CN1982855B - 具有数字输出的热式流量传感器 - Google Patents

具有数字输出的热式流量传感器 Download PDF

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Publication number
CN1982855B
CN1982855B CN200610094657.4A CN200610094657A CN1982855B CN 1982855 B CN1982855 B CN 1982855B CN 200610094657 A CN200610094657 A CN 200610094657A CN 1982855 B CN1982855 B CN 1982855B
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China
Prior art keywords
output
digital
temperature
heating resistor
mentioned
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Expired - Fee Related
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CN200610094657.4A
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English (en)
Chinese (zh)
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CN1982855A (zh
Inventor
有吉雄二
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Publication of CN1982855A publication Critical patent/CN1982855A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/6986—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters with pulsed heating, e.g. dynamic methods

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)
CN200610094657.4A 2005-12-16 2006-06-20 具有数字输出的热式流量传感器 Expired - Fee Related CN1982855B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005-363181 2005-12-16
JP2005363181 2005-12-16
JP2005363181A JP4790405B2 (ja) 2005-12-16 2005-12-16 熱式流量センサ

Publications (2)

Publication Number Publication Date
CN1982855A CN1982855A (zh) 2007-06-20
CN1982855B true CN1982855B (zh) 2012-12-12

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CN200610094657.4A Expired - Fee Related CN1982855B (zh) 2005-12-16 2006-06-20 具有数字输出的热式流量传感器

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US (1) US7481574B2 (enExample)
EP (2) EP2063233B1 (enExample)
JP (1) JP4790405B2 (enExample)
CN (1) CN1982855B (enExample)

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US9194588B2 (en) * 2011-07-27 2015-11-24 General Electric Company Appliance airflow detection using differential heating of electronic devices
CN102519527B (zh) * 2011-12-16 2014-07-09 哈尔滨四远测控技术有限责任公司 热式恒功率气体流量计
US9140504B1 (en) * 2012-02-02 2015-09-22 The United States Of America As Represented By The Secretary Of The Army Performance testing apparatus for microclimate cooling unit
WO2015151638A1 (ja) * 2014-03-31 2015-10-08 日立金属株式会社 熱式質量流量測定方法、当該方法を使用する熱式質量流量計、及び当該熱式質量流量計を使用する熱式質量流量制御装置
JP6297918B2 (ja) * 2014-05-19 2018-03-20 アズビル株式会社 機能兼用型センサ
CN105181052B (zh) * 2015-08-26 2019-12-27 深圳市美思先端电子有限公司 一种热式流量传感器电路及信号处理方法
EP3293873B1 (en) * 2015-12-07 2021-01-13 Fuji Electric Co., Ltd. Voltage generation circuit and overcurrent detection circuit
CN107884597B (zh) * 2016-09-30 2019-11-08 比亚迪股份有限公司 速度测量装置、方法和车速测量系统
CN107121212A (zh) * 2017-07-06 2017-09-01 厦门安斯通微电子技术有限公司 一种正温度系数可调温度传感芯片
FR3069126B1 (fr) * 2017-07-12 2020-11-13 Commissariat Energie Atomique Dispositif de regeneration de composants electroniques en environnement nucleaire
CN114895063A (zh) * 2022-05-20 2022-08-12 洛阳冠拓电子科技有限公司 一种风速检测传感器的检测方法及全固态风速检测传感器

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Also Published As

Publication number Publication date
JP2007163411A (ja) 2007-06-28
US7481574B2 (en) 2009-01-27
EP1798531A2 (en) 2007-06-20
EP1798531A3 (en) 2007-08-08
EP2063233B1 (en) 2017-01-18
JP4790405B2 (ja) 2011-10-12
EP1798531B1 (en) 2013-03-27
CN1982855A (zh) 2007-06-20
EP2063233A1 (en) 2009-05-27
US20070140309A1 (en) 2007-06-21

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