CN102358449A - Full-automatic silicon wafer loader - Google Patents
Full-automatic silicon wafer loader Download PDFInfo
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- CN102358449A CN102358449A CN2011101677326A CN201110167732A CN102358449A CN 102358449 A CN102358449 A CN 102358449A CN 2011101677326 A CN2011101677326 A CN 2011101677326A CN 201110167732 A CN201110167732 A CN 201110167732A CN 102358449 A CN102358449 A CN 102358449A
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- silicon chip
- silicon wafer
- gaily decorated
- decorated basket
- electrically connected
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention discloses a full-automatic silicon wafer loader, which solves the problems of high wafer fragmentation rate and low production efficiency when the silicon wafer is manually loaded into a basket. The full-automatic silicon wafer loader comprises basket lifting mechanisms (1), silicon wafer delivery mechanisms (3), a silicon wafer suction mechanism (6), a feeding mechanism (7) and a programmable controller (11), wherein feeding linear guide rails (13) of the feeding mechanism (7) are movably provided with a silicon wafer supporting plate (12); the silicon wafer supporting plate (12) is fixedly connected with screws and nuts; a sliding channel of the silicon wafer suction mechanism (6) is horizontally arranged in the right and left directions; a sliding block (21) arranged on the sliding channel is connected with sucking disks; silicon wafer delivery motors of the silicon wafer delivery mechanisms (3) are electrically connected with the programmable controller (11); basket trays (16) are arranged on moving components (19) of a linear guide rail pair (18); and lifting motors (17) are electrically connected with the programmable controller (11). The full-automatic silicon wafer loader has a simple structure and is suitable for automatically loading the silicon wafers with different sizes into different baskets.
Description
Technical field
The present invention relates to a kind of loader, particularly a kind of full automaticity silicon chip loader, this equipment is used for the photovoltaic industry, realizes the auto loading of silicon chip to the gaily decorated basket.
Background technology
In the manufacture of solar cells process, multiple working procedure all need be packed silicon chip in the basket tool into, and numerous domestic solar cell maker still adopts manual type to load silicon chip.There are a lot of problems in artificial load: hand contacts with silicon chip during owing to load, and silicon chip is had pollution, and fragment rate is high, and production efficiency is low.
Summary of the invention
The present invention provides a kind of full automaticity silicon chip loader to solve the high and low technical matters of production efficiency of the silicon chip fragment rate that causes when packing silicon chip into the basket tool by hand.
The present invention overcomes the above problems through following scheme:
Full automaticity silicon chip loader; The feed mechanism and the Programmable Logic Controller that be included in the gaily decorated basket lifting mechanism that the bench board front part sides is provided with respectively, the silicon chip connecting gear that is provided with respectively in both sides, bench board middle part, the silicon chip draw frame machine that is provided with at the bench board rear portion, are provided with at the bench board middle part; The material loading line slideway of described feed mechanism vertically is provided with up and down; On the material loading line slideway, be movably set with the silicon chip hand-rest plate; The silicon chip hand-rest plate is captiveed joint with screw, and the leading screw that cooperates with screw links together through the output shaft of coupler and servomotor, above the silicon chip hand-rest plate, is provided with described silicon chip draw frame machine; The bench board of the side of silicon chip hand-rest plate is provided with the air separator of silicon chip, and the air separator of servomotor and silicon chip is electrically connected with Programmable Logic Controller respectively; The horizontal left and right directions setting of the slideway of silicon chip draw frame machine; The slide block and the motor that are arranged on the slideway link together through synchronous band; Right ends at the in-line brace plate of captiveing joint with slide block is respectively arranged with left sucker and right sucker, and motor is electrically connected with Programmable Logic Controller; Described silicon chip connecting gear comprises that silicon chip transmits motor and silicon chip feed belt, and silicon chip transmits motor and is electrically connected with Programmable Logic Controller; The gaily decorated basket in the gaily decorated basket lifting mechanism is arranged on the gaily decorated basket pallet, and gaily decorated basket pallet is arranged on the motion assembly of line slideway auxiliary, line slideway auxiliary and lifting motor mechanical connection, and lifting motor is electrically connected with Programmable Logic Controller.
Described gaily decorated basket pallet is provided with the adjustable limiting piece and the locating dowel pin of the gaily decorated basket.
The present invention is simple in structure easy to operate, is applicable to the auto loading of the corresponding variety classes gaily decorated basket of silicon chip of different size.
