CN201655771U - Fully-automatic silicon slice loading and unloading machine - Google Patents

Abstract

The utility model discloses a fully-automatic silicon slice loading and unloading machine, which solves the technical problems of low production efficiency, poor universality and compatibility and unobvious automatic flow in the prior art. The fully-automatic silicon slice loading and unloading machine comprises a control unit, a loading and unloading unit, a slice box lifting unit, a slice taking and transmitting unit and a vacuum adsorbing and slice taking unit. The utility model provides the fully-automatic silicon slice loading and unloading machine with high efficiency, high cleanness, ultralow fragment ratio and low operating cost.

Description

A fully automatic silicon wafer loading and unloading machine

technical field

The utility model relates to a loading and unloading machine, in particular to a fully automatic silicon chip loading and unloading machine.

Background technique

At present, the solar photovoltaic industry, the semiconductor industry, and the OLED industry are attracting more and more attention as energy sources, and related equipment has also been developed rapidly, such as silicon wafer loading and unloading machines, which can also be used in a small amount in the small-sized LCD industry , mainly used in conjunction with corrosion cleaning equipment. At present, in China, basically all corrosion cleaning equipment is manual loading and unloading, and most of them are tank cleaning machines. The equipment is characterized by low price, low efficiency, and high debris rate; Page-type corrosion cleaning equipment is being developed and produced in China. It has high price, high efficiency and low fragmentation rate, but it is basically manual loading and unloading. Manual loading and unloading can no longer meet the production capacity demand. It is believed that the probability of causing fragments is high and it is easy to produce secondary pollute.

Patent No. 200720102594 discloses a fully automatic silicon wafer loading and unloading machine, which includes an electric actuator, a feeding level, a suction cup, a loading level, a positioning mechanism, a conveyor belt, a basket tray, an operating table, an operating panel, an equipment frame, Feeding level lifting mechanism and basket lifting mechanism. Although this automatic silicon wafer loading and unloading machine can solve the manual removal and loading of silicon wafers, the production efficiency of this mechanism is still not high, and it cannot meet the process and various silicon wafers. Process requirements for loading and unloading.

Utility model content

The utility model provides a fully automatic silicon wafer loading and unloading machine with high efficiency, high cleanliness, extremely low debris rate and low operating cost.

The fully automatic silicon wafer loading and unloading machine solves the shortcomings of low production efficiency, poor versatility and coordination, and unobvious automatic process in the prior art.

In order to achieve this purpose, the utility model is accomplished by the following measures:

A fully automatic silicon wafer loading and unloading machine includes a loading and unloading unit, a cassette lifting unit, a wafer picking and transferring unit, and a vacuum adsorption picking unit;

The loading and unloading unit includes an upper transmission line and a lower transmission line. The upper transmission line has a transmission belt and a transmission motor. The upper transmission line is used to put in and take out empty cassettes and send the cassettes into or out of the cassette lifting unit through the transmission belt; the lower transmission line has a transmission belt. And the transmission motor, the lower transmission line sends the cassette filled with silicon wafers into or out of the cassette lifting unit through the conveyor belt;

Cassette lifting unit includes cassette lifting motor, cassette lifting screw, cassette lifting track, position sensor, cassette lifting screw and cassette lifting track are fixed on the cassette lifting motor, and the cassette is driven by the cassette lifting motor The lifting screw and the cassette lifting track rise or fall regularly at a constant speed;

The transfer unit for picking up slices consists of a pick-up hook, a lifting and retracting cylinder, and a jacking and falling cylinder. When the cassette lifting unit moves the silicon wafers to a specified height, the lifting and retracting cylinder will take the slices out of the hook. Lift it up to the bottom of the silicon wafer, lift up and down the cylinder, then raise the pick-up hook to a certain height, then lift up and retract the cylinder back to the designated position, finally lift up and down the cylinder, the silicon wafer sits on the conveyor belt and is picked up Send out; the conveyor belt arranges the silicon wafers evenly on the top;

Vacuum absorption slice taking unit includes suction cup transplanting beam, suction cup transplanting beam turning motor, vacuum suction cup rack transplanting support beam and horizontal movement mechanism, and multiple sets of suction cups are arranged on the suction cup transplanting beam (according to the number of silicon wafers extracted each time, it can be increased minus the number of suction cups), each set of suction cups is composed of about four suction nozzles (the number of suction nozzles can be increased according to different sizes), and the suction nozzles will suck up the film through the on-off of the electromagnetic valve. The suction cup seat is lifted by the lifting cylinder, and the transplanting beam passes through the horizontal movement mechanism (the horizontal movement mechanism is composed of servo motor, gear, rack, track, position sensor, etc.), and the whole is pushed out; the transplanting beam also has a circumferential flip The function can realize that the silicon wafer can be taken up by another set of other equipment, or the silicon wafer can be directly dropped on other equipment without turning over, and can be transferred to the equipment with other functions for processing the silicon wafer.

