CN107946212A - The underwater automatic sheet-fetching plug-in sheet machine of silicon chip - Google Patents
The underwater automatic sheet-fetching plug-in sheet machine of silicon chip Download PDFInfo
- Publication number
- CN107946212A CN107946212A CN201711164179.4A CN201711164179A CN107946212A CN 107946212 A CN107946212 A CN 107946212A CN 201711164179 A CN201711164179 A CN 201711164179A CN 107946212 A CN107946212 A CN 107946212A
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- silicon chip
- conveyer belt
- sheet
- gaily decorated
- decorated basket
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention discloses a kind of underwater automatic sheet-fetching plug-in sheet machine of silicon chip that can replace manually realizing automatic inserted sheet after silicon wafer stripping.The underwater automatic sheet-fetching plug-in sheet machine of the silicon chip, including rack, are provided with mounting platform in the rack, the gaily decorated basket conveyer belt and silicon chip conveyer belt being parallel to each other are provided with the mounting platform；One end of the rack is provided with cleaning case, and the other end is provided with vertical mounting bracket；Silicon wafer loading device is provided with the cleaning case；Transverse slide is provided with the vertical mounting bracket, vertical gaily decorated basket clamping jaw is connected with the transverse slide, the gaily decorated basket clamping jaw is connected by lifting gear with transverse slide；One end that the mounting platform is located at vertical mounting bracket is provided with through hole；The through hole is located at immediately below gaily decorated basket clamping jaw, and positioned at one end of silicon chip conveyer belt；The through hole is matched with gaily decorated basket clamping jaw.Using the underwater automatic sheet-fetching plug-in sheet machine of the silicon chip, automation can be realized, reduce cost, improve product quality.
Description
Technical field
The present invention relates to the cleaning of silicon chip, especially a kind of underwater automatic sheet-fetching plug-in sheet machine of silicon chip.
Background technology
It is well-known：Silicon rod is formed after silicon chip by Buddha's warrior attendant wire cutting to be needed to carry out degumming, is needed after the completion of degumming
Burst is carried out to silicon chip, then burst is inserted into the gaily decorated basket, then carries out the subsequently technique such as cleaning again；In the prior art, will
The step that silicon chip burst is inserted into the gaily decorated basket is realized essentially by artificial, therefore operator's efficiency during being operated
It is relatively low, and operator easily comes to harm, and silicon chip is easily damaged, while silicon chip is easily contaminated.
In the prior art such as Chinese patent application ZL201020515093.9, it is wet which discloses solar silicon wafers
Method auto plate separation device, it includes supply assembly, gas-liquid mixed ejection assemblies and absorption transfer assembly, gas-liquid mixed ejection assemblies
It is installed on immediately ahead of supply assembly, absorption transfer assembly is installed on directly over supply assembly, and supply assembly is pressed from both sides including silicon slice loading
Tool, silicon slice loading clamp base are connected with the translation plates being arranged on above main fixed plate, and translation plates are vertical with driving translation plates edge
The translating device of direction movement is connected, and absorption transfer assembly includes the conveyer belt being connected with conveyor drive arrangement, conveyer belt peace
Mounted in the both sides of conveyer belt fixed plate, equipped with drawing water pipe fitting in conveyer belt fixed plate, conveyer belt fixed plate is towards cell piece side
The adsorption plate for being provided with multiple holes is installed, the hole on adsorption plate is communicated with the pipe fitting that draws water, gas-liquid mixed ejection assemblies bag
Include first and second two hydraulic sprays.To be contaminated and aoxidize in atmosphere using present arrangement avoids silicon chip exposure, reduce
Fragment rate.
Although above device can realize the burst and transport to stacking silicon chip, its apparatus structure is complicated, to each
Installation accuracy between equipment is more demanding, the height of especially two hydraulic pressure nozzles and the angle of inclination of conveyer belt, if peace
Existing error is taken on so during burst is carried out, easily occurs not realizing burst or dropping fraction, so that be unfavorable for installing,
Complicated at the same time, manufacture is of high cost.Secondly, above device can not also realize the inserted sheet of silicon chip, can only realize burst, therefore nothing
Method thoroughly solves to take the full-automation of piece, inserted sheet after Wafer Cleaning.
The content of the invention
The technical problems to be solved by the invention, which are to provide one kind, can replace manually realizing automatic inserted sheet after silicon wafer stripping
The underwater automatic sheet-fetching plug-in sheet machine of silicon chip.
