MY128807A - Transport module with latching door - Google Patents

Transport module with latching door

Info

Publication number
MY128807A
MY128807A MYPI20003119A MYPI20003119A MY128807A MY 128807 A MY128807 A MY 128807A MY PI20003119 A MYPI20003119 A MY PI20003119A MY PI20003119 A MYPI20003119 A MY PI20003119A MY 128807 A MY128807 A MY 128807A
Authority
MY
Malaysia
Prior art keywords
door
latching
frame
sliding plate
linkages
Prior art date
Application number
MYPI20003119A
Other languages
English (en)
Inventor
Gregory Bores
Michael C Zabka
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of MY128807A publication Critical patent/MY128807A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
MYPI20003119A 1999-07-08 2000-07-07 Transport module with latching door MY128807A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14283199P 1999-07-08 1999-07-08

Publications (1)

Publication Number Publication Date
MY128807A true MY128807A (en) 2007-02-28

Family

ID=22501466

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20003119A MY128807A (en) 1999-07-08 2000-07-07 Transport module with latching door

Country Status (8)

Country Link
EP (1) EP1218264A4 (enExample)
JP (1) JP4549595B2 (enExample)
KR (1) KR100747041B1 (enExample)
CN (1) CN1169696C (enExample)
AU (1) AU6341900A (enExample)
DE (1) DE10084776T5 (enExample)
MY (1) MY128807A (enExample)
WO (1) WO2001004022A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002093622A2 (en) * 2001-05-17 2002-11-21 Ebara Corporation Substrate transport container
US6749067B2 (en) * 2002-01-16 2004-06-15 Entegris, Inc. Wafer carrier door with form fitting mechanism cover
US7325698B2 (en) 2004-04-18 2008-02-05 Entegris, Inc. Wafer container door with particulate collecting structure
JP4573566B2 (ja) 2004-04-20 2010-11-04 信越ポリマー株式会社 収納容器
CN1313331C (zh) * 2004-08-30 2007-05-02 财团法人工业技术研究院 洁净容器结构
JP4540529B2 (ja) 2005-04-18 2010-09-08 信越ポリマー株式会社 収納容器
JP6544128B2 (ja) * 2015-08-07 2019-07-17 シンフォニアテクノロジー株式会社 収納容器の蓋体及び収納容器
CN114628292B (zh) * 2022-05-16 2022-07-29 上海果纳半导体技术有限公司武汉分公司 晶圆传输盒

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5173273A (en) * 1990-10-11 1992-12-22 Brewer Charles A Cassette for dental instruments
US5915562A (en) * 1996-07-12 1999-06-29 Fluoroware, Inc. Transport module with latching door
US5711427A (en) * 1996-07-12 1998-01-27 Fluoroware, Inc. Wafer carrier with door
JP3476052B2 (ja) * 1997-09-01 2003-12-10 信越ポリマー株式会社 輸送容器
JP3722604B2 (ja) * 1997-11-13 2005-11-30 大日本スクリーン製造株式会社 基板処理装置
US6704998B1 (en) * 1997-12-24 2004-03-16 Asyst Technologies, Inc. Port door removal and wafer handling robotic system

Also Published As

Publication number Publication date
JP2003504886A (ja) 2003-02-04
CN1378515A (zh) 2002-11-06
EP1218264A1 (en) 2002-07-03
DE10084776T5 (de) 2005-12-01
WO2001004022B1 (en) 2001-02-15
WO2001004022A1 (en) 2001-01-18
KR100747041B1 (ko) 2007-08-07
JP4549595B2 (ja) 2010-09-22
AU6341900A (en) 2001-01-30
KR20020063155A (ko) 2002-08-01
CN1169696C (zh) 2004-10-06
EP1218264A4 (en) 2007-09-26

Similar Documents

Publication Publication Date Title
WO2004043818A3 (en) Child safe container
MY126374A (en) Wafer carrier with door
MY128807A (en) Transport module with latching door
WO1998026380A3 (en) Secure enclosure bolt work apparatus for automated banking machine
EP1146196A3 (en) A safety gate
PL372408A1 (en) Anti-theft device
CA2471653A1 (en) Bathtub having sliding access door for the disabled and elderly
GB9908080D0 (en) Apparatus
WO2004007875A3 (en) Locking bolt work apparatus for atm
GB2136045B (en) Espagnolette
EP0945572A3 (de) Türschlossanordnung, vorzugweise Treibstangenschlossanordnung
ATE323459T1 (de) Säuglingspflegevorrichtung mit tür- /wandverschluss
WO2007011774A3 (en) Interchangeable face plate
WO2005019580A3 (en) Locking bolt work apparatus for automated banking machine
GB2380764A (en) Trunk-boot latch
MY131125A (en) Wafer carrier door and latching mechanism with c-shaped cam follower
US3711140A (en) Cabinet door latch
ATE82792T1 (de) Automatische verriegelung in zwei positionen fuer fenster.
CN216333822U (zh) 一种便移动式周转箱
CN211144113U (zh) 一种翼开启式厢式车的厢板自锁装置
GB2187497A (en) Security lock for a door
CN205442343U (zh) 一种电梯轿厢结构
CN214731128U (zh) 一种耐用品包装箱
CN204728816U (zh) 一种门把手
CN109586200B (zh) 直流开关柜多功能断路器手车