DE102004034879B4 - Verfahren und Vorrichtung zum Messen einer zu testenden Vorrichtung unter Verwendung einer verbesserten Durchgangs-Reflexions-Leitungs-Messkalibrierung - Google Patents

Verfahren und Vorrichtung zum Messen einer zu testenden Vorrichtung unter Verwendung einer verbesserten Durchgangs-Reflexions-Leitungs-Messkalibrierung Download PDF

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Publication number
DE102004034879B4
DE102004034879B4 DE102004034879A DE102004034879A DE102004034879B4 DE 102004034879 B4 DE102004034879 B4 DE 102004034879B4 DE 102004034879 A DE102004034879 A DE 102004034879A DE 102004034879 A DE102004034879 A DE 102004034879A DE 102004034879 B4 DE102004034879 B4 DE 102004034879B4
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measuring
reflection
calibration standard
measurement
test
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DE102004034879A1 (de
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Vahe Westlake Village Adamian
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Agilent Technologies Inc
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Agilent Technologies Inc
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/28Measuring attenuation, gain, phase shift or derived characteristics of electric four pole networks, i.e. two-port networks; Measuring transient response

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
DE102004034879A 2003-08-05 2004-07-19 Verfahren und Vorrichtung zum Messen einer zu testenden Vorrichtung unter Verwendung einer verbesserten Durchgangs-Reflexions-Leitungs-Messkalibrierung Expired - Fee Related DE102004034879B4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/635,395 2003-08-05
US10/635,395 US7068049B2 (en) 2003-08-05 2003-08-05 Method and apparatus for measuring a device under test using an improved through-reflect-line measurement calibration

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DE102004034879A1 DE102004034879A1 (de) 2005-03-03
DE102004034879B4 true DE102004034879B4 (de) 2006-09-28

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US (1) US7068049B2 (https=)
JP (1) JP2005055438A (https=)
DE (1) DE102004034879B4 (https=)

