CN1992151B - 半导体装置的制造方法 - Google Patents
半导体装置的制造方法 Download PDFInfo
- Publication number
- CN1992151B CN1992151B CN2006100642136A CN200610064213A CN1992151B CN 1992151 B CN1992151 B CN 1992151B CN 2006100642136 A CN2006100642136 A CN 2006100642136A CN 200610064213 A CN200610064213 A CN 200610064213A CN 1992151 B CN1992151 B CN 1992151B
- Authority
- CN
- China
- Prior art keywords
- mentioned
- semiconductor substrate
- semiconductor device
- adhesive linkage
- manufacture method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16135—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/16145—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
Description
Claims (20)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP379130/05 | 2005-12-28 | ||
JP2005379130A JP2007180395A (ja) | 2005-12-28 | 2005-12-28 | 半導体装置の製造方法 |
JP061712/06 | 2006-03-07 | ||
JP2006061712 | 2006-03-07 | ||
JP259288/06 | 2006-09-25 | ||
JP2006259288A JP2007273941A (ja) | 2006-03-07 | 2006-09-25 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1992151A CN1992151A (zh) | 2007-07-04 |
CN1992151B true CN1992151B (zh) | 2011-06-15 |
Family
ID=38214311
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2006100642136A Expired - Fee Related CN1992151B (zh) | 2005-12-28 | 2006-12-28 | 半导体装置的制造方法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2007180395A (zh) |
CN (1) | CN1992151B (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4619308B2 (ja) * | 2006-03-07 | 2011-01-26 | 三洋電機株式会社 | 半導体装置の製造方法及び支持テープ |
JP2009224492A (ja) * | 2008-03-14 | 2009-10-01 | Oki Semiconductor Co Ltd | 半導体装置及びその製造方法 |
WO2010016351A1 (ja) * | 2008-08-07 | 2010-02-11 | 株式会社フジクラ | 半導体装置の製造方法 |
CN101728226B (zh) * | 2008-10-23 | 2011-08-17 | 亚泰半导体设备股份有限公司 | 分离装置及分离方法 |
JP5369612B2 (ja) * | 2008-10-28 | 2013-12-18 | 富士通株式会社 | 半導体装置の製造方法 |
US20100200957A1 (en) * | 2009-02-06 | 2010-08-12 | Qualcomm Incorporated | Scribe-Line Through Silicon Vias |
JP2010272737A (ja) | 2009-05-22 | 2010-12-02 | Elpida Memory Inc | 半導体装置の製造方法 |
WO2011111308A1 (ja) * | 2010-03-09 | 2011-09-15 | パナソニック株式会社 | 半導体装置の製造方法及び半導体装置 |
CN102254840A (zh) * | 2010-05-18 | 2011-11-23 | 宏宝科技股份有限公司 | 半导体结构及其制造方法 |
JP6026756B2 (ja) * | 2012-03-06 | 2016-11-16 | 日本電信電話株式会社 | 半導体装置の製造方法 |
JP7278184B2 (ja) * | 2019-09-13 | 2023-05-19 | キオクシア株式会社 | 半導体装置の製造方法 |
CN110767604B (zh) * | 2019-10-31 | 2022-03-18 | 厦门市三安集成电路有限公司 | 化合物半导体器件和化合物半导体器件的背面铜制程方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4212293B2 (ja) * | 2002-04-15 | 2009-01-21 | 三洋電機株式会社 | 半導体装置の製造方法 |
JP4013753B2 (ja) * | 2002-12-11 | 2007-11-28 | 松下電器産業株式会社 | 半導体ウェハの切断方法 |
-
2005
- 2005-12-28 JP JP2005379130A patent/JP2007180395A/ja active Pending
-
2006
- 2006-12-28 CN CN2006100642136A patent/CN1992151B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2007180395A (ja) | 2007-07-12 |
CN1992151A (zh) | 2007-07-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: NIIGATA SANYO ELECTRIC CO., LTD. SANYO SEMICONDU Free format text: FORMER OWNER: SANYO SEMICONDUCTOR MANUFACTURING CO., LTD. SANYO SEMICONDUCTOR CO., LTD. |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20110119 Address after: Osaka Japan Applicant after: Sanyo Electric Co.,Ltd. Co-applicant after: Niigata SANYO Electric Corp. Co-applicant after: Sanyo Semiconductor Co.,Ltd. Address before: Osaka Japan Applicant before: Sanyo Electric Co.,Ltd. Co-applicant before: Sanyo Semiconductor Manufacturing Co.,Ltd. Co-applicant before: Sanyo Semiconductor Co.,Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110615 Termination date: 20211228 |