Description of drawings
Fig. 1 is an overall structure scheme drawing of the present invention
Fig. 2 is the structural representation of feed mechanism 7 among the present invention
Fig. 3 is the structural representation of gaily decorated basket lifting mechanism 1 among the present invention
Fig. 4 is the structural representation of silicon chip draw frame machine 6 among the present invention.
Specific embodiment
Full automaticity silicon chip loader; The feed mechanism 7 and the Programmable Logic Controller 11 that be included in the gaily decorated basket lifting mechanism 1 that the bench board front part sides is provided with respectively, the silicon chip connecting gear 3 that is provided with respectively in both sides, bench board middle part, the silicon chip draw frame machine 6 that is provided with at the bench board rear portion, are provided with at the bench board middle part; The material loading line slideway 13 of described feed mechanism 7 vertically is provided with up and down; On material loading line slideway 13, be movably set with silicon chip hand-rest plate 12; Silicon chip hand-rest plate 12 is captiveed joint with screw; The leading screw that cooperates with screw links together through the output shaft of coupler 14 with servomotor 15; Above silicon chip hand-rest plate 12, be provided with described silicon chip draw frame machine 6, the bench board of the side of silicon chip hand-rest plate 12 is provided with the air separator 8 of silicon chip, and the air separator 8 of servomotor 15 and silicon chip is electrically connected with Programmable Logic Controller 11 respectively; The horizontal left and right directions setting of the slideway of silicon chip draw frame machine 6; The slide block 21 that is arranged on the slideway links together through synchronous band with motor 20; Right ends at the in-line brace plate of captiveing joint with slide block 21 is respectively arranged with left sucker 5 and right sucker 10, and motor 20 is electrically connected with Programmable Logic Controller 11; Described silicon chip connecting gear 3 comprises that silicon chip transmits motor and silicon chip feed belt 4, and silicon chip transmits motor and is electrically connected with Programmable Logic Controller 11; The gaily decorated basket 2 in the gaily decorated basket lifting mechanism 1 is arranged on the gaily decorated basket pallet 16, and gaily decorated basket pallet 16 is arranged on the motion assembly 19 of line slideway auxiliary 18, line slideway auxiliary 18 and lifting motor 17 mechanical connections, and lifting motor 17 is electrically connected with Programmable Logic Controller 11.
Described gaily decorated basket pallet 16 is provided with the adjustable limiting piece and the locating dowel pin of the gaily decorated basket 2.
Silicon chip arrives the position of air separator 8 through the lifting of feed mechanism 7; Clean compressed air is through pressure regulation, throttling; Get into the terminal air separator 8 that the air blowing round is arranged; Silicon chip is through after the air separator 8 stratified separation, and silicon chip topmost alternately is adsorbed onto on the belt conveyor 4 in the silicon chip connecting gear 3 of the right and left by silicon chip draw frame machine 6 respectively, in the gaily decorated basket 2 above the driving lower silicon slice of belt conveyor 4 gets into gaily decorated basket lifting mechanism 1.PLC control panel 11 can rotate, and is provided with and revises various technological actions and each item technological parameter through its, and it also has functions such as program process control, fault alarm.
Feed mechanism is perpendicular movement about in the of 7, drive silicon chip hand-rest plate perpendicular movement about in the of 12, and the precise placement motion of feed mechanism 7 is accomplished by material loading motor 15, and coupler 14 is connected the action of material loading line slideway 13 with the output shaft of material loading servomotor 15 synchronously.
Air separator 8 is installed in feed mechanism 7 both sides, and clean compressed air get into the gas-blowing column that end is a finedraw, and the finedraw direction is vertical with silicon chip through pressure regulation, throttling.The air-flow that produces in the finedraw like this is vertical, stratified; Just can be stratified uppermost silicon chip, blow open easily; Be convenient to the absorption that hockets of left sucker 5 and 10 pairs of silicon chips of right sucker in the silicon chip draw frame machine 6, not only improved the efficient of equipment but also reduced the fragment rate of silicon chip.
