CN201117644Y - Fully automatic wafer loading and unloading machine - Google Patents

Abstract

The utility model discloses a fully-automatic silicon slice feeding machine, which solves the technical problems of low production efficiency, high scrap rate and serious waste as most of the solar battery manufacturers at present still manually put the silicon slice into the basket and take the silicon slice out of the basket. The fully-automatic silicon slice feeding machine includes an electric implementer, a lower feeding position, a suction dice, an upper feeding position, a positioning mechanism, a conveyer belt, a basket, a tray, an operating platform, an operating panel, an equipment frame, an upper feeding position lifting mechanism and a basket lifting mechanism. The fully-automatic silicon slice feeding machine with the advantages of easy installation, convenient operation and high automation degree can increase the production efficiency, reduce the scrap rate and satisfy the feeding requirements of various silicon slice process.

Description

Fully automatic wafer loading and unloading machine

technical field

The utility model relates to a loading and unloading machine, in particular to a fully automatic silicon wafer loading and unloading machine. The equipment belongs to an independent overall equipment and is used in the solar cell manufacturing industry or the semiconductor industry to realize the loading and unloading of silicon wafers to baskets. cutting.

Background technique

As a renewable and environmentally friendly energy source, solar cells have attracted more and more attention. The annual sales growth rate of solar cells in the world has exceeded 40% in recent years, and the related equipment has also been developed rapidly. At present, under the impetus of the country's macro policy of advocating energy conservation, Beijing, Shanghai, Guangdong, Jiangsu, etc. are actively developing solar cell products. Aiming at the fact that many solar cell manufacturers still manually load silicon wafers into and take out silicon wafers from the basket, a fully automatic silicon wafer loading and unloading machine was invented. As an auxiliary equipment for solar cell production, it greatly improves production Efficiency and reduced chip fragmentation rate, effectively reducing costs.

Contents of the invention

The utility model provides a fully automatic loading and unloading machine for silicon wafers, which solves the technical problems of high fragmentation rate of silicon wafers and low production efficiency caused by manually loading silicon wafers into and taking out silicon wafers from the basket.

The technical scheme that the utility model solves its technical problem adopts is:

Fully automatic silicon wafer loading and unloading machine, including electric actuator 1, unloading position 2, loading platform 4, conveyor belt 6, basket tray operating mechanism 7, operating table 8, operation panel 9, equipment frame 10, loading position The lifting mechanism 11 and the basket lifting mechanism 12 are fixedly provided with a basket tray operating mechanism 7 at the front left and right sides of the operating table 8, and the operating table of the basket tray operating mechanism 7 is fixedly arranged with The linear module 14 of the basket lifting mechanism 12 is fixedly connected, and the linear module 14 is fixedly connected with the shaft coupling of the motor 13, thereby realizing the lifting of the basket tray placed on the operating table of the operating mechanism 7; A conveyor belt 6 is arranged directly behind the operating mechanism 7, and one end of the conveyor belt is aligned with the basket tray on the basket tray operating mechanism 7, so that the silicon wafers conveyed on the belt are automatically and sequentially transferred to each layer of baskets, Below the other end of the conveyor belt is the feeding level 2; an electric actuator 1 is set above the left and right conveyor belts, and a suction cup operating device 3 is arranged on it, in front of the electric actuator 1 and in the middle of the two conveyor belts. A rectangular hole is provided on the operating table 8, and a feeding platform 4 is arranged in the hole, and the platform 4 is fixedly connected with the linear module 16 on the feeding level lifting mechanism 11 fixedly arranged under the operating table 8, and the lifting mechanism The motor 17 in 11 realizes the lifting of the silicon wafer on the feeding table 4 by operating the linear module 16; the suction cup operating device 3 on the electric actuator 1 can move horizontally along the guide rail to realize the left and right transfer of the adsorbed silicon wafer .

Air blowing and separating devices are arranged on the left and right sides of the rectangular hole provided on the operating table top 8 .

On the operating table 8, a positioning mechanism 5 is provided on both sides of each conveyor belt 6 to realize the correction and positioning of the direction of each silicon wafer.

The utility model has simple structure and convenient operation, and is suitable for automatic loading and unloading of different silicon wafers.

Description of drawings

Fig. 1 is the overall structural representation of the utility model

Figure 2 is a schematic structural view of the loading level lifting mechanism 11

Figure 3 is a schematic structural view of the electric actuator 1

Fig. 4 is the structural representation of basket lifting mechanism 12

Detailed ways

Describe the specific embodiment of the present utility model in detail below in conjunction with accompanying drawing:

Fully automatic silicon wafer loading and unloading machine, mainly including electric actuator 1 and suction cup operating device 3 on it, unloading level 2, loading level 4, positioning mechanism 5, conveyor belt 6, basket tray 7, operating table 8, operation Panel 9, equipment frame 10, feeding level lifting mechanism 11, basket lifting mechanism 12, AC servo motor 13, linear module 14, basket 15.

