DE102004034879B4 - Verfahren und Vorrichtung zum Messen einer zu testenden Vorrichtung unter Verwendung einer verbesserten Durchgangs-Reflexions-Leitungs-Messkalibrierung - Google Patents
Verfahren und Vorrichtung zum Messen einer zu testenden Vorrichtung unter Verwendung einer verbesserten Durchgangs-Reflexions-Leitungs-Messkalibrierung Download PDFInfo
- Publication number
- DE102004034879B4 DE102004034879B4 DE102004034879A DE102004034879A DE102004034879B4 DE 102004034879 B4 DE102004034879 B4 DE 102004034879B4 DE 102004034879 A DE102004034879 A DE 102004034879A DE 102004034879 A DE102004034879 A DE 102004034879A DE 102004034879 B4 DE102004034879 B4 DE 102004034879B4
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- Germany
- Prior art keywords
- measuring
- reflection
- calibration standard
- measurement
- test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/28—Measuring attenuation, gain, phase shift or derived characteristics of electric four pole networks, i.e. two-port networks; Measuring transient response
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/635,395 | 2003-08-05 | ||
| US10/635,395 US7068049B2 (en) | 2003-08-05 | 2003-08-05 | Method and apparatus for measuring a device under test using an improved through-reflect-line measurement calibration |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE102004034879A1 DE102004034879A1 (de) | 2005-03-03 |
| DE102004034879B4 true DE102004034879B4 (de) | 2006-09-28 |
Family
ID=34116234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102004034879A Expired - Fee Related DE102004034879B4 (de) | 2003-08-05 | 2004-07-19 | Verfahren und Vorrichtung zum Messen einer zu testenden Vorrichtung unter Verwendung einer verbesserten Durchgangs-Reflexions-Leitungs-Messkalibrierung |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US7068049B2 (https=) |
| JP (1) | JP2005055438A (https=) |
| DE (1) | DE102004034879B4 (https=) |
Families Citing this family (79)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5345170A (en) | 1992-06-11 | 1994-09-06 | Cascade Microtech, Inc. | Wafer probe station having integrated guarding, Kelvin connection and shielding systems |
| US6380751B2 (en) | 1992-06-11 | 2002-04-30 | Cascade Microtech, Inc. | Wafer probe station having environment control enclosure |
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| US6232789B1 (en) * | 1997-05-28 | 2001-05-15 | Cascade Microtech, Inc. | Probe holder for low current measurements |
| US5914613A (en) | 1996-08-08 | 1999-06-22 | Cascade Microtech, Inc. | Membrane probing system with local contact scrub |
| US6002263A (en) | 1997-06-06 | 1999-12-14 | Cascade Microtech, Inc. | Probe station having inner and outer shielding |
| US6256882B1 (en) | 1998-07-14 | 2001-07-10 | Cascade Microtech, Inc. | Membrane probing system |
| US6578264B1 (en) | 1999-06-04 | 2003-06-17 | Cascade Microtech, Inc. | Method for constructing a membrane probe using a depression |
| US6445202B1 (en) | 1999-06-30 | 2002-09-03 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
| US6838890B2 (en) | 2000-02-25 | 2005-01-04 | Cascade Microtech, Inc. | Membrane probing system |
| US6965226B2 (en) | 2000-09-05 | 2005-11-15 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US6914423B2 (en) | 2000-09-05 | 2005-07-05 | Cascade Microtech, Inc. | Probe station |
| DE10143173A1 (de) * | 2000-12-04 | 2002-06-06 | Cascade Microtech Inc | Wafersonde |
| US7355420B2 (en) | 2001-08-21 | 2008-04-08 | Cascade Microtech, Inc. | Membrane probing system |
| US6777964B2 (en) * | 2002-01-25 | 2004-08-17 | Cascade Microtech, Inc. | Probe station |
| US7352258B2 (en) * | 2002-03-28 | 2008-04-01 | Cascade Microtech, Inc. | Waveguide adapter for probe assembly having a detachable bias tee |