Gaily decorated basket lifting mechanism 1 adopt high precision, at a high speed, low inertia AC Servo Motor Control gaily decorated basket rectilinear system 18 accurately moves, and by coder feedback information is provided simultaneously, forms closed loop control, realize not only moving at a high speed but also accurately.Gaily decorated basket pallet 16 is captiveed joint with the motion assembly 19 on the gaily decorated basket rectilinear system 18, and inclined-plane or circular hole location are adopted in the location of the gaily decorated basket 2 on gaily decorated basket pallet 16, can install adjustable limiting piece and locating dowel pin additional, and be reliable and stable.The different size silicon chip is only needed simple adjustment locating dowel pin.
In the silicon chip draw frame machine 6, motor 20 is realized the side-to-side movement of sucker structures through band driving sliding block 21 synchronously, and the element that employing speed and acceleration/accel are adjustable can satisfy the needs of different process, and speed of transmission is fast, stable and reliable operation.Two groups of sucker structures of slide block 21 captive joints, left sucker 5 is formed by cylinder and four small suckers with right sucker 10, and vacuum suction is reliable, good stability.
Belt conveyor 4 adopts the soft round belt of quality, and the area of contact of minimizing and silicon chip is avoided damage and polluted silicon chip.
Claims (2)
1. full automaticity silicon chip loader; The feed mechanism (7) and the Programmable Logic Controller (11) that be included in the gaily decorated basket lifting mechanism (1) that the bench board front part sides is provided with respectively, the silicon chip connecting gear (3) that is provided with respectively in both sides, bench board middle part, the silicon chip draw frame machine (6) that is provided with at the bench board rear portion, are provided with at the bench board middle part; It is characterized in that; The material loading line slideway (13) of described feed mechanism (7) vertically is provided with up and down; On material loading line slideway (13), be movably set with silicon chip hand-rest plate (12); Silicon chip hand-rest plate (12) is captiveed joint with screw; The leading screw that cooperates with screw links together through the output shaft of coupler (14) with servomotor (15); Be provided with described silicon chip draw frame machine (6) in the top of silicon chip hand-rest plate (12), the bench board of the side of silicon chip hand-rest plate (12) is provided with the air separator (8) of silicon chip, and the air separator (8) of servomotor (15) and silicon chip is electrically connected with Programmable Logic Controller (11) respectively; The horizontal left and right directions setting of the slideway of silicon chip draw frame machine (6); The slide block (21) that is arranged on the slideway links together through synchronous band with motor (20); Right ends at the in-line brace plate of captiveing joint with slide block (21) is respectively arranged with left sucker (5) and right sucker (10), and motor (20) is electrically connected with Programmable Logic Controller (11); Described silicon chip connecting gear (3) comprises that silicon chip transmits motor and silicon chip feed belt (4), and silicon chip transmits motor and is electrically connected with Programmable Logic Controller (11); The gaily decorated basket (2) in the gaily decorated basket lifting mechanism (1) is arranged on the gaily decorated basket pallet (16); Gaily decorated basket pallet (16) is arranged on the motion assembly (19) of line slideway auxiliary (18); Line slideway auxiliary (18) and lifting motor (17) mechanical connection, lifting motor (17) is electrically connected with Programmable Logic Controller (11).
2. a kind of full automaticity silicon chip loader according to claim 1 is characterized in that described gaily decorated basket pallet (16) is provided with the adjustable limiting piece and the locating dowel pin of the gaily decorated basket (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101677326A CN102358449A (en) | 2011-06-21 | 2011-06-21 | Full-automatic silicon wafer loader |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101677326A CN102358449A (en) | 2011-06-21 | 2011-06-21 | Full-automatic silicon wafer loader |
