DD283982A5 - Verfahren zur steigerung des anteils an siliciumtetrachlorid - Google Patents
Verfahren zur steigerung des anteils an siliciumtetrachlorid Download PDFInfo
- Publication number
- DD283982A5 DD283982A5 DD89331915A DD33191589A DD283982A5 DD 283982 A5 DD283982 A5 DD 283982A5 DD 89331915 A DD89331915 A DD 89331915A DD 33191589 A DD33191589 A DD 33191589A DD 283982 A5 DD283982 A5 DD 283982A5
- Authority
- DD
- German Democratic Republic
- Prior art keywords
- reaction
- trichlorosilane
- silicon
- hydrogen chloride
- mixture
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
- C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
- C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
- C01B33/10747—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of tetrachloride
- C01B33/10752—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of tetrachloride from silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3828344A DE3828344C1 (no) | 1988-08-20 | 1988-08-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
DD283982A5 true DD283982A5 (de) | 1990-10-31 |
Family
ID=6361272
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DD89331915A DD283982A5 (de) | 1988-08-20 | 1989-08-18 | Verfahren zur steigerung des anteils an siliciumtetrachlorid |
Country Status (5)
Country | Link |
---|---|
US (1) | US4980143A (no) |
EP (1) | EP0355593B1 (no) |
JP (1) | JPH0297415A (no) |
DD (1) | DD283982A5 (no) |
DE (2) | DE3828344C1 (no) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100495988B1 (ko) * | 1996-09-03 | 2005-09-30 | 가부시키가이샤 도쿠야마 | 사염화규소의제조방법 |
CN1114559C (zh) * | 1996-09-03 | 2003-07-16 | 株式会社德山 | 四氯化硅的制造方法 |
JP5329641B2 (ja) * | 2009-03-11 | 2013-10-30 | 電気化学工業株式会社 | クロロシラン回収装置およびそれを用いたクロロシラン回収方法 |
DE102011003453A1 (de) * | 2011-02-01 | 2012-08-02 | Wacker Chemie Ag | Verfahren zur destillativen Reinigung von Chlorsilanen |
CN104080738B (zh) * | 2011-10-20 | 2015-12-23 | 瑞科硅公司 | 氢氯硅烷生产中结垢的降低 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1054436B (de) * | 1956-02-11 | 1959-04-09 | Pechiney Prod Chimiques Sa | Verfahren zur Herstellung von kompaktem Silicium hohen Reinheitsgrades |
GB963745A (en) * | 1961-01-05 | 1964-07-15 | British Titan Products | Halogenation of silicon-containing materials |
BE792542A (fr) * | 1971-12-11 | 1973-03-30 | Degussa | Procede pour la fabrication de chlorosilanes exempts de metaux lors de la chloration ou l'hydrochloration de ferrosilicium |
DE2365273C3 (de) * | 1973-12-31 | 1980-09-25 | Dynamit Nobel Ag, 5210 Troisdorf | Verfahren zur Hydrochlorierung von elementaren Silicium |
DE2630542C3 (de) * | 1976-07-07 | 1981-04-02 | Dynamit Nobel Ag, 5210 Troisdorf | Verfahren zur Herstellung von Trichlorsilan und Siliciumtetrahlorid |
JPS57156318A (en) * | 1981-03-16 | 1982-09-27 | Koujiyundo Silicon Kk | Production of trichlorosilane |
JPS5832011A (ja) * | 1981-08-17 | 1983-02-24 | Nippon Aerojiru Kk | 珪素と塩化水素からトリクロルシランと四塩化珪素を製造する方法 |
DE3303903A1 (de) * | 1982-02-16 | 1983-08-25 | General Electric Co., Schenectady, N.Y. | Verfahren zum herstellen von trichlorsilan aus silizium |
US4526769A (en) * | 1983-07-18 | 1985-07-02 | Motorola, Inc. | Trichlorosilane production process |
DE3809784C1 (no) * | 1988-03-23 | 1989-07-13 | Huels Ag, 4370 Marl, De |
-
1988
- 1988-08-20 DE DE3828344A patent/DE3828344C1/de not_active Expired
-
1989
- 1989-06-09 US US07/364,246 patent/US4980143A/en not_active Expired - Fee Related
- 1989-08-10 DE DE8989114776T patent/DE58902675D1/de not_active Expired - Lifetime
- 1989-08-10 EP EP89114776A patent/EP0355593B1/de not_active Expired - Lifetime
- 1989-08-18 DD DD89331915A patent/DD283982A5/de not_active IP Right Cessation
- 1989-08-21 JP JP1213127A patent/JPH0297415A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0355593A3 (de) | 1991-04-10 |
DE3828344C1 (no) | 1989-07-06 |
DE58902675D1 (de) | 1992-12-17 |
EP0355593A2 (de) | 1990-02-28 |
EP0355593B1 (de) | 1992-11-11 |
US4980143A (en) | 1990-12-25 |
JPH0297415A (ja) | 1990-04-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ENJ | Ceased due to non-payment of renewal fee |