| EP1509776A4 (en) | 2002-05-23 | 2010-08-18 | Cascade Microtech Inc | PROBE TO TEST ANY TESTING EQUIPMENT |
| US7019535B2 (en) * | 2002-09-16 | 2006-03-28 | Agilent Technologies, Inc. | Method and system for calibrating a measurement device path and for measuring a device under test in the calibrated measurement device path |
| US6847219B1 (en) | 2002-11-08 | 2005-01-25 | Cascade Microtech, Inc. | Probe station with low noise characteristics |
| US6724205B1 (en) | 2002-11-13 | 2004-04-20 | Cascade Microtech, Inc. | Probe for combined signals |
| US7250779B2 (en) | 2002-11-25 | 2007-07-31 | Cascade Microtech, Inc. | Probe station with low inductance path |
| US6861856B2 (en) | 2002-12-13 | 2005-03-01 | Cascade Microtech, Inc. | Guarded tub enclosure |
| US7221172B2 (en) | 2003-05-06 | 2007-05-22 | Cascade Microtech, Inc. | Switched suspended conductor and connection |
| US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US7057404B2 (en) | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
| US7250626B2 (en) * | 2003-10-22 | 2007-07-31 | Cascade Microtech, Inc. | Probe testing structure |
| WO2005065258A2 (en) | 2003-12-24 | 2005-07-21 | Cascade Microtech, Inc. | Active wafer probe |
| US7187188B2 (en) | 2003-12-24 | 2007-03-06 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
| DE202005021434U1 (de) * | 2004-06-07 | 2008-03-20 | Cascade Microtech, Inc., Beaverton | Thermooptische Einspannvorrichtung |
| US7330041B2 (en) | 2004-06-14 | 2008-02-12 | Cascade Microtech, Inc. | Localizing a temperature of a device for testing |
| KR101157449B1 (ko) | 2004-07-07 | 2012-06-22 | 캐스케이드 마이크로테크 인코포레이티드 | 멤브레인 서스펜디드 프로브를 구비한 프로브 헤드 |
| KR20070058522A (ko) | 2004-09-13 | 2007-06-08 | 캐스케이드 마이크로테크 인코포레이티드 | 양측 프루빙 구조 |
| US7068046B2 (en) * | 2004-11-18 | 2006-06-27 | Anritsu Company | Calibration techniques for simplified high-frequency multiport differential measurements |
| US7030625B1 (en) * | 2005-01-18 | 2006-04-18 | Agilent Technologies, Inc. | Method and apparatus for performing a minimum connection multiport through-reflect-line calibration and measurement |
| US7535247B2 (en) | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
| US7656172B2 (en) * | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
| DE102005018073B4 (de) * | 2005-03-04 | 2009-03-19 | Rohde & Schwarz Gmbh & Co. Kg | Vieltor-Kalibriermatrix |
| US7148702B2 (en) * | 2005-03-30 | 2006-12-12 | Agilent Technologies, Inc. | VNA and method for addressing transmission line effects in VNA measurement data |
| US7449899B2 (en) * | 2005-06-08 | 2008-11-11 | Cascade Microtech, Inc. | Probe for high frequency signals |
| EP1932003A2 (en) | 2005-06-13 | 2008-06-18 | Cascade Microtech, Inc. | Wideband active-passive differential signal probe |
| JP2005321417A (ja) * | 2005-08-18 | 2005-11-17 | Agilent Technol Inc | テストセットおよび測定システム |
| US7609077B2 (en) | 2006-06-09 | 2009-10-27 | Cascade Microtech, Inc. | Differential signal probe with integral balun |
| US7403028B2 (en) * | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
| US7723999B2 (en) | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
| US7443186B2 (en) | 2006-06-12 | 2008-10-28 | Cascade Microtech, Inc. | On-wafer test structures for differential signals |
| US7764072B2 (en) | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
| US7532014B2 (en) * | 2006-08-08 | 2009-05-12 | Credence Systems Corporation | LRL vector calibration to the end of the probe needles for non-standard probe cards for ATE RF testers |
| US7518378B2 (en) * | 2007-02-13 | 2009-04-14 | Keithley Instruments, Inc. | Cable compensation for pulsed I-V measurements |
| DE102007018096A1 (de) | 2007-04-17 | 2008-10-23 | Rohde & Schwarz Gmbh & Co. Kg | Verfahren zur Ermittlung von Zeitunterschieden zwischen durch zumindest zwei gekoppelte Messgeräte gemessenen Signalen sowie Messsystem und entsprechende Umschaltvorrichtung |
