CN1169696C - 具有闭锁门的输送组件 - Google Patents

具有闭锁门的输送组件 Download PDF

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Publication number
CN1169696C
CN1169696C CNB008115826A CN00811582A CN1169696C CN 1169696 C CN1169696 C CN 1169696C CN B008115826 A CNB008115826 A CN B008115826A CN 00811582 A CN00811582 A CN 00811582A CN 1169696 C CN1169696 C CN 1169696C
Authority
CN
China
Prior art keywords
door
container
locking mechanism
locking
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNB008115826A
Other languages
English (en)
Chinese (zh)
Other versions
CN1378515A (zh
Inventor
格雷戈里・W・博里斯
格雷戈里·W·博里斯
・C・扎布卡
迈克尔·C·扎布卡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of CN1378515A publication Critical patent/CN1378515A/zh
Application granted granted Critical
Publication of CN1169696C publication Critical patent/CN1169696C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
CNB008115826A 1999-07-08 2000-07-06 具有闭锁门的输送组件 Expired - Lifetime CN1169696C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14283199P 1999-07-08 1999-07-08
US60/142,831 1999-07-08

Publications (2)

Publication Number Publication Date
CN1378515A CN1378515A (zh) 2002-11-06
CN1169696C true CN1169696C (zh) 2004-10-06

Family

ID=22501466

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB008115826A Expired - Lifetime CN1169696C (zh) 1999-07-08 2000-07-06 具有闭锁门的输送组件

Country Status (8)

Country Link
EP (1) EP1218264A4 (enExample)
JP (1) JP4549595B2 (enExample)
KR (1) KR100747041B1 (enExample)
CN (1) CN1169696C (enExample)
AU (1) AU6341900A (enExample)
DE (1) DE10084776T5 (enExample)
MY (1) MY128807A (enExample)
WO (1) WO2001004022A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002093622A2 (en) * 2001-05-17 2002-11-21 Ebara Corporation Substrate transport container
US6749067B2 (en) * 2002-01-16 2004-06-15 Entegris, Inc. Wafer carrier door with form fitting mechanism cover
US7325698B2 (en) 2004-04-18 2008-02-05 Entegris, Inc. Wafer container door with particulate collecting structure
JP4573566B2 (ja) 2004-04-20 2010-11-04 信越ポリマー株式会社 収納容器
CN1313331C (zh) * 2004-08-30 2007-05-02 财团法人工业技术研究院 洁净容器结构
JP4540529B2 (ja) 2005-04-18 2010-09-08 信越ポリマー株式会社 収納容器
JP6544128B2 (ja) * 2015-08-07 2019-07-17 シンフォニアテクノロジー株式会社 収納容器の蓋体及び収納容器
CN114628292B (zh) * 2022-05-16 2022-07-29 上海果纳半导体技术有限公司武汉分公司 晶圆传输盒

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5173273A (en) * 1990-10-11 1992-12-22 Brewer Charles A Cassette for dental instruments
US5915562A (en) * 1996-07-12 1999-06-29 Fluoroware, Inc. Transport module with latching door
US5711427A (en) * 1996-07-12 1998-01-27 Fluoroware, Inc. Wafer carrier with door
JP3476052B2 (ja) * 1997-09-01 2003-12-10 信越ポリマー株式会社 輸送容器
JP3722604B2 (ja) * 1997-11-13 2005-11-30 大日本スクリーン製造株式会社 基板処理装置
US6704998B1 (en) * 1997-12-24 2004-03-16 Asyst Technologies, Inc. Port door removal and wafer handling robotic system

Also Published As

Publication number Publication date
JP2003504886A (ja) 2003-02-04
CN1378515A (zh) 2002-11-06
EP1218264A1 (en) 2002-07-03
DE10084776T5 (de) 2005-12-01
WO2001004022B1 (en) 2001-02-15
WO2001004022A1 (en) 2001-01-18
KR100747041B1 (ko) 2007-08-07
JP4549595B2 (ja) 2010-09-22
AU6341900A (en) 2001-01-30
KR20020063155A (ko) 2002-08-01
EP1218264A4 (en) 2007-09-26
MY128807A (en) 2007-02-28

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Legal Events

Date Code Title Description
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CX01 Expiry of patent term

Granted publication date: 20041006

CX01 Expiry of patent term