The beneficial effects of the utility model are as follows:

The fully automatic silicon wafer loading and unloading machine is a machine that integrates automatic loading, unloading, conveying, flipping silicon wafers and other functions. It has the following properties:

*Applicable to loading and unloading of silicon wafers with multiple specifications (round wafers, square wafers) and multiple sizes.

*Automatically take out the wafers in the cassette sequentially.

*Automatically load silicon wafers into cassettes sequentially.

*Silicon wafers can be turned over and sent out.

* It can be connected with other machines that process silicon chips.

The quilt equipment is composed of units, which can increase (decrease) the number of units or increase (shorten) the transmission line of the pick-up transmission unit according to different production capacity requirements or the number of silicon wafers placed each time. Each unit can operate independently, which enhances the universal sex and coordination.

Description of drawings

Fig. 1 is the structural representation of a kind of fully automatic silicon wafer loading and unloading machine of the utility model;

Fig. 2 is a structural schematic diagram of the cassette lifting unit of the utility model;

Fig. 3 is a schematic structural view of the utility model taking sheet transmission unit;

Fig. 4 is a structural schematic diagram of the vacuum adsorption sheet taking unit of the present invention;

Fig. 5 is a structural schematic diagram of another fully automatic silicon wafer loading and unloading machine of the present invention.

in the picture

(1) Control unit (2) Loading and unloading unit (3) Upper transmission line

(4) Lower transmission line (5) Transmission belt (6) Transmission motor

(7) Cassette lifting unit (8) Cassette lifting motor (9) Cassette lifting screw

(10) Cassette lift track (11) Cassette transmission motor (12) Film take-up transmission unit

(13) Pick-up hook (14) Raising and retracting the cylinder (15) Jacking up and falling the cylinder

(16) Vacuum adsorption unit (17) Suction cup transplanting beam (18) Suction cup transplanting beam flip motor

(19) Horizontal moving mechanism (20) Suction cup (21) Suction cup seat

(22) Horizontal movement motor (23) Vacuum suction cup frame transplanting support frame

(24) Horizontal drag chain (27) Suction cup lifting cylinder

Detailed ways

Below in conjunction with accompanying drawing, specifically illustrate the utility model:

As shown in Figure 1 to Figure 5,

Control unit 1: The control unit 1 is composed of touch screen, PLC and other electrical components. It is installed on the workbench, and can set and modify various process actions and various working parameters, as well as program process control, fault alarm and other functions;

Loading and unloading unit 2: The main structure is mainly divided into the upper transmission line 3 and the lower transmission line 4. Both the upper transmission line 3 and the lower transmission line 4 have a transmission belt 5 and a transmission motor 6. The lower transmission line 3 is mainly used to feed the cassettes filled with silicon wafers. Cassette lifting unit 7 or the cassette is sent out by the lifting unit; the upper transmission line is mainly for putting in and taking out the empty cassette, and sending the cassette into the cassette lifting unit 7 through the conveyor belt 5 or sending the cassette out by the lifting unit;

Cassette lifting unit 7: The cassettes transported by the loading and unloading table are lifted and transported by the cassette lifting unit 7. The lifting unit consists of a cassette lifting motor 8, a cassette lifting screw 9, a cassette lifting track 10, and a cassette transmission motor Composed of 11, after the film cassette is driven by the film cassette transmission motor 11, it is precisely sensed by the position sensor, and then the film cassette enters the film cassette lifting track 10, and the film cassette lifting screw 9 is controlled by the film cassette lifting motor 8 to move accurately. At the same time, the encoder provides feedback information to form a closed-loop control to achieve high-speed and precise movement. Its movement rises/falls regularly at a constant speed, and then the silicon chips are taken out and transmitted out one by one through the chip transfer unit;