The precision positioning movement of the material level lifting mechanism 11 and the basket lifting mechanism 12 is completed by the AC servo motor 13 . A high-precision, high-speed, low-inertia AC servo motor 13 is used to control the precise movement of the linear module 14. At the same time, the encoder provides feedback information to form a closed-loop control to achieve high-speed and precise movement.

The air blowing separation device of the upper material level 4 is installed on both sides. After the clean compressed air is adjusted and throttled, it enters a flat copper tube with only one slit at the end, and the slit of the copper tube is vertical. . In this way, the airflow generated from the slits of the copper tube is vertical and layered, which can easily blow away the silicon wafers on the uppermost material level in a layered manner, which is convenient for the suction cup to absorb, which not only improves the efficiency of the equipment but also reduces the the fragmentation rate of the silicon wafer.

The operation panel 9 can be rotated, and various technological actions and various technological parameters can be set and modified through it. It also has functions such as program process control and fault alarm.

Suction cup device 3 is made up of cylinder and four small suction cups, and vacuum adsorption is reliable, and stability is good.

The positioning mechanism 5 adopts cylinder movement limit, automatically corrects the direction of silicon wafers, and ensures safe and reliable feeding of silicon wafers.

Conveyor belt 6 adopts the round belt with soft texture, reduces the contact area with silicon chip, avoids damage and pollution silicon chip.

The fixed basket of the basket tray 7 is positioned on an inclined plane, and an adjustable limit block is installed, which is stable and reliable. For silicon wafers of different sizes, simply adjust the limit block.

The electric actuator 1 adopts components with adjustable speed and acceleration, which can meet the needs of different processes. The transmission speed is fast, and the operation is stable and reliable.

The feeding position 2 is equipped with blowing holes, which can blow up the silicon wafers in a suspended state, prevent the silicon wafers from being scratched, and facilitate the silicon wafer unloading.

When working, the material level lifting mechanism 11 moves vertically up and down, driving the material level 4 to move vertically up and down, and at the same time, the electric actuator 1 moves horizontally to drive the suction cup 3 to move horizontally to realize the suction of silicon wafers, and then the electric actuator 1 moves around Horizontal movement puts the silicon wafers on the conveyor belt 6, the positioning mechanism 5 moves to correct the silicon wafers, and at the same time the basket lifting mechanism 12 drives the basket tray 7 to move vertically up and down, and the conveyor belt 6 runs to send the silicon wafers into the basket to realize loading. The basket lifting mechanism 12 drives the basket tray 7 to move vertically up and down, and the conveyor belt 6 runs to transfer the silicon wafer to the blanking position 2 to realize blanking.

Claims (3)

1, a kind of full-automatic silicon chip charging ﹠ discharging machine, comprise electric actuator (1), following material level (2), feeding platform position (4), conveyer belt (6), basket tool pallet operation mechanism (7), operating table surface (8), guidance panel (9), device framework (10), last material level elevating mechanism (11), basket tool rising mechanism (12), it is characterized in that, place, the place ahead, the left and right sides on described operating table surface (8) is set with basket tool pallet operation mechanism (7), the linear module (14) of the basket tool rising mechanism (12) that fixedly installs under the operating desk of this basket tool pallet operation mechanism (7) and the table top (8) is fixedlyed connected, this linearity module (14) is fixedlyed connected with the shaft coupling of motor (13), thus the lifting of the basket tool pallet of placing on the operating desk of realization to operating mechanism (7); Be provided with conveyer belt (6) in the dead astern of basket tool pallet operation mechanism (7), basket tool pallet in one end of this conveyer belt and the basket tool pallet operation mechanism (7) aligns, automatically be sent to successively in each layer basket tool to finish the silicon chip that will transmit on the belt, the below of the other end of this conveyer belt is following material level (2); About two feed belts above be provided with electric actuator (1), it is provided with sucker operating means (3), the operating table surface (8) in the place ahead of electric actuator (1) and the centre position of two feed belts is provided with a rectangular opening, be provided with feeding platform position (4) in this hole, linear module (16) on the last material level elevating mechanism (11) that fixedly installs under this position (4) and the operating table surface (8) is fixedlyed connected, and the motor (17) in the elevating mechanism (11) is realized the lifting of the silicon chip on the feeding platform position (4) by the linear module of operation (16); Sucker operating means (3) on the electric actuator (1) can be along the horizontal move left and right of guide rail, to realize transmitting about the absorption silicon chip.

2, full-automatic silicon chip charging ﹠ discharging machine according to claim 1 is characterized in that, the left and right sides that described operating table surface (8) goes up the rectangular opening that is provided with is provided with air separation plant.

3, full-automatic silicon chip charging ﹠ discharging machine according to claim 1 and 2 is characterized in that, on the described operating table surface (8), all is provided with detent mechanism (5) in the both sides of every conveyer belt (6), realizes rectification and location to the direction of every silicon chip.

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