The technical solution adopted by the present invention to solve the technical problems is：The underwater automatic sheet-fetching plug-in sheet machine of silicon chip, including machine
Frame, is provided with mounting platform in the rack, and the gaily decorated basket conveyer belt being parallel to each other is provided with the mounting platform and silicon chip passes
Send band；One end of the rack is provided with cleaning case, and the other end is provided with vertical mounting bracket；Be provided with the cleaning case by
Silicon chip is delivered to the silicon wafer loading device of silicon chip conveyer belt；
Transverse slide is provided with the vertical mounting bracket, vertical flower is connected with the transverse slide
Basket clamping jaw, the gaily decorated basket clamping jaw are connected by lifting gear with transverse slide；
One end that the mounting platform is located at vertical mounting bracket is provided with through hole；Under the through hole is located at gaily decorated basket clamping jaw just
Side, and positioned at one end of silicon chip conveyer belt；The through hole is matched with gaily decorated basket clamping jaw；
The silicon wafer loading device includes support base, and silicon chip conveyer belt and mounting bracket are provided with the support base；
The silicon chip conveyer belt is obliquely installed；The mounting bracket is located at one end of silicon chip conveyer belt；It is provided with the mounting bracket
The fixed plate parallel with silicon chip conveyer belt；The fixed plate extends silicon chip conveyer belt；Described fixed plate one end is provided with hydraulic pressure
The first roller, the other end of pump driving are provided with the second roller of hydraulic pump drive；Between first roller and the second roller
It is provided with feed belt；The centre position of the fixed plate is provided with sucker；Silicon chip charging frame is set below the fixed plate；Institute
State silicon chip charging frame front end and be provided with support plate, at least side is provided with nozzle in the both sides of the support plate；The nozzle
Injection center is located on the length extension of silicon chip conveyer belt upper surface；
One end of the close silicon chip conveyer belt of the silicon chip charging frame bottom surface, which is provided with along silicon chip charging frame length direction, prolongs
The sliding slot stretched；Jacking apparatus is provided with below the support base, the jacking apparatus has mandril, and the mandril passes through support base
Extend in sliding slot；Align with one end of silicon chip transmission belt one end of the silicon chip conveyer belt.
Further, the gaily decorated basket conveyer belt has two, and is located at the both sides of silicon chip conveyer belt respectively.
Preferably, the transverse slide uses slide unit.
Preferably, the sucker has two.
Further, the material frame conveyer belt of conveying silicon chip charging frame, the silicon chip charging frame are provided with the support base
On material frame conveyer belt.
There is choosing, the jacking apparatus uses hydraulic cylinder.
Preferably, the silicon chip conveyer belt uses belt conveyor.
Further, the silicon chip conveyer belt includes two parallel belt conveyors, and two parallel belts are defeated
Send and be provided with silicon chip adsorbent equipment between.
The beneficial effects of the invention are as follows：The underwater automatic sheet-fetching plug-in sheet machine of silicon chip of the present invention passes through silicon wafer loading device
Silicon chip is taken out out of cleaning case, is then transported by silicon chip conveyer belt to one end of silicon chip conveyer belt and carries out inserting in the gaily decorated basket
Piece, takes piece inserted sheet full-automatic so as to realize silicon chip；Work efficiency can effectively be improved；Avoid manually taking piece to tear piece pair open
Damage caused by silicon chip.Secondly, the underwater automatic sheet-fetching plug-in sheet machine of silicon chip is invented due to being carried out using silicon wafer loading device
The pickup of silicon chip in water, the silicon wafer loading device by set jacking apparatus silicon chip feed frame can realize inclination,
It can realize and move up at the same time；Support plate is set secondly by by the front end of silicon chip charging frame so that silicon chip fore-end position
In in support plate, nozzle then is set at least side of support plate, is separated by the adjacent two pieces of silicon chips of nozzle water spray, so
Silicon chip is adsorbed by the sucker in fixed plate again afterwards so that silicon chip is attracted on feed belt, follows driving belt quilt
It is transported on silicon chip conveyer belt, is transported silicon chip by silicon chip conveyer belt., can therefore, it is possible to realize the automatic Picking of silicon chip
Effective to improve work efficiency while simple in structure, manufacture cost is low.
