DE10084776T5 - Transportmodul mit verriegelbarer Tür - Google Patents
Transportmodul mit verriegelbarer Tür Download PDFInfo
- Publication number
- DE10084776T5 DE10084776T5 DE10084776T DE10084776T DE10084776T5 DE 10084776 T5 DE10084776 T5 DE 10084776T5 DE 10084776 T DE10084776 T DE 10084776T DE 10084776 T DE10084776 T DE 10084776T DE 10084776 T5 DE10084776 T5 DE 10084776T5
- Authority
- DE
- Germany
- Prior art keywords
- door
- locking
- section
- locking mechanism
- receiving space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000007246 mechanism Effects 0.000 claims abstract description 84
- 235000012431 wafers Nutrition 0.000 claims description 70
- 230000005540 biological transmission Effects 0.000 claims 1
- 230000008901 benefit Effects 0.000 description 10
- 239000000969 carrier Substances 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 7
- 239000002245 particle Substances 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002397 field ionisation mass spectrometry Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 210000004072 lung Anatomy 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14283199P | 1999-07-08 | 1999-07-08 | |
| US60/142,831 | 1999-07-08 | ||
| PCT/US2000/018511 WO2001004022A1 (en) | 1999-07-08 | 2000-07-06 | Transport module with latching door |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE10084776T5 true DE10084776T5 (de) | 2005-12-01 |
Family
ID=22501466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE10084776T Withdrawn DE10084776T5 (de) | 1999-07-08 | 2000-07-06 | Transportmodul mit verriegelbarer Tür |
Country Status (8)
| Country | Link |
|---|---|
| EP (1) | EP1218264A4 (enExample) |
| JP (1) | JP4549595B2 (enExample) |
| KR (1) | KR100747041B1 (enExample) |
| CN (1) | CN1169696C (enExample) |
| AU (1) | AU6341900A (enExample) |
| DE (1) | DE10084776T5 (enExample) |
| MY (1) | MY128807A (enExample) |
| WO (1) | WO2001004022A1 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002093622A2 (en) * | 2001-05-17 | 2002-11-21 | Ebara Corporation | Substrate transport container |
| US6749067B2 (en) * | 2002-01-16 | 2004-06-15 | Entegris, Inc. | Wafer carrier door with form fitting mechanism cover |
| US7325698B2 (en) | 2004-04-18 | 2008-02-05 | Entegris, Inc. | Wafer container door with particulate collecting structure |
| JP4573566B2 (ja) | 2004-04-20 | 2010-11-04 | 信越ポリマー株式会社 | 収納容器 |
| CN1313331C (zh) * | 2004-08-30 | 2007-05-02 | 财团法人工业技术研究院 | 洁净容器结构 |
| JP4540529B2 (ja) | 2005-04-18 | 2010-09-08 | 信越ポリマー株式会社 | 収納容器 |
| JP6544128B2 (ja) * | 2015-08-07 | 2019-07-17 | シンフォニアテクノロジー株式会社 | 収納容器の蓋体及び収納容器 |
| CN114628292B (zh) * | 2022-05-16 | 2022-07-29 | 上海果纳半导体技术有限公司武汉分公司 | 晶圆传输盒 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5173273A (en) * | 1990-10-11 | 1992-12-22 | Brewer Charles A | Cassette for dental instruments |
| US5915562A (en) * | 1996-07-12 | 1999-06-29 | Fluoroware, Inc. | Transport module with latching door |
| US5711427A (en) * | 1996-07-12 | 1998-01-27 | Fluoroware, Inc. | Wafer carrier with door |
| JP3476052B2 (ja) * | 1997-09-01 | 2003-12-10 | 信越ポリマー株式会社 | 輸送容器 |
| JP3722604B2 (ja) * | 1997-11-13 | 2005-11-30 | 大日本スクリーン製造株式会社 | 基板処理装置 |
| US6704998B1 (en) * | 1997-12-24 | 2004-03-16 | Asyst Technologies, Inc. | Port door removal and wafer handling robotic system |
-
2000
- 2000-07-06 WO PCT/US2000/018511 patent/WO2001004022A1/en not_active Ceased