Families Citing this family (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345170A (en) 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US6380751B2 (en) 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US5561377A (en) 1995-04-14 1996-10-01 Cascade Microtech, Inc. System for evaluating probing networks
US6232789B1 (en) * 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6002263A (en) 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6578264B1 (en) 1999-06-04 2003-06-17 Cascade Microtech, Inc. Method for constructing a membrane probe using a depression
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US6838890B2 (en) 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
DE10143173A1 (de) * 2000-12-04 2002-06-06 Cascade Microtech Inc Wafersonde
US7355420B2 (en) 2001-08-21 2008-04-08 Cascade Microtech, Inc. Membrane probing system
US6777964B2 (en) * 2002-01-25 2004-08-17 Cascade Microtech, Inc. Probe station
US7352258B2 (en) * 2002-03-28 2008-04-01 Cascade Microtech, Inc. Waveguide adapter for probe assembly having a detachable bias tee
EP1509776A4 (en) 2002-05-23 2010-08-18 Cascade Microtech Inc PROBE TO TEST ANY TESTING EQUIPMENT
US7019535B2 (en) * 2002-09-16 2006-03-28 Agilent Technologies, Inc. Method and system for calibrating a measurement device path and for measuring a device under test in the calibrated measurement device path
US6847219B1 (en) 2002-11-08 2005-01-25 Cascade Microtech, Inc. Probe station with low noise characteristics
US6724205B1 (en) 2002-11-13 2004-04-20 Cascade Microtech, Inc. Probe for combined signals
US7250779B2 (en) 2002-11-25 2007-07-31 Cascade Microtech, Inc. Probe station with low inductance path
US6861856B2 (en) 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
US7221172B2 (en) 2003-05-06 2007-05-22 Cascade Microtech, Inc. Switched suspended conductor and connection
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7250626B2 (en) * 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
WO2005065258A2 (en) 2003-12-24 2005-07-21 Cascade Microtech, Inc. Active wafer probe
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
DE202005021434U1 (de) * 2004-06-07 2008-03-20 Cascade Microtech, Inc., Beaverton Thermooptische Einspannvorrichtung
US7330041B2 (en) 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
KR101157449B1 (ko) 2004-07-07 2012-06-22 캐스케이드 마이크로테크 인코포레이티드 멤브레인 서스펜디드 프로브를 구비한 프로브 헤드
KR20070058522A (ko) 2004-09-13 2007-06-08 캐스케이드 마이크로테크 인코포레이티드 양측 프루빙 구조
US7068046B2 (en) * 2004-11-18 2006-06-27 Anritsu Company Calibration techniques for simplified high-frequency multiport differential measurements
US7030625B1 (en) * 2005-01-18 2006-04-18 Agilent Technologies, Inc. Method and apparatus for performing a minimum connection multiport through-reflect-line calibration and measurement
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7656172B2 (en) * 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
DE102005018073B4 (de) * 2005-03-04 2009-03-19 Rohde & Schwarz Gmbh & Co. Kg Vieltor-Kalibriermatrix
US7148702B2 (en) * 2005-03-30 2006-12-12 Agilent Technologies, Inc. VNA and method for addressing transmission line effects in VNA measurement data
US7449899B2 (en) * 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
EP1932003A2 (en) 2005-06-13 2008-06-18 Cascade Microtech, Inc. Wideband active-passive differential signal probe
JP2005321417A (ja) * 2005-08-18 2005-11-17 Agilent Technol Inc テストセットおよび測定システム
US7609077B2 (en) 2006-06-09 2009-10-27 Cascade Microtech, Inc. Differential signal probe with integral balun
US7403028B2 (en) * 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7532014B2 (en) * 2006-08-08 2009-05-12 Credence Systems Corporation LRL vector calibration to the end of the probe needles for non-standard probe cards for ATE RF testers
US7518378B2 (en) * 2007-02-13 2009-04-14 Keithley Instruments, Inc. Cable compensation for pulsed I-V measurements
DE102007018096A1 (de) 2007-04-17 2008-10-23 Rohde & Schwarz Gmbh & Co. Kg Verfahren zur Ermittlung von Zeitunterschieden zwischen durch zumindest zwei gekoppelte Messgeräte gemessenen Signalen sowie Messsystem und entsprechende Umschaltvorrichtung
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US7777497B2 (en) * 2008-01-17 2010-08-17 Com Dev International Ltd. Method and system for tracking scattering parameter test system calibration
US7741857B2 (en) * 2008-03-06 2010-06-22 International Business Machines Corporation System and method for de-embedding a device under test employing a parametrized netlist
US8319502B2 (en) * 2008-06-26 2012-11-27 Dune Medical Devices Ltd. RF calibration device and method
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
DE202008013687U1 (de) * 2008-10-15 2009-01-02 Rosenberger Hochfrequenztechnik Gmbh & Co. Kg Messanordnung mit Kalibriersubstrat und elektronischer Schaltung
US8410806B2 (en) 2008-11-21 2013-04-02 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
US8706438B2 (en) * 2010-02-01 2014-04-22 Teledyne Lecroy, Inc. Time domain network analyzer
US20110199107A1 (en) * 2010-02-12 2011-08-18 Ate Systems, Inc. Method and apparatus for calibrating a test system for measuring a device under test
FR2976362B1 (fr) * 2011-06-07 2013-05-24 Tekcem Procede pour evaluer les effets d'une interconnexion sur des variables electriques
TWI470248B (zh) * 2011-06-22 2015-01-21 Wistron Corp 量測待測物散射參數的方法
US8928333B2 (en) * 2011-11-30 2015-01-06 Raytheon Company Calibration measurements for network analyzers
JP6055215B2 (ja) * 2012-06-29 2016-12-27 キーサイト テクノロジーズ, インク. インピーダンス測定方法及び測定装置
DE102013200033B4 (de) * 2012-10-10 2023-06-15 Rohde & Schwarz GmbH & Co. Kommanditgesellschaft Verfahren und System zur Bestimmung von Streuparametern eines frequenzumsetzenden Messobjekts
CN103364752B (zh) * 2013-07-19 2015-12-23 中国电子科技集团公司第十三研究所 一种在片负载牵引测量系统的现场校准方法
CN104734789A (zh) * 2013-12-19 2015-06-24 梅尔根电子有限公司 多端口射频元件的量测方法
CN103995526B (zh) * 2014-04-29 2017-10-31 北京航天发射技术研究所 基于can总线的电源控制器模拟量参数标定系统及方法
US11215655B2 (en) * 2014-10-12 2022-01-04 Compass Technology Group, LLC Correction of transmission line induced phase and amplitude errors in reflectivity measurements
CN104569887B (zh) * 2014-12-22 2018-03-27 大唐移动通信设备有限公司 一种单端口网络校准中的误差获取方法和装置
US9841449B2 (en) * 2015-11-30 2017-12-12 Keysight Technologies, Inc. Apparatus and method for cable phase correction for vector analyzer remote heads
DE102016119562B3 (de) * 2016-10-13 2018-02-15 Friedrich-Alexander-Universität Erlangen-Nürnberg Elektrisches Messsystem zur Frequenzmessung und Erkennung von Störsignalen und Betriebsverfahren hierfür
JP6765104B2 (ja) * 2017-01-31 2020-10-07 国立研究開発法人産業技術総合研究所 電気的中点におけるrfプローブシステムの校正技術
CN107643450B (zh) * 2017-08-31 2019-11-26 中国计量科学研究院 低损低介电材料的测量方法及测量系统
CN107784650A (zh) * 2017-10-30 2018-03-09 湖北坚丰科技股份有限公司 一种用于电机转轴轴承档直径的在线视觉检测方法
US10938490B1 (en) * 2018-10-31 2021-03-02 Christos Tsironis Calibration method for coupler-tuner assembly
US11754606B1 (en) * 2019-06-26 2023-09-12 Anritsu Company System and method for connecting vector network analyzer modules
US11428770B2 (en) * 2020-03-30 2022-08-30 Rohde & Schwarz Gmbh & Co. Kg Method of calibrating a setup
CN112051534B (zh) * 2020-08-31 2023-08-25 中电科思仪科技股份有限公司 一种提高微波网络测量与校准精度的外置式装置及方法
US11668737B2 (en) * 2021-03-10 2023-06-06 Dell Products L.P. Self-calibrating transmission line resonator oscillating driver apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE20305226U1 (de) * 2002-11-14 2003-05-28 Agilent Technologies, Inc. (n.d.Ges.d.Staates Delaware), Palo Alto, Calif. Vorrichtung zum Durchführen einer Mehrfachtor-Durchgangelement-, Reflexionselement-, Leitungselement-Kalibrierung und -Messung