In conclusion the underwater automatic sheet-fetching plug-in sheet machine of silicon chip of the present invention, passes through multi-wire saw relative to traditional
The silicon chip of machine well cutting is directly by manually cleaning, and operation is not only complicated, but also speed is slow.Silicon chip of the present invention is underwater certainly
It is dynamic to take piece plug-in sheet machine to instead of manually cleaning to take piece, inserted sheet, realize the mechanization and automation of production, cause the broken of silicon chip
Piece rate takes equivalent to 3 people of speed of the piece insertion gaily decorated basket to take the speed of the piece insertion gaily decorated basket in the range of 7%, greatly drops
Low fragment rate, and improve work efficiency.Reduce the dependence to people at the same time, artificial contamination's silicon chip can be avoided, made
It is lower to obtain silicon chip cosmetic injury, reduces cost, ensures that the silicon chip after cutting degumming is in moisture state, easy to subsequent cleaning processes
Implementation, improve product quality.
Brief description of the drawings
Fig. 1 is the stereogram of the underwater automatic sheet-fetching plug-in sheet machine of silicon chip in the embodiment of the present invention；
Fig. 2 is the front view of the underwater automatic sheet-fetching plug-in sheet machine of silicon chip in the embodiment of the present invention；
Fig. 3 is the top view of the underwater automatic sheet-fetching plug-in sheet machine of silicon chip in the embodiment of the present invention；
Fig. 4 is the A-A sectional views of Fig. 3；
Fig. 5 is the stereogram of silicon wafer loading device in the embodiment of the present invention；
Fig. 6 is the top view of silicon wafer loading device in the embodiment of the present invention；
Fig. 7 is the A-A sectional views of Fig. 6；
Indicated in figure：1- racks, 2- mounting platforms, the vertical mounting brackets of 3-, 4- gaily decorated basket conveyer belts, 5- silicon chip conveyer belts,
6- silicon wafer loading devices, 61- silicon chip conveyer belts, 62- fixed plates, 63- suckers, the second rollers of 64-, the first rollers of 65-, 66- silicon
Material frame on chip, 67- jacking apparatus, 68- support bases, 69- mounting brackets, 610- mandrils, 611- adsorbent equipments, 612- nozzles, 7-
Cleaning case, 8- gaily decorated basket clamping jaws, 9- lifting gears, the 10- gailys decorated basket.
Embodiment
The present invention is further described with reference to the accompanying drawings and examples.
As shown in Figures 1 to 7, the underwater automatic sheet-fetching plug-in sheet machine of silicon chip of the present invention, including rack 1, the rack 1
On be provided with mounting platform 2, the gaily decorated basket conveyer belt 4 and silicon chip conveyer belt 5 being parallel to each other are provided with the mounting platform 2；Institute
The one end for stating rack 1 is provided with cleaning case 7, and the other end is provided with vertical mounting bracket 3；It is provided with the cleaning case 7 by silicon
Piece is delivered to the silicon wafer loading device 6 of silicon chip conveyer belt 5；
Transverse slide 31 is provided with the vertical mounting bracket 3, is connected with the transverse slide 31 perpendicular
To gaily decorated basket clamping jaw 8, the gaily decorated basket clamping jaw 8 is connected by lifting gear 9 with transverse slide 31；
One end that the mounting platform 2 is located at vertical mounting bracket 3 is provided with through hole 21；The through hole 21 is located at gaily decorated basket folder
Immediately below pawl 8, and positioned at one end of silicon chip conveyer belt 5；The through hole 21 is matched with gaily decorated basket clamping jaw 8；
The silicon wafer loading device 6 includes support base 68, and silicon chip conveyer belt 61 and peace are provided with the support base 68
Fill stent 69；The silicon chip conveyer belt 61 is obliquely installed；The mounting bracket 69 is located at one end of silicon chip conveyer belt 61；The peace
The fixed plate 62 parallel with silicon chip conveyer belt 62 is provided with dress stent 69；The fixed plate 62 extends silicon chip conveyer belt 61；
The first roller 65, the other end that described 62 one end of fixed plate is provided with hydraulic pump drive are provided with the second roller of hydraulic pump drive
64；Feed belt is provided between first roller, 65 and second roller 64；The centre position of the fixed plate 62 is provided with
Sucker 63；The lower section of fixed plate 62 sets silicon chip charging frame 66；66 front end of silicon chip charging frame is provided with support plate, described
At least side is provided with nozzle 612 in the both sides of support plate；The injection center of the nozzle 612 is located at 61 upper table of silicon chip conveyer belt
On the length extension in face；
One end of the close silicon chip conveyer belt 61 of 66 bottom surface of silicon chip charging frame is provided with along silicon chip charging 66 length of frame
The sliding slot 61 of direction extension；The lower section of support base 68 is provided with jacking apparatus 67, and the jacking apparatus 67 has mandril 610,
The mandril 610 is extended in sliding slot 661 through support base 68.One end of the silicon chip conveyer belt 61 and silicon chip transmission belt 31
Align one end.
