CN212834142U - 碳化硅晶体的生长装置 - Google Patents
碳化硅晶体的生长装置 Download PDFInfo
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113293438A (zh) * | 2021-06-01 | 2021-08-24 | 中科汇通(内蒙古)投资控股有限公司 | 一种具有双生长腔室的翻转式SiC单晶生长装置 |
CN115212656A (zh) * | 2022-07-22 | 2022-10-21 | 中材人工晶体研究院(山东)有限公司 | 多孔过滤器、制备方法及其在碳化硅单晶生长中的用途 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113293438A (zh) * | 2021-06-01 | 2021-08-24 | 中科汇通(内蒙古)投资控股有限公司 | 一种具有双生长腔室的翻转式SiC单晶生长装置 |
CN115212656A (zh) * | 2022-07-22 | 2022-10-21 | 中材人工晶体研究院(山东)有限公司 | 多孔过滤器、制备方法及其在碳化硅单晶生长中的用途 |
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Address after: 321000 south side of Building 1, No. 2688, south 2nd Ring West Road, qiubin street, Wucheng District, Jinhua City, Zhejiang Province Patentee after: Jinhua Bolante New Material Co.,Ltd. Address before: 321000 south side of Building 1, No. 2688, south 2nd Ring West Road, qiubin street, Wucheng District, Jinhua City, Zhejiang Province Patentee before: Jinhua Bolante Electronic Materials Co.,Ltd. |
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Effective date of registration: 20220615 Address after: 321000 plant 3, No. 2688, south 2nd Ring West Road, qiubin street, Wucheng District, Jinhua City, Zhejiang Province (self declaration) Patentee after: Zhejiang Fuxin Microelectronics Technology Co.,Ltd. Address before: 321000 south side of Building 1, No. 2688, south 2nd Ring West Road, qiubin street, Wucheng District, Jinhua City, Zhejiang Province Patentee before: Jinhua Bolante New Material Co.,Ltd. |
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Effective date of registration: 20230608 Address after: 321000 south side of Building 1, No. 2688, south 2nd Ring West Road, qiubin street, Wucheng District, Jinhua City, Zhejiang Province Patentee after: Jinhua Bolante New Material Co.,Ltd. Address before: 321000 plant 3, No. 2688, south 2nd Ring West Road, qiubin street, Wucheng District, Jinhua City, Zhejiang Province (self declaration) Patentee before: Zhejiang Fuxin Microelectronics Technology Co.,Ltd. |
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