- 2000-07-06 DE DE10084776T patent/DE10084776T5/de not_active Withdrawn
- 2000-07-06 KR KR1020027000227A patent/KR100747041B1/ko not_active Expired - Lifetime
- 2000-07-06 AU AU63419/00A patent/AU6341900A/en not_active Abandoned
- 2000-07-06 EP EP00950296A patent/EP1218264A4/en not_active Withdrawn
- 2000-07-06 CN CNB008115826A patent/CN1169696C/zh not_active Expired - Lifetime
- 2000-07-06 JP JP2001509652A patent/JP4549595B2/ja not_active Expired - Lifetime
- 2000-07-07 MY MYPI20003119A patent/MY128807A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003504886A (ja) | 2003-02-04 |
| CN1378515A (zh) | 2002-11-06 |
| EP1218264A1 (en) | 2002-07-03 |
| WO2001004022B1 (en) | 2001-02-15 |
| WO2001004022A1 (en) | 2001-01-18 |
| KR100747041B1 (ko) | 2007-08-07 |
| JP4549595B2 (ja) | 2010-09-22 |
| AU6341900A (en) | 2001-01-30 |
| KR20020063155A (ko) | 2002-08-01 |
| CN1169696C (zh) | 2004-10-06 |
| EP1218264A4 (en) | 2007-09-26 |
| MY128807A (en) | 2007-02-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE60025708T2 (de) | Mehrstufiger einzelantrieb für foup-türöffnungssystem | |
| EP0630520B1 (de) | System zum einschleusen von substraten in reinsträume | |
| DE19726305C2 (de) | System zum Transportieren von Objekten zwischen Umgebungen mit kontrollierten Bedingungen | |
| DE19731183A1 (de) | Behälter für Halbleiterplättchen (Wafer) | |
| DE69936645T2 (de) | Behälter mit waferkassette | |
| DE19535178C2 (de) | Einrichtung zum Ver- und Entriegeln einer Tür eines Behälters | |
| DE60131895T2 (de) | Vorrichtung zur beladung eines behälters, der in einem fims-system verwendung findet | |
| DE19830639A1 (de) | Waferträger | |
| DE69132457T2 (de) | Vorrichtung und Methode zum Laden von Werkstücken in einem Verarbeitungssystem | |
| DE69836425T2 (de) | Behälter | |
| DE19938142A1 (de) | Behälter zur Aufnahme von Präzisionssubstraten | |
| DE4326309C1 (de) | Vorrichtung zum Transport von Wafermagazinen | |
| DE69734104T2 (de) | Kupplungsanordnung für die geschlossene übertragung von einem flachen substrat von einem geschlossenen behälter zu einer behandlungseinrichtung | |
| DE102019130760B4 (de) | SCHLIEßVORRICHTUNG OHNE EINSCHRÄNKUNG DER REIHENFOLGE DES ÖFFNENS ODER SCHLIEßENS EINER TÜR UND FAHRZEUG | |
| DE10084776T5 (de) | Transportmodul mit verriegelbarer Tür | |
| DE102017112497A1 (de) | Sicherheitsgriff mit Hebelwirkung | |
| DE69627126T2 (de) | Zusammenklappbare tür für geschirrspülmaschine | |
| DE102020104598A1 (de) | Schnapp-schrankscharnier | |
| EP3135362B1 (de) | Verschlusssystem für eine filterklappe bei einer industrieabsauganlage | |
| DE69109157T2 (de) | Mobiles Arbeitsgefäss zum Einsatz in einer Anlage in einer heissen Zelle. | |
| DE19916932C1 (de) | Einrichtung zur Handhabung eines Gegenstandes für die Be- und Entladung eines Reinstraumes | |
| EP3749161B1 (de) | Verschlusseinrichtung, system, partikelauffanganordnung und saugvorrichtung | |
| DE69402735T2 (de) | System- und Verfahren zum eingreifen in ein Abdichtungsfenster innerhalb einer Öffnung einer Einschlusszelle | |
| EP4265381B1 (de) | Isolatorsystem | |
| DE102023203889A1 (de) | Auffangbehältnis für Werkstückpartikel, Baugruppe umfassend ein motorisch angetriebenes Handwerkzeug und ein Auffangbehältnis sowie motorisch angetriebenes Handwerkzeug |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8139 | Disposal/non-payment of the annual fee |