During work：
Start one end that the empty gaily decorated basket 10 is transported to gaily decorated basket conveyer belt 4 by gaily decorated basket conveyer belt 4 first, then start laterally sliding
Dynamic device 31 so that gaily decorated basket clamping jaw 8 is moved to the top of the gaily decorated basket 10 of sky, then by under 9 gaily decorated basket clamping jaw 8 of lifting gear
Drop, clamps the gaily decorated basket 10；Then by transverse slide 31, the gaily decorated basket 10 is transported to the top of through hole 1 so that in the gaily decorated basket 10
The silicon chip slot of bottommost aligns with silicon chip conveyer belt 5, starts silicon wafer loading device 3 and picks up silicon chip from cleaning case 7, then
It is transported on silicon chip conveyer belt 5, silicon chip is transported to 5 one end of silicon chip conveyer belt by silicon chip transmission belt 5, is realized under the action of inertia
The inserted sheet of the gaily decorated basket 10, after being inserted into a piece of silicon chip, starts lifting gear 9 so that the gaily decorated basket 10 moves down the position of a silicon chip slot
Put, carry out the insertion of second silicon chip.And so on, most the gaily decorated basket 10 is filled at last；After the gaily decorated basket 10 is filled, pass through lifting gear 9
The gaily decorated basket 10 is risen, then the gaily decorated basket 10 is moved on gaily decorated basket conveyer belt 4 by transverse slide 31, passes through gaily decorated basket conveyer belt
The gaily decorated basket 10 for filling silicon chip is transported and is detected by 4.
Wherein silicon wafer loading device 6 from water during silicon chip is picked up：
Silicon chip charging frame 66 is moved to the lower section of fixed plate 62 first, and causes the mandril 610 of jacking apparatus 67
In in sliding slot 661.Then jacking apparatus 67 is started, mandril 610 slides in sliding slot 661, and silicon chip charging frame 66 is gone out
An existing inclined angle；Then start nozzle 612 and sucker 63, nozzle 612 blow adjacent two panels silicon chip open；The sucker
63 take the part water between silicon chip and fixed plate 62 away so that negative pressure are formed between fixed plate 62 and silicon chip, silicon chip is adsorbed
Onto the belt conveyor between the first roller 65 and the second roller 64, conveyed together followed by belt, it is defeated to silicon chip is moved to
When sending on band 61, a part for silicon chip front end departs from belt conveyor to be contacted with silicon chip conveyer belt 61, is taken so as to fulfill by silicon chip
Piece carrying silicon wafers conveyer belt 61, and realize the conveying of silicon chip.After taking piece a piece of again, jacking apparatus 67 passes through 610 silicon of mandril
Material frame 66 on chip rises the position of a silicon wafer thickness, then carries out the pickup and conveying of second silicon chip, and so on, so that
Realize automatic Picking and the conveying of silicon chip.
In conclusion the underwater automatic sheet-fetching plug-in sheet machine of silicon chip of the present invention by silicon wafer loading device by silicon chip from clear
Taken out in tank-washer, then transported by silicon chip conveyer belt to one end of silicon chip conveyer belt and carry out the inserted sheet in the gaily decorated basket, so as to
That realizes silicon chip takes piece inserted sheet full-automatic；Work efficiency can effectively be improved；Avoid manually taking piece to tear piece open caused by silicon chip
Damage.Secondly, the underwater automatic sheet-fetching plug-in sheet machine of silicon chip is invented due to carrying out silicon chip in water using silicon wafer loading device
Pickup, the silicon wafer loading device, while can be real by setting the jacking apparatus silicon chip frame that feeds to realize inclination
Now move up；Secondly by by the front end of silicon chip charging frame, support plate is set so that silicon chip fore-end is located in support plate,
Then nozzle is set at least side of support plate, is separated by the adjacent two pieces of silicon chips of nozzle water spray, then again by fixing
Sucker on plate adsorbs silicon chip so that silicon chip is attracted on feed belt, follows driving belt to be transported to silicon chip
On conveyer belt, silicon chip is transported by silicon chip conveyer belt.Therefore, it is possible to realize the automatic Picking of silicon chip, can effectively improve
Work efficiency, at the same it is simple in structure, and manufacture cost is low.