| US7876114B2 (en) | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
| US7777497B2 (en) * | 2008-01-17 | 2010-08-17 | Com Dev International Ltd. | Method and system for tracking scattering parameter test system calibration |
| US7741857B2 (en) * | 2008-03-06 | 2010-06-22 | International Business Machines Corporation | System and method for de-embedding a device under test employing a parametrized netlist |
| US8319502B2 (en) * | 2008-06-26 | 2012-11-27 | Dune Medical Devices Ltd. | RF calibration device and method |
| US7888957B2 (en) | 2008-10-06 | 2011-02-15 | Cascade Microtech, Inc. | Probing apparatus with impedance optimized interface |
| DE202008013687U1 (de) * | 2008-10-15 | 2009-01-02 | Rosenberger Hochfrequenztechnik Gmbh & Co. Kg | Messanordnung mit Kalibriersubstrat und elektronischer Schaltung |
| US8410806B2 (en) | 2008-11-21 | 2013-04-02 | Cascade Microtech, Inc. | Replaceable coupon for a probing apparatus |
| US8319503B2 (en) | 2008-11-24 | 2012-11-27 | Cascade Microtech, Inc. | Test apparatus for measuring a characteristic of a device under test |
| US8706438B2 (en) * | 2010-02-01 | 2014-04-22 | Teledyne Lecroy, Inc. | Time domain network analyzer |
| US20110199107A1 (en) * | 2010-02-12 | 2011-08-18 | Ate Systems, Inc. | Method and apparatus for calibrating a test system for measuring a device under test |
| FR2976362B1 (fr) * | 2011-06-07 | 2013-05-24 | Tekcem | Procede pour evaluer les effets d'une interconnexion sur des variables electriques |
| TWI470248B (zh) * | 2011-06-22 | 2015-01-21 | Wistron Corp | 量測待測物散射參數的方法 |
| US8928333B2 (en) * | 2011-11-30 | 2015-01-06 | Raytheon Company | Calibration measurements for network analyzers |
| JP6055215B2 (ja) * | 2012-06-29 | 2016-12-27 | キーサイト テクノロジーズ, インク. | インピーダンス測定方法及び測定装置 |
| DE102013200033B4 (de) * | 2012-10-10 | 2023-06-15 | Rohde & Schwarz GmbH & Co. Kommanditgesellschaft | Verfahren und System zur Bestimmung von Streuparametern eines frequenzumsetzenden Messobjekts |
| CN103364752B (zh) * | 2013-07-19 | 2015-12-23 | 中国电子科技集团公司第十三研究所 | 一种在片负载牵引测量系统的现场校准方法 |
| CN104734789A (zh) * | 2013-12-19 | 2015-06-24 | 梅尔根电子有限公司 | 多端口射频元件的量测方法 |
| CN103995526B (zh) * | 2014-04-29 | 2017-10-31 | 北京航天发射技术研究所 | 基于can总线的电源控制器模拟量参数标定系统及方法 |
| US11215655B2 (en) * | 2014-10-12 | 2022-01-04 | Compass Technology Group, LLC | Correction of transmission line induced phase and amplitude errors in reflectivity measurements |
| CN104569887B (zh) * | 2014-12-22 | 2018-03-27 | 大唐移动通信设备有限公司 | 一种单端口网络校准中的误差获取方法和装置 |
| US9841449B2 (en) * | 2015-11-30 | 2017-12-12 | Keysight Technologies, Inc. | Apparatus and method for cable phase correction for vector analyzer remote heads |
| DE102016119562B3 (de) * | 2016-10-13 | 2018-02-15 | Friedrich-Alexander-Universität Erlangen-Nürnberg | Elektrisches Messsystem zur Frequenzmessung und Erkennung von Störsignalen und Betriebsverfahren hierfür |
| JP6765104B2 (ja) * | 2017-01-31 | 2020-10-07 | 国立研究開発法人産業技術総合研究所 | 電気的中点におけるrfプローブシステムの校正技術 |
| CN107643450B (zh) * | 2017-08-31 | 2019-11-26 | 中国计量科学研究院 | 低损低介电材料的测量方法及测量系统 |
| CN107784650A (zh) * | 2017-10-30 | 2018-03-09 | 湖北坚丰科技股份有限公司 | 一种用于电机转轴轴承档直径的在线视觉检测方法 |
| US10938490B1 (en) * | 2018-10-31 | 2021-03-02 | Christos Tsironis | Calibration method for coupler-tuner assembly |
| US11754606B1 (en) * | 2019-06-26 | 2023-09-12 | Anritsu Company | System and method for connecting vector network analyzer modules |
| US11428770B2 (en) * | 2020-03-30 | 2022-08-30 | Rohde & Schwarz Gmbh & Co. Kg | Method of calibrating a setup |
| CN112051534B (zh) * | 2020-08-31 | 2023-08-25 | 中电科思仪科技股份有限公司 | 一种提高微波网络测量与校准精度的外置式装置及方法 |