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4816767A (en) * 1984-01-09 1989-03-28 Hewlett-Packard Company Vector network analyzer with integral processor
US4853613A (en) * 1987-10-27 1989-08-01 Martin Marietta Corporation Calibration method for apparatus evaluating microwave/millimeter wave circuits
DE69227056T2 (de) * 1991-03-22 1999-05-12 Nec Corp., Tokio/Tokyo Verfahren zur Fehleranalyse unter Verwendung eines Elektronenstrahles
US5434511A (en) * 1993-05-24 1995-07-18 Atn Microwave, Inc. Electronic microwave calibration device
US5467021A (en) 1993-05-24 1995-11-14 Atn Microwave, Inc. Calibration method and apparatus
DE4401068C2 (de) * 1993-08-30 1997-04-10 Rohde & Schwarz Netzwerkanalysator und Verfahren zum Kalibrieren
US5793213A (en) * 1996-08-01 1998-08-11 Motorola, Inc. Method and apparatus for calibrating a network analyzer
US5825669A (en) * 1996-12-17 1998-10-20 Wiltron Company Method of updating automatic calibration to provide a perceived perfect through connection
US6060888A (en) * 1998-04-24 2000-05-09 Hewlett-Packard Company Error correction method for reflection measurements of reciprocal devices in vector network analyzers
US6300775B1 (en) * 1999-02-02 2001-10-09 Com Dev Limited Scattering parameter calibration system and method
US6614237B2 (en) * 2000-09-18 2003-09-02 Agilent Technologies, Inc. Multiport automatic calibration device for a multiport test system
US6832170B2 (en) * 2002-05-02 2004-12-14 Anritsu Company Methods for embedding and de-embedding using a circulator

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE20305226U1 (de) * 2002-11-14 2003-05-28 Agilent Technologies, Inc. (n.d.Ges.d.Staates Delaware), Palo Alto, Calif. Vorrichtung zum Durchführen einer Mehrfachtor-Durchgangelement-, Reflexionselement-, Leitungselement-Kalibrierung und -Messung

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
ENGEN,Glenn F., HOER,Cletus A.: "Thru Reflect Line", An Improved Technique for Calibrating the Dual Six-Port Automatic Network Analyzer. In: IEEE Trans. on Microwave Theory and Techniques, Dezem- ber 1979, Bd.MTT-27, Heft 12, S.987-993
ENGEN,Glenn F., HOER,Cletus A.: "Thru Reflect Line", An Improved Technique for Calibrating the Dual Six-Port Automatic Network Analyzer. In: IEEETrans. on Microwave Theory and Techniques, Dezem- ber 1979, Bd.MTT-27, Heft 12, S.987-993 *
EUL,Hermann-Josef, SCHIEK,Burkhard: A Generalized Theory and New Calibration Procedures for Network Analyzer Self-Calibration. In: IEEE Trans. on Microwave Theory and Techniques, April 1991, Bd. 39, Heft 4, S.724-731 *

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US7068049B2 (en) 2006-06-27
JP2005055438A (ja) 2005-03-03
US20050030047A1 (en) 2005-02-10
DE102004034879A1 (de) 2005-03-03

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Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US

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