JP4940550B2 - 圧電素子 - Google Patents
圧電素子 Download PDFInfo
- Publication number
- JP4940550B2 JP4940550B2 JP2004374095A JP2004374095A JP4940550B2 JP 4940550 B2 JP4940550 B2 JP 4940550B2 JP 2004374095 A JP2004374095 A JP 2004374095A JP 2004374095 A JP2004374095 A JP 2004374095A JP 4940550 B2 JP4940550 B2 JP 4940550B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- layer
- piezoelectric layer
- electrode
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000006073 displacement reaction Methods 0.000 claims description 31
- 239000000463 material Substances 0.000 claims description 20
- 230000005540 biological transmission Effects 0.000 claims description 17
- 239000011159 matrix material Substances 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 128
- 238000010586 diagram Methods 0.000 description 10
- 239000007788 liquid Substances 0.000 description 8
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- 239000011241 protective layer Substances 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000010030 laminating Methods 0.000 description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Images
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
Claims (2)
- 圧電体層と、当該圧電体層を挟むように配置される一対の電極とを含む積層体を備えた圧電素子であって、
前記積層体は、前記圧電体層の変位を伝達する変位伝達層を有しており、
一方の前記電極は、マトリックス状に配置された複数の個別電極からなり、
他方の前記電極は、前記変位伝達層に隣接すると共に、前記複数の個別電極の全体を前記積層体の積層方向から見て隠すように配置されたコモン電極からなり、
前記変位伝達層は、前記圧電体層と同じ圧電材料にて構成されると共に、前記圧電体層と一体に形成され、
前記変位伝達層の厚みは、前記圧電体層の厚みよりも薄く設定されていることを特徴とする圧電素子。 - 前記変位伝達層は、前記積層体における積層方向での一方の端面を構成することを特徴とする請求項1に記載の圧電素子。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004374095A JP4940550B2 (ja) | 2004-12-24 | 2004-12-24 | 圧電素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004374095A JP4940550B2 (ja) | 2004-12-24 | 2004-12-24 | 圧電素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006179832A JP2006179832A (ja) | 2006-07-06 |
JP4940550B2 true JP4940550B2 (ja) | 2012-05-30 |
Family
ID=36733614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004374095A Active JP4940550B2 (ja) | 2004-12-24 | 2004-12-24 | 圧電素子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4940550B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6003313B2 (ja) * | 2012-07-10 | 2016-10-05 | Tdk株式会社 | 圧電素子 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3313531B2 (ja) * | 1994-06-03 | 2002-08-12 | 日本碍子株式会社 | 圧電/電歪膜型素子及びその製造方法 |
JP3501860B2 (ja) * | 1994-12-21 | 2004-03-02 | 日本碍子株式会社 | 圧電/電歪膜型素子及びその製造方法 |
JP2001058401A (ja) * | 1999-08-20 | 2001-03-06 | Ricoh Co Ltd | インクジェットヘッド |
JP3999044B2 (ja) * | 2002-05-24 | 2007-10-31 | 日本碍子株式会社 | 圧電/電歪膜型アクチュエータ及び製造方法 |
JP4655493B2 (ja) * | 2004-03-26 | 2011-03-23 | 株式会社村田製作所 | 圧電素子、圧電アクチュエータ並びに圧電素子及び圧電アクチュエータの製造方法 |
JP4816002B2 (ja) * | 2004-10-28 | 2011-11-16 | ブラザー工業株式会社 | 圧電アクチュエータの製造方法、液体移送装置の製造方法、及び、圧電アクチュエータの製造装置 |
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2004
- 2004-12-24 JP JP2004374095A patent/JP4940550B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2006179832A (ja) | 2006-07-06 |
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