Pick-up and transmission unit 13: The pick-up hook 14 is operated by two sets of cylinders, that is, one is the lifting and retracting cylinder 15, and the other is the jacking and falling cylinder 16; when the cassette lifting unit 7 moves the silicon wafer to the specified When the height is high, lift out and retract the cylinder 15 to lift the chip hook under the silicon wafer, jack up and drop the cylinder 16 to lift the chip hook to a certain height, then retract the previous cylinder to the designated position, and finally lift The output and retraction cylinder 15 falls, and the silicon wafers are sent out on the conveyor belt; the conveyor belt 5 arranges the silicon wafers at even intervals in turn, and then the vacuum suction chip removal unit 17 takes the silicon wafers away together;

Vacuum suction sheet taking unit 17: multiple sets of suction cups 21 are arranged on the suction cup transplanting beam 18 (the number of suction cups can be increased or decreased according to the number of silicon sheets extracted each time), and each set of suction cups 21 is composed of about four suction nozzles (according to different sizes The number of suction nozzles can be increased), and the suction nozzles will suck up the film through the on-off of the electromagnetic valve. The suction cup base 22 is lifted by the suction cup lifting cylinder 27, and the suction cup transplanting beam 18 is pushed out as a whole through the horizontal movement mechanism 20. The horizontal movement mechanism is composed of a transmission motor, a gear, a rack, a track and a position sensor. When the lifting cylinder is lifted up the sheet, after being sensed by the position sensor, the transmission motor drives the gear, the rack and the track to move the suction cup transplanting beam 18; Another set of other equipment takes away or directly drops silicon wafers on other equipment without turning over, and transfers to equipment with other functions for processing silicon wafers.

The transmission belt 5 adopts a soft round belt, which reduces the contact area with the silicon chip, and avoids damage and contamination of the silicon chip.

The above disclosures are only a few specific embodiments of the utility model, but the utility model is not limited thereto, and any changes conceivable by those skilled in the art should fall within the protection scope of the utility model.

Claims (3)

1. A fully automatic silicon wafer loading and unloading machine, characterized in that: the fully automatic silicon wafer loading and unloading machine includes a control unit, a loading and unloading unit, a piece of box lifting unit, a piece transfer unit and a vacuum adsorption Pick-up unit; The loading and unloading unit includes an upper transmission line and a lower transmission line. The upper transmission line has a transmission belt and a transmission motor. The upper transmission line is used to put in and take out empty cassettes and send the cassettes into or out of the cassette lifting unit through the transmission belt; the lower transmission line has Conveyor belt and transmission motor, the lower transmission line sends the cassette filled with silicon wafers into or out of the cassette lifting unit through the conveyor belt; The cassette lifting unit includes a cassette lifting motor, a cassette lifting screw, a cassette lifting track, a position sensor, a cassette lifting screw, and a cassette lifting track are fixed on the cassette lifting motor, and the cassette is driven by the cassette lifting motor. The box lifting screw and the film box lifting track rise or fall regularly at a constant speed; The transfer unit for picking up slices consists of a pick-up hook, a lifting and retracting cylinder, and a jacking-up and a falling cylinder. Lift the hand under the silicon wafer, lift and lower the cylinder, then lift the pick-up hook to a certain height, then lift and retract the cylinder to the designated position, and finally lift and lower the cylinder, and the silicon wafer is located on the conveyor belt It is sent out; the conveyor belt arranges the silicon wafers evenly on the top in turn; Vacuum suction slice taking unit includes a suction cup transplanting beam, a suction cup transplanting beam overturning motor, a vacuum suction cup frame transplanting support beam and a horizontal movement mechanism. Multiple sets of suction cups are arranged on the suction cup transplanting beam for film suction. The film is sucked up by the on-off of the electromagnetic valve, the suction cup seat is lifted by the lifting cylinder, the suction cup transplanting beam is pushed out by the horizontal moving mechanism as a whole, and the suction cup transplanting beam is turned over by the power of the suction cup transplanting beam to perform circumferential Flip. 2. The fully automatic silicon wafer loading and unloading machine according to claim 1, wherein the horizontal movement mechanism is composed of a transmission motor, a gear, a rack, a track and a position sensor. 3. The fully automatic silicon wafer loading and unloading machine as claimed in claim 2, characterized in that: each set of suction cups is composed of about four suction nozzles, the suction nozzles suck up the wafers through the on and off of the electromagnetic valve, and the suction cup seats pass through the lifting cylinder was raised. the

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