge contacts the intermediate electrode layers in each case. This means that an electrically-parallel wiring of the piezoelectric layers of material lying between the electrode layers is possible, which allows an optimum operation of the piezoelectric actuator 1 .
  • the present invention thus creates a piezoelectric actuator and a method for producing the same, with, because of the separation points or stress-relieving recesses obtained during the sintering in the areas of the recesses 4 or 4 ′, electrically non-conductive areas as well as mechanically stress-relieving zones to prevent mechanical stresses are obtained.
  • the inventive method guarantees that no new technology need be introduced and no new production facilities are necessary. Furthermore because of the use of the silver paste and the silver-palladium paste, no new connections or elements are introduced into the chemical system of the piezoelectric actuator, which could lead to unknown effects. Furthermore silver is cost effective compared to palladium, so that additional material costs are insignificant.
  • the additional screen printing process to print on the silver paste is simple and cost effective to undertake compared to additional production steps with previous measures for avoiding cracks.
  • another metallization paste containing noble metals can be used with a low diffusion capability of the electrically-conductive particles during sintering of the stack.
  • another paste containing noble metals or another suitable stress-relieving material with a very high diffusion capability of the electrically-conductive particles during sintering of the stack can also be used instead of the silver paste as stress-relieving material.
  • any stress-relieving material which guarantees a non-conductive area in the recess zones and prevents an adhesion between adjacent layers is suitable for forming a stress-relieving recess or a stress-relieving area.
  • the recess zones instead of being provided at diagonally opposite corner areas, can also be provided within the layer surface, for example such that drilled holes run in the longitudinal direction of the piezoelectric actuator through the individual recess pattern in each case.
  • drilled holes run in the longitudinal direction of the piezoelectric actuator through the individual recess pattern in each case.
  • suitable contacting means are inserted into the at least two holes so that once again each second electrode layer is electrically contacted and the intermediate layers are not contacted because of the recess zones provided.
  • adjacent layers in these recess zones do not adhere to each other because of the stress-relieving recesses.
US12/091,415 2005-10-26 2006-10-20 Piezoelectric Actuator and Method for Producing the Same Abandoned US20080315717A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005051289.5 2005-10-26
DE102005051289A DE102005051289B3 (de) 2005-10-26 2005-10-26 Piezoaktor und Verfahren zur Herstellung desselben
PCT/EP2006/067612 WO2007048756A1 (de) 2005-10-26 2006-10-20 Piezoaktor und verfahren zur herstellung desselben

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US12/954,245 Continuation US8132304B2 (en) 2005-10-26 2010-11-24 Method of manufacturing a piezoelectric actuator

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US20080315717A1 true US20080315717A1 (en) 2008-12-25

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US12/954,245 Expired - Fee Related US8132304B2 (en) 2005-10-26 2010-11-24 Method of manufacturing a piezoelectric actuator

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US (2) US20080315717A1 (de)
EP (1) EP1949465A1 (de)
CN (1) CN101356661B (de)
DE (1) DE102005051289B3 (de)
WO (1) WO2007048756A1 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090072667A1 (en) * 2006-04-24 2009-03-19 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film element
US20100060110A1 (en) * 2006-10-31 2010-03-11 Kyocera Corporation Multi-Layer Piezoelectric Element and Injection Apparatus Employing The Same
US20100141098A1 (en) * 2007-05-11 2010-06-10 Bernhard Doellgast Piezoelectric Multilayer Component
US20100327704A1 (en) * 2006-10-20 2010-12-30 Kyocera Corporation Piezoelectric Actuator Unit and Method for Manufacturing the Same
US20120249459A1 (en) * 2011-03-28 2012-10-04 Taiyo Yuden Co., Ltd. Touch panel device and electronic device having the same

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150061411A (ko) * 2013-11-27 2015-06-04 삼성전기주식회사 압전 액추에이터 모듈 및 이를 포함하는 mems 센서
CN117412660B (zh) * 2023-12-14 2024-04-16 乌镇实验室 一种共烧型多层压电致动器

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US7304414B2 (en) * 2002-05-06 2007-12-04 Epcos Ag Piezoactuator and method for the production thereof
US7323807B2 (en) * 2004-05-25 2008-01-29 Tdk Corporation Multilayer electronic component
US20100013359A1 (en) * 2005-08-29 2010-01-21 Kyocera Corporation Multi-Layer Piezoelectric Element and Injection Apparatus Using the Same

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US20090072667A1 (en) * 2006-04-24 2009-03-19 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film element
US7755253B2 (en) * 2006-04-24 2010-07-13 Ngk Insulators, Ltd. Piezoelectric element and shape of an elecrode thereof
US20100327704A1 (en) * 2006-10-20 2010-12-30 Kyocera Corporation Piezoelectric Actuator Unit and Method for Manufacturing the Same
US8410663B2 (en) * 2006-10-20 2013-04-02 Kyocera Corporation Piezoelectric actuator unit having a stress relieving layer and method for manufacturing the same
US20100060110A1 (en) * 2006-10-31 2010-03-11 Kyocera Corporation Multi-Layer Piezoelectric Element and Injection Apparatus Employing The Same
US8212451B2 (en) * 2006-10-31 2012-07-03 Kyocera Corporation Multi-layer piezoelectric element having a plurality of junction sections and injection apparatus employing the same
US20100141098A1 (en) * 2007-05-11 2010-06-10 Bernhard Doellgast Piezoelectric Multilayer Component
US7982373B2 (en) 2007-05-11 2011-07-19 Epcos Ag Piezoelectric multilayer component
US20120249459A1 (en) * 2011-03-28 2012-10-04 Taiyo Yuden Co., Ltd. Touch panel device and electronic device having the same
US8884897B2 (en) * 2011-03-28 2014-11-11 Taiyo Yuden Co., Ltd. Touch panel device and electronic device with improved haptic feedback

Also Published As

Publication number Publication date
EP1949465A1 (de) 2008-07-30
US20110062830A1 (en) 2011-03-17
WO2007048756A1 (de) 2007-05-03
CN101356661B (zh) 2011-11-16
US8132304B2 (en) 2012-03-13
CN101356661A (zh) 2009-01-28
DE102005051289B3 (de) 2007-05-16

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