JP4549595B2 - ラッチングドアを備えたウェハーコンテナ - Google Patents

ラッチングドアを備えたウェハーコンテナ Download PDF

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Publication number
JP4549595B2
JP4549595B2 JP2001509652A JP2001509652A JP4549595B2 JP 4549595 B2 JP4549595 B2 JP 4549595B2 JP 2001509652 A JP2001509652 A JP 2001509652A JP 2001509652 A JP2001509652 A JP 2001509652A JP 4549595 B2 JP4549595 B2 JP 4549595B2
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JP
Japan
Prior art keywords
door
latch
lift
container
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2001509652A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003504886A (ja
JP2003504886A5 (enExample
Inventor
ボアーズ，グレゴリー，ダブリュー
ザブカ，マイケル，シー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of JP2003504886A publication Critical patent/JP2003504886A/ja
Publication of JP2003504886A5 publication Critical patent/JP2003504886A5/ja
Application granted granted Critical
Publication of JP4549595B2 publication Critical patent/JP4549595B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
JP2001509652A 1999-07-08 2000-07-06 ラッチングドアを備えたウェハーコンテナ Expired - Lifetime JP4549595B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14283199P 1999-07-08 1999-07-08
US60/142,831 1999-07-08
PCT/US2000/018511 WO2001004022A1 (en) 1999-07-08 2000-07-06 Transport module with latching door

Publications (3)

Publication Number Publication Date
JP2003504886A JP2003504886A (ja) 2003-02-04
JP2003504886A5 JP2003504886A5 (enExample) 2007-08-30
JP4549595B2 true JP4549595B2 (ja) 2010-09-22

Family

ID=22501466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001509652A Expired - Lifetime JP4549595B2 (ja) 1999-07-08 2000-07-06 ラッチングドアを備えたウェハーコンテナ

Country Status (8)

Country Link
EP (1) EP1218264A4 (enExample)
JP (1) JP4549595B2 (enExample)
KR (1) KR100747041B1 (enExample)
CN (1) CN1169696C (enExample)
AU (1) AU6341900A (enExample)
DE (1) DE10084776T5 (enExample)
MY (1) MY128807A (enExample)
WO (1) WO2001004022A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002093622A2 (en) * 2001-05-17 2002-11-21 Ebara Corporation Substrate transport container
US6749067B2 (en) * 2002-01-16 2004-06-15 Entegris, Inc. Wafer carrier door with form fitting mechanism cover
US7325698B2 (en) 2004-04-18 2008-02-05 Entegris, Inc. Wafer container door with particulate collecting structure
JP4573566B2 (ja) 2004-04-20 2010-11-04 信越ポリマー株式会社 収納容器
CN1313331C (zh) * 2004-08-30 2007-05-02 财团法人工业技术研究院 洁净容器结构
JP4540529B2 (ja) 2005-04-18 2010-09-08 信越ポリマー株式会社 収納容器
JP6544128B2 (ja) * 2015-08-07 2019-07-17 シンフォニアテクノロジー株式会社 収納容器の蓋体及び収納容器
CN114628292B (zh) * 2022-05-16 2022-07-29 上海果纳半导体技术有限公司武汉分公司 晶圆传输盒

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5173273A (en) * 1990-10-11 1992-12-22 Brewer Charles A Cassette for dental instruments
US5915562A (en) * 1996-07-12 1999-06-29 Fluoroware, Inc. Transport module with latching door
US5711427A (en) * 1996-07-12 1998-01-27 Fluoroware, Inc. Wafer carrier with door
JP3476052B2 (ja) * 1997-09-01 2003-12-10 信越ポリマー株式会社 輸送容器
JP3722604B2 (ja) * 1997-11-13 2005-11-30 大日本スクリーン製造株式会社 基板処理装置
US6704998B1 (en) * 1997-12-24 2004-03-16 Asyst Technologies, Inc. Port door removal and wafer handling robotic system

Also Published As

Publication number Publication date
JP2003504886A (ja) 2003-02-04
CN1378515A (zh) 2002-11-06
EP1218264A1 (en) 2002-07-03
DE10084776T5 (de) 2005-12-01
WO2001004022B1 (en) 2001-02-15
WO2001004022A1 (en) 2001-01-18
KR100747041B1 (ko) 2007-08-07
AU6341900A (en) 2001-01-30
KR20020063155A (ko) 2002-08-01
CN1169696C (zh) 2004-10-06
EP1218264A4 (en) 2007-09-26
MY128807A (en) 2007-02-28

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