CS184091A3 - Process for preparing polymers and copolymers with a low optical density for photoresists and optical applications - Google Patents

Process for preparing polymers and copolymers with a low optical density for photoresists and optical applications Download PDF

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Publication number
CS184091A3
CS184091A3 CS911840A CS184091A CS184091A3 CS 184091 A3 CS184091 A3 CS 184091A3 CS 911840 A CS911840 A CS 911840A CS 184091 A CS184091 A CS 184091A CS 184091 A3 CS184091 A3 CS 184091A3
Authority
CS
Czechoslovakia
Prior art keywords
substituted
acetoxystyrene
hydroxystyrene
monomer
initiator
Prior art date
Application number
CS911840A
Other languages
Czech (cs)
English (en)
Inventor
Michael T Sheehan
James H Rea
Original Assignee
Hoechst Celanese Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27415527&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CS184091(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from US07/706,601 external-priority patent/US5239015A/en
Application filed by Hoechst Celanese Corp filed Critical Hoechst Celanese Corp
Publication of CS184091A3 publication Critical patent/CS184091A3/cs

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F212/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F8/00—Chemical modification by after-treatment
    • C08F8/12—Hydrolysis
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2800/00—Copolymer characterised by the proportions of the comonomers expressed
    • C08F2800/20—Copolymer characterised by the proportions of the comonomers expressed as weight or mass percentages

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Polymerization Catalysts (AREA)
  • Polymerisation Methods In General (AREA)
CS911840A 1990-06-29 1991-06-14 Process for preparing polymers and copolymers with a low optical density for photoresists and optical applications CS184091A3 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US54834490A 1990-06-29 1990-06-29
US60484790A 1990-10-26 1990-10-26
US07/706,601 US5239015A (en) 1990-06-29 1991-05-28 Process for making low optical density polymers and copolymers for photoresists and optical applications

Publications (1)

Publication Number Publication Date
CS184091A3 true CS184091A3 (en) 1992-03-18

Family

ID=27415527

Family Applications (1)

Application Number Title Priority Date Filing Date
CS911840A CS184091A3 (en) 1990-06-29 1991-06-14 Process for preparing polymers and copolymers with a low optical density for photoresists and optical applications

Country Status (17)

Country Link
EP (1) EP0466359B2 (zh)
JP (1) JP3022932B2 (zh)
KR (1) KR100201375B1 (zh)
CN (1) CN1057847A (zh)
AT (1) ATE192753T1 (zh)
AU (1) AU7945691A (zh)
CS (1) CS184091A3 (zh)
DE (1) DE69132181T3 (zh)
FI (1) FI913175A (zh)
HU (1) HUT64986A (zh)
IE (1) IE64029B1 (zh)
IL (1) IL98605A (zh)
NO (1) NO178155C (zh)
PH (1) PH30779A (zh)
PL (1) PL290835A1 (zh)
SG (1) SG46518A1 (zh)
TW (1) TW219368B (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4300209A1 (de) * 1993-01-07 1994-07-14 Basf Ag Verfahren zur Herstellung von p-Hydroxystyrolpolymerisaten und deren Verwendung
US5324788A (en) * 1993-04-30 1994-06-28 Eastman Kodak Company Thermosetting coating compositions
KR100332915B1 (ko) * 1997-12-23 2002-10-25 주식회사 포스코 접착력 및 내식성이 개선된 강판 피복용 스티렌 고분자 킬레이트 접착제 제조방법
US6414101B1 (en) 1999-03-26 2002-07-02 Shin-Etsu Chemical Co., Ltd. Dendritic polymers and making method
JP2002302515A (ja) 2001-04-04 2002-10-18 Gun Ei Chem Ind Co Ltd レジスト用高分子化合物の製造方法
TWI267697B (en) * 2001-06-28 2006-12-01 Tokyo Ohka Kogyo Co Ltd Chemical amplified type positive resist component and resist packed-layer material and forming method of resist pattern and manufacturing method of semiconductor device
JP5503654B2 (ja) * 2009-08-21 2014-05-28 日本曹達株式会社 変性ポリシロキサン化合物の製造方法
KR102245076B1 (ko) * 2020-08-26 2021-04-28 로움하이텍 주식회사 비닐페놀계 중합체의 제조방법
KR102245074B1 (ko) * 2020-09-17 2021-04-28 로움하이텍 주식회사 비닐페놀계 중합체의 제조방법

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB948961A (en) * 1960-01-22 1964-02-05 Nat Res Dev Polymers derived from polyvinyl phenol
EP0277721A3 (en) * 1987-01-28 1989-03-15 Hoechst Celanese Corporation Emulsion polymerization of 4-acetoxystyrene and hydrolysis to poly(p-vinylphenol)
US4898916A (en) * 1987-03-05 1990-02-06 Hoechst Celanese Corporation Process for the preparation of poly(vinylphenol) from poly(acetoxystyrene) by acid catalyzed transesterification
EP0353339A3 (en) * 1988-08-02 1990-05-09 Hoechst Aktiengesellschaft A process for the production of poly(3-mono or 3,5-disubstituted-4-acetoxystryrenes), their copolymers and hydrolysis thereof

Also Published As

Publication number Publication date
IL98605A0 (en) 1992-07-15
TW219368B (zh) 1994-01-21
HU911969D0 (en) 1991-12-30
AU7945691A (en) 1992-01-02
NO912557D0 (no) 1991-06-28
PH30779A (en) 1997-10-17
IL98605A (en) 1995-03-15
DE69132181D1 (de) 2000-06-15
EP0466359B1 (en) 2000-05-10
NO178155C (no) 1996-01-31
IE912267A1 (en) 1992-01-01
HUT64986A (en) 1994-03-28
KR100201375B1 (ko) 1999-06-15
ATE192753T1 (de) 2000-05-15
FI913175A (fi) 1991-12-30
FI913175A0 (fi) 1991-06-28
SG46518A1 (en) 1998-02-20
NO178155B (no) 1995-10-23
EP0466359A3 (en) 1992-07-01
DE69132181T3 (de) 2004-05-06
EP0466359B2 (en) 2003-07-23
IE64029B1 (en) 1995-06-28
PL290835A1 (en) 1992-03-23
NO912557L (no) 1991-12-30
DE69132181T2 (de) 2000-12-14
JP3022932B2 (ja) 2000-03-21
KR920000807A (ko) 1992-01-29
JPH04279608A (ja) 1992-10-05
EP0466359A2 (en) 1992-01-15
CN1057847A (zh) 1992-01-15

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