In conclusion the underwater automatic sheet-fetching plug-in sheet machine of silicon chip of the present invention, passes through multi-wire saw relative to traditional
The silicon chip of machine well cutting is directly by manually cleaning, and operation is not only complicated, but also speed is slow.Silicon chip of the present invention is underwater certainly
It is dynamic to take piece plug-in sheet machine to instead of manually cleaning to take piece, inserted sheet, realize the mechanization and automation of production, cause the broken of silicon chip
Piece rate takes equivalent to 3 people of speed of the piece insertion gaily decorated basket to take the speed of the piece insertion gaily decorated basket in the range of 7%, greatly drops
Low fragment rate, and improve work efficiency.Reduce the dependence to people at the same time, artificial contamination's silicon chip can be avoided, made
It is lower to obtain silicon chip cosmetic injury, reduces cost, ensures that the silicon chip after cutting degumming is in moisture state, easy to subsequent cleaning processes
Implementation, improve product quality.
It is easy to the continuous use of the gaily decorated basket 10 to know clearly, further, the gaily decorated basket conveyer belt 4 has two, and position respectively
In the both sides of silicon chip conveyer belt 5.A wherein gaily decorated basket conveyer belt 4 transports the empty gaily decorated basket 10 and carries out load, and silicon is filled in another transport
The gaily decorated basket 10 of piece goes to be detected, and so as to fulfill the continuous use of the gaily decorated basket 10, is conducive to the arrangement of automatic assembly line.
31 main function of transverse slide is to realize to slide laterally, and a kind of preferred embodiment therein is the horizontal stroke
Slide unit is used to carriage 31.
In order to increase adsorption capacity, further, the sucker 63 has two.For the ease of the automatic of silicon chip charging frame 66
Transport, further, is provided with the material frame conveyer belt of conveying silicon chip charging frame 66, the silicon chip charging frame on the support base 68
66 on material frame conveyer belt.For the ease of control, ensure jacking precision, it is preferred that the jacking apparatus 67 uses hydraulic cylinder.
In order to reduce cost, it is preferred that the silicon chip conveyer belt 61 uses belt conveyor.In order to avoid silicon chip is in silicon chip
Drop when being conveyed on conveyer belt 61, further, the silicon chip conveyer belt 61 includes two parallel belt conveyors, and described two
Silicon chip adsorbent equipment 611 is provided between the parallel belt conveyor of bar.
Claims (8)
1. the underwater automatic sheet-fetching plug-in sheet machine of silicon chip, it is characterised in that：Including rack (1), it is flat that installation is provided with the rack (1)
Platform (2), is provided with the gaily decorated basket conveyer belt (4) and silicon chip conveyer belt (5) being parallel to each other on the mounting platform (2)；The rack
(1) one end is provided with cleaning case (7), and the other end is provided with vertical mounting bracket (3)；Be provided with the cleaning case (7) by
Silicon chip is delivered to the silicon wafer loading device (6) of silicon chip conveyer belt (5)；
Transverse slide (31) is provided with the vertical mounting bracket (3), is connected with the transverse slide (31)
Vertical gaily decorated basket clamping jaw (8), the gaily decorated basket clamping jaw (8) are connected by lifting gear (9) with transverse slide (31)；
One end that the mounting platform (2) is located at vertical mounting bracket (3) is provided with through hole (21)；The through hole (21) is positioned at flower
Immediately below basket clamping jaw (8), and positioned at one end of silicon chip conveyer belt (5)；The through hole (21) matches with gaily decorated basket clamping jaw (8)；
The silicon wafer loading device (6) includes support base (68), be provided with the support base (68) silicon chip conveyer belt (61) with
And mounting bracket (69)；The silicon chip conveyer belt (61) is obliquely installed；The mounting bracket (69) is located at silicon chip conveyer belt (61)
One end；The fixed plate (62) parallel with silicon chip conveyer belt (62) is provided with the mounting bracket (69)；The fixed plate
(62) silicon chip conveyer belt (61) is extended；Described fixed plate (62) one end is provided with the first roller (65), another of hydraulic pump drive
One end is provided with the second roller (64) of hydraulic pump drive；Biography is provided between first roller (65) and the second roller (64)
Send belt；The centre position of the fixed plate (62) is provided with sucker (63)；Silicon chip is set to feed below the fixed plate (62)
Frame (66)；Described silicon chip charging frame (66) front end is provided with support plate, and at least side is provided with spray in the both sides of the support plate
Head (612)；The injection center of the nozzle (612) is located on the length extension of silicon chip conveyer belt (61) upper surface；
One end of the close silicon chip conveyer belt (61) of described silicon chip charging frame (66) bottom surface is provided with long along silicon chip charging frame (66)
Spend the sliding slot (661) of direction extension；Jacking apparatus (67), jacking apparatus (67) tool are provided with below the support base (68)
There is mandril (610), the mandril (610) is extended in sliding slot (661) through support base (68)；The silicon chip conveyer belt (61)
Align with the one end of silicon chip transmission belt (31) one end.
