KR100747041B1 - 잠금 문을 가진 이송 모듈 - Google Patents

잠금 문을 가진 이송 모듈 Download PDF

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Publication number
KR100747041B1
KR100747041B1 KR1020027000227A KR20027000227A KR100747041B1 KR 100747041 B1 KR100747041 B1 KR 100747041B1 KR 1020027000227 A KR1020027000227 A KR 1020027000227A KR 20027000227 A KR20027000227 A KR 20027000227A KR 100747041 B1 KR100747041 B1 KR 100747041B1
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KR
South Korea
Prior art keywords
door
locking
container
delete delete
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020027000227A
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English (en)
Korean (ko)
Other versions
KR20020063155A (ko
Inventor
그레고리 더블류. 보어스
마이클 씨. 자브카
Original Assignee
인티그리스, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 인티그리스, 인코포레이티드 filed Critical 인티그리스, 인코포레이티드
Publication of KR20020063155A publication Critical patent/KR20020063155A/ko
Application granted granted Critical
Publication of KR100747041B1 publication Critical patent/KR100747041B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
KR1020027000227A 1999-07-08 2000-07-06 잠금 문을 가진 이송 모듈 Expired - Lifetime KR100747041B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14283199P 1999-07-08 1999-07-08
US60/142,831 1999-07-08

Publications (2)

Publication Number Publication Date
KR20020063155A KR20020063155A (ko) 2002-08-01
KR100747041B1 true KR100747041B1 (ko) 2007-08-07

Family

ID=22501466

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020027000227A Expired - Lifetime KR100747041B1 (ko) 1999-07-08 2000-07-06 잠금 문을 가진 이송 모듈

Country Status (8)

Country Link
EP (1) EP1218264A4 (enExample)
JP (1) JP4549595B2 (enExample)
KR (1) KR100747041B1 (enExample)
CN (1) CN1169696C (enExample)
AU (1) AU6341900A (enExample)
DE (1) DE10084776T5 (enExample)
MY (1) MY128807A (enExample)
WO (1) WO2001004022A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002093622A2 (en) * 2001-05-17 2002-11-21 Ebara Corporation Substrate transport container
US6749067B2 (en) * 2002-01-16 2004-06-15 Entegris, Inc. Wafer carrier door with form fitting mechanism cover
US7325698B2 (en) 2004-04-18 2008-02-05 Entegris, Inc. Wafer container door with particulate collecting structure
JP4573566B2 (ja) 2004-04-20 2010-11-04 信越ポリマー株式会社 収納容器
CN1313331C (zh) * 2004-08-30 2007-05-02 财团法人工业技术研究院 洁净容器结构
JP4540529B2 (ja) 2005-04-18 2010-09-08 信越ポリマー株式会社 収納容器
JP6544128B2 (ja) * 2015-08-07 2019-07-17 シンフォニアテクノロジー株式会社 収納容器の蓋体及び収納容器
CN114628292B (zh) * 2022-05-16 2022-07-29 上海果纳半导体技术有限公司武汉分公司 晶圆传输盒

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5173273A (en) * 1990-10-11 1992-12-22 Brewer Charles A Cassette for dental instruments
US5711427A (en) * 1996-07-12 1998-01-27 Fluoroware, Inc. Wafer carrier with door

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5915562A (en) * 1996-07-12 1999-06-29 Fluoroware, Inc. Transport module with latching door
JP3476052B2 (ja) * 1997-09-01 2003-12-10 信越ポリマー株式会社 輸送容器
JP3722604B2 (ja) * 1997-11-13 2005-11-30 大日本スクリーン製造株式会社 基板処理装置
US6704998B1 (en) * 1997-12-24 2004-03-16 Asyst Technologies, Inc. Port door removal and wafer handling robotic system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5173273A (en) * 1990-10-11 1992-12-22 Brewer Charles A Cassette for dental instruments
US5711427A (en) * 1996-07-12 1998-01-27 Fluoroware, Inc. Wafer carrier with door

Also Published As

Publication number Publication date
JP2003504886A (ja) 2003-02-04
CN1378515A (zh) 2002-11-06
EP1218264A1 (en) 2002-07-03
DE10084776T5 (de) 2005-12-01
WO2001004022B1 (en) 2001-02-15
WO2001004022A1 (en) 2001-01-18
JP4549595B2 (ja) 2010-09-22
AU6341900A (en) 2001-01-30
KR20020063155A (ko) 2002-08-01
CN1169696C (zh) 2004-10-06
EP1218264A4 (en) 2007-09-26
MY128807A (en) 2007-02-28

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