| US11668737B2 (en) * | 2021-03-10 | 2023-06-06 | Dell Products L.P. | Self-calibrating transmission line resonator oscillating driver apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE20305226U1 (de) * | 2002-11-14 | 2003-05-28 | Agilent Technologies, Inc. (n.d.Ges.d.Staates Delaware), Palo Alto, Calif. | Vorrichtung zum Durchführen einer Mehrfachtor-Durchgangelement-, Reflexionselement-, Leitungselement-Kalibrierung und -Messung |
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| US4816767A (en) * | 1984-01-09 | 1989-03-28 | Hewlett-Packard Company | Vector network analyzer with integral processor |
| US4853613A (en) * | 1987-10-27 | 1989-08-01 | Martin Marietta Corporation | Calibration method for apparatus evaluating microwave/millimeter wave circuits |
| DE69227056T2 (de) * | 1991-03-22 | 1999-05-12 | Nec Corp., Tokio/Tokyo | Verfahren zur Fehleranalyse unter Verwendung eines Elektronenstrahles |
| US5434511A (en) * | 1993-05-24 | 1995-07-18 | Atn Microwave, Inc. | Electronic microwave calibration device |
| US5467021A (en) | 1993-05-24 | 1995-11-14 | Atn Microwave, Inc. | Calibration method and apparatus |
| DE4401068C2 (de) * | 1993-08-30 | 1997-04-10 | Rohde & Schwarz | Netzwerkanalysator und Verfahren zum Kalibrieren |
| US5793213A (en) * | 1996-08-01 | 1998-08-11 | Motorola, Inc. | Method and apparatus for calibrating a network analyzer |
| US5825669A (en) * | 1996-12-17 | 1998-10-20 | Wiltron Company | Method of updating automatic calibration to provide a perceived perfect through connection |
| US6060888A (en) * | 1998-04-24 | 2000-05-09 | Hewlett-Packard Company | Error correction method for reflection measurements of reciprocal devices in vector network analyzers |
| US6300775B1 (en) * | 1999-02-02 | 2001-10-09 | Com Dev Limited | Scattering parameter calibration system and method |
| US6614237B2 (en) * | 2000-09-18 | 2003-09-02 | Agilent Technologies, Inc. | Multiport automatic calibration device for a multiport test system |
| US6832170B2 (en) * | 2002-05-02 | 2004-12-14 | Anritsu Company | Methods for embedding and de-embedding using a circulator |
-
2003
- 2003-08-05 US US10/635,395 patent/US7068049B2/en not_active Expired - Fee Related
-
2004
- 2004-07-19 DE DE102004034879A patent/DE102004034879B4/de not_active Expired - Fee Related
- 2004-07-30 JP JP2004224295A patent/JP2005055438A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE20305226U1 (de) * | 2002-11-14 | 2003-05-28 | Agilent Technologies, Inc. (n.d.Ges.d.Staates Delaware), Palo Alto, Calif. | Vorrichtung zum Durchführen einer Mehrfachtor-Durchgangelement-, Reflexionselement-, Leitungselement-Kalibrierung und -Messung |
Non-Patent Citations (3)
| Title |
|---|
| ENGEN,Glenn F., HOER,Cletus A.: "Thru Reflect Line", An Improved Technique for Calibrating the Dual Six-Port Automatic Network Analyzer. In: IEEE Trans. on Microwave Theory and Techniques, Dezem- ber 1979, Bd.MTT-27, Heft 12, S.987-993 |
| ENGEN,Glenn F., HOER,Cletus A.: "Thru Reflect Line", An Improved Technique for Calibrating the Dual Six-Port Automatic Network Analyzer. In: IEEETrans. on Microwave Theory and Techniques, Dezem- ber 1979, Bd.MTT-27, Heft 12, S.987-993 * |
| EUL,Hermann-Josef, SCHIEK,Burkhard: A Generalized Theory and New Calibration Procedures for Network Analyzer Self-Calibration. In: IEEE Trans. on Microwave Theory and Techniques, April 1991, Bd. 39, Heft 4, S.724-731 * |
Also Published As
| Publication number | Publication date |
|---|---|
| US7068049B2 (en) | 2006-06-27 |
| JP2005055438A (ja) | 2005-03-03 |
| US20050030047A1 (en) | 2005-02-10 |
| DE102004034879A1 (de) | 2005-03-03 |
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Legal Events
| Date | Code | Title | Description |
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| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US |
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| 8339 | Ceased/non-payment of the annual fee |