2. the underwater automatic sheet-fetching plug-in sheet machine of silicon chip as claimed in claim 1, it is characterised in that：Gaily decorated basket conveyer belt (4) tool
There are two, and be located at the both sides of silicon chip conveyer belt (5) respectively.
3. the underwater automatic sheet-fetching plug-in sheet machine of silicon chip as claimed in claim 2, it is characterised in that：The transverse slide (31)
Using slide unit.
4. the underwater automatic sheet-fetching plug-in sheet machine of silicon chip as claimed in claim 3, it is characterised in that：The sucker (63) has two
It is a.
5. the underwater automatic sheet-fetching plug-in sheet machine of silicon chip as claimed in claim 4, it is characterised in that：Set on the support base (68)
There is the material frame conveyer belt of conveying silicon chip charging frame (66), the silicon chip charging frame (66) is located on material frame conveyer belt.
6. the underwater automatic sheet-fetching plug-in sheet machine of silicon chip as claimed in claim 5, it is characterised in that：The jacking apparatus (67) uses
Hydraulic cylinder.
7. the underwater automatic sheet-fetching plug-in sheet machine of silicon chip as claimed in claim 6, it is characterised in that：The silicon chip conveyer belt (61) is adopted
Use belt conveyor.
8. the underwater automatic sheet-fetching plug-in sheet machine of silicon chip as claimed in claim 7, it is characterised in that：Silicon chip conveyer belt (61) bag
Two parallel belt conveyors are included, silicon chip adsorbent equipment (611) is provided between two parallel belt conveyors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711164179.4A CN107946212A (en) | 2017-11-21 | 2017-11-21 | The underwater automatic sheet-fetching plug-in sheet machine of silicon chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711164179.4A CN107946212A (en) | 2017-11-21 | 2017-11-21 | The underwater automatic sheet-fetching plug-in sheet machine of silicon chip |
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| CN107946212A true CN107946212A (en) | 2018-04-20 |
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| CN201711164179.4A Pending CN107946212A (en) | 2017-11-21 | 2017-11-21 | The underwater automatic sheet-fetching plug-in sheet machine of silicon chip |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108389816A (en) * | 2018-04-28 | 2018-08-10 | 嘉兴岐达新材料有限公司 | A kind of silicon chip cleans film threading equipment automatically |
| CN109545724A (en) * | 2018-12-20 | 2019-03-29 | 天津中环领先材料技术有限公司 | Basket equipment is inserted in a kind of Wafer Cleaning water |
| CN109969792A (en) * | 2019-05-07 | 2019-07-05 | 张家港市德昶自动化科技有限公司 | Dry type wafer separator for semiconductor crystal wafer |
| CN110010534A (en) * | 2019-04-18 | 2019-07-12 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Wafer film magazine hand basket |
| CN110707032A (en) * | 2019-11-18 | 2020-01-17 | 内蒙古中环光伏材料有限公司 | Inserting device and inserting method for large-size silicon wafer |
| CN113394150A (en) * | 2021-07-01 | 2021-09-14 | 杭州中为光电技术有限公司 | Silicon chip conveying and dispersing device |
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| CN110010534B (en) * | 2019-04-18 | 2021-06-22 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Wafer box lifting basket |
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| CN113394150A (en) * | 2021-07-01 | 2021-09-14 | 杭州中为光电技术有限公司 | Silicon chip conveying and dispersing device |
| CN113394150B (en) * | 2021-07-01 | 2022-01-11 | 杭州中为光电技术有限公司 | Silicon chip conveying and dispersing device |
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