CN203013712U - 一种三维芯片的金属键合结构 - Google Patents
一种三维芯片的金属键合结构 Download PDFInfo
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- CN203013712U CN203013712U CN 201320017242 CN201320017242U CN203013712U CN 203013712 U CN203013712 U CN 203013712U CN 201320017242 CN201320017242 CN 201320017242 CN 201320017242 U CN201320017242 U CN 201320017242U CN 203013712 U CN203013712 U CN 203013712U
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103107128A (zh) * | 2013-01-14 | 2013-05-15 | 陆伟 | 一种三维芯片结构的金属键合的方法及键合结构 |
CN105826213B (zh) * | 2015-01-06 | 2018-12-21 | 中芯国际集成电路制造(上海)有限公司 | 晶圆键合方法以及晶圆键合结构 |
CN109844934A (zh) * | 2016-10-27 | 2019-06-04 | 英帆萨斯公司 | 用于低温接合的结构和方法 |
US11710718B2 (en) | 2015-07-10 | 2023-07-25 | Adeia Semiconductor Technologies Llc | Structures and methods for low temperature bonding using nanoparticles |
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2013
- 2013-01-14 CN CN 201320017242 patent/CN203013712U/zh not_active Expired - Lifetime
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103107128A (zh) * | 2013-01-14 | 2013-05-15 | 陆伟 | 一种三维芯片结构的金属键合的方法及键合结构 |
CN103107128B (zh) * | 2013-01-14 | 2014-12-17 | 武汉新芯集成电路制造有限公司 | 一种三维芯片结构的金属键合的方法 |
CN105826213B (zh) * | 2015-01-06 | 2018-12-21 | 中芯国际集成电路制造(上海)有限公司 | 晶圆键合方法以及晶圆键合结构 |
US11710718B2 (en) | 2015-07-10 | 2023-07-25 | Adeia Semiconductor Technologies Llc | Structures and methods for low temperature bonding using nanoparticles |
CN109844934A (zh) * | 2016-10-27 | 2019-06-04 | 英帆萨斯公司 | 用于低温接合的结构和方法 |
CN109844934B (zh) * | 2016-10-27 | 2023-08-08 | 艾德亚半导体科技有限责任公司 | 用于低温接合的结构和方法 |
US11973056B2 (en) | 2016-10-27 | 2024-04-30 | Adeia Semiconductor Technologies Llc | Methods for low temperature bonding using nanoparticles |
US12027487B2 (en) | 2016-10-27 | 2024-07-02 | Adeia Semiconductor Technologies Llc | Structures for low temperature bonding using nanoparticles |
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Owner name: WUHAN XINXIN SEMICONDUCTOR MANUFACTURING CO., LTD. Free format text: FORMER OWNER: LU WEI Effective date: 20130709 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 200124 PUDONG NEW AREA, SHANGHAI TO: 430205 WUHAN, HUBEI PROVINCE |
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Effective date of registration: 20130709 Address after: 430205 Wuhan Province, East Lake City Development Zone, No., No. four high road, No. 18 Patentee after: Wuhan Xinxin Semiconductor Manufacturing Co.,Ltd. Address before: 200124, room 9, No. 905, Lane 301, Haiyang Road, Shanghai, Pudong New Area Patentee before: Lu Wei |
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Granted publication date: 20130619 |
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