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| CN102358449A true CN102358449A (en) | 2012-02-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2011101677326A Pending CN102358449A (en) | 2011-06-21 | 2011-06-21 | Full-automatic silicon wafer loader |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102618848A (en) * | 2012-05-04 | 2012-08-01 | 嘉兴科民电子设备技术有限公司 | Vertical-type atomic layer deposition device |
| CN102897572A (en) * | 2012-10-26 | 2013-01-30 | 苏州劲翔电子科技有限公司 | Automatic feeding and baiting device |
| CN102951305A (en) * | 2012-12-03 | 2013-03-06 | 成都宏明双新科技股份有限公司 | Sheet product automatic packaging device |
| CN105161446A (en) * | 2015-10-16 | 2015-12-16 | 深圳市华龙精密模具有限公司 | Semiconductor MGP plastic packaging die full-automatic high-efficient material discharging apparatus |
| CN105543977A (en) * | 2015-12-07 | 2016-05-04 | 天津中环半导体股份有限公司 | Automatic silicon chip spin coater |
| CN106024687A (en) * | 2014-10-17 | 2016-10-12 | 华开朗 | Chip tray pushing device |
| CN106586551A (en) * | 2016-11-26 | 2017-04-26 | 珠海东精大电子科技有限公司 | Automatic wafer loader and method for preparing quartz crystal resonator |
| CN106876526A (en) * | 2017-03-24 | 2017-06-20 | 张家港市德昶自动化科技有限公司 | A kind of automatic inserting piece device for adapting to the different size gaily decorated basket |
| CN107946212A (en) * | 2017-11-21 | 2018-04-20 | 乐山新天源太阳能科技有限公司 | The underwater automatic sheet-fetching plug-in sheet machine of silicon chip |
| CN107968063A (en) * | 2017-11-21 | 2018-04-27 | 乐山新天源太阳能科技有限公司 | The underwater automatic charging device of silicon chip |
| CN111099065A (en) * | 2019-12-18 | 2020-05-05 | 常州机电职业技术学院 | Automatic disc loading method and device |
| CN108847404B (en) * | 2018-05-22 | 2020-05-26 | 中国电子科技集团公司第二研究所 | Single-wafer conveying double-wafer basket entering device and method in automatic silicon wafer conveying system |
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Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102618848A (en) * | 2012-05-04 | 2012-08-01 | 嘉兴科民电子设备技术有限公司 | Vertical-type atomic layer deposition device |
| CN102897572A (en) * | 2012-10-26 | 2013-01-30 | 苏州劲翔电子科技有限公司 | Automatic feeding and baiting device |
| CN102951305A (en) * | 2012-12-03 | 2013-03-06 | 成都宏明双新科技股份有限公司 | Sheet product automatic packaging device |
| CN102951305B (en) * | 2012-12-03 | 2014-07-23 | 成都宏明双新科技股份有限公司 | Sheet product automatic packaging device |
| CN106024687A (en) * | 2014-10-17 | 2016-10-12 | 华开朗 | Chip tray pushing device |
| CN106024684A (en) * | 2014-10-17 | 2016-10-12 | 华开朗 | Chip tray pushing device |
| CN106024687B (en) * | 2014-10-17 | 2019-01-18 | 嘉兴市南湖区翊轩塑料五金厂（普通合伙） | A kind of wafer disk driving means |
| CN105161446B (en) * | 2015-10-16 | 2018-06-08 | 深圳市华龙精密模具有限公司 | Semiconductor MGP plastic sealed moulds full automatic high efficiency discharge material cake equipment |
| CN105161446A (en) * | 2015-10-16 | 2015-12-16 | 深圳市华龙精密模具有限公司 | Semiconductor MGP plastic packaging die full-automatic high-efficient material discharging apparatus |
| CN105543977A (en) * | 2015-12-07 | 2016-05-04 | 天津中环半导体股份有限公司 | Automatic silicon chip spin coater |
| CN105543977B (en) * | 2015-12-07 | 2018-01-12 | 天津中环半导体股份有限公司 | Automatic silicon sol evenning machine |
| CN106586551A (en) * | 2016-11-26 | 2017-04-26 | 珠海东精大电子科技有限公司 | Automatic wafer loader and method for preparing quartz crystal resonator |
| CN106586551B (en) * | 2016-11-26 | 2019-08-30 | 珠海东精大电子科技有限公司 | Auto loading machine and the method for quartz-crystal resonator preparation |
| CN106876526A (en) * | 2017-03-24 | 2017-06-20 | 张家港市德昶自动化科技有限公司 | A kind of automatic inserting piece device for adapting to the different size gaily decorated basket |
| CN107968063A (en) * | 2017-11-21 | 2018-04-27 | 乐山新天源太阳能科技有限公司 | The underwater automatic charging device of silicon chip |
| CN107946212A (en) * | 2017-11-21 | 2018-04-20 | 乐山新天源太阳能科技有限公司 | The underwater automatic sheet-fetching plug-in sheet machine of silicon chip |
| CN108847404B (en) * | 2018-05-22 | 2020-05-26 | 中国电子科技集团公司第二研究所 | Single-wafer conveying double-wafer basket entering device and method in automatic silicon wafer conveying system |
| CN111099065A (en) * | 2019-12-18 | 2020-05-05 | 常州机电职业技术学院 | Automatic disc loading method and device |
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Application publication date: 20120222 |