CN1961260A - 感光化合物 - Google Patents

感光化合物 Download PDF

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Publication number
CN1961260A
CN1961260A CNA2005800173866A CN200580017386A CN1961260A CN 1961260 A CN1961260 A CN 1961260A CN A2005800173866 A CNA2005800173866 A CN A2005800173866A CN 200580017386 A CN200580017386 A CN 200580017386A CN 1961260 A CN1961260 A CN 1961260A
Authority
CN
China
Prior art keywords
methacrylate
adamantyl
poly
methyl
hydroxy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2005800173866A
Other languages
English (en)
Chinese (zh)
Inventor
M·D·拉曼
金羽圭
M·派德马纳班
李相昊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EMD Performance Materials Corp
Original Assignee
AZ Electronic Materials USA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AZ Electronic Materials USA Corp filed Critical AZ Electronic Materials USA Corp
Publication of CN1961260A publication Critical patent/CN1961260A/zh
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C381/00—Compounds containing carbon and sulfur and having functional groups not covered by groups C07C301/00 - C07C337/00
    • C07C381/12—Sulfonium compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C1/00—Photosensitive materials
    • G03C1/005—Silver halide emulsions; Preparation thereof; Physical treatment thereof; Incorporation of additives therein
    • G03C1/492—Photosoluble emulsions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Materials For Photolithography (AREA)
  • Nitrogen Condensed Heterocyclic Rings (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
CNA2005800173866A 2004-06-08 2005-06-08 感光化合物 Pending CN1961260A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/863,042 US20050271974A1 (en) 2004-06-08 2004-06-08 Photoactive compounds
US10/863,042 2004-06-08

Publications (1)

Publication Number Publication Date
CN1961260A true CN1961260A (zh) 2007-05-09

Family

ID=35044987

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2005800173866A Pending CN1961260A (zh) 2004-06-08 2005-06-08 感光化合物

Country Status (7)

Country Link
US (1) US20050271974A1 (enExample)
EP (1) EP1766474A2 (enExample)
JP (1) JP2008501779A (enExample)
KR (1) KR20070030200A (enExample)
CN (1) CN1961260A (enExample)
TW (1) TW200613256A (enExample)
WO (1) WO2005121894A2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101778818B (zh) * 2007-08-07 2014-01-08 株式会社Adeka 芳香族硫鎓盐化合物
CN105143291A (zh) * 2013-04-23 2015-12-09 三菱瓦斯化学株式会社 新型脂环式酯化合物、(甲基)丙烯酸类共聚物以及包含它的感光性树脂组合物

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050214674A1 (en) 2004-03-25 2005-09-29 Yu Sui Positive-working photoimageable bottom antireflective coating
US7255970B2 (en) * 2005-07-12 2007-08-14 Az Electronic Materials Usa Corp. Photoresist composition for imaging thick films
JP4695941B2 (ja) * 2005-08-19 2011-06-08 富士フイルム株式会社 液浸露光用ポジ型レジスト組成物及びそれを用いたパターン形成方法
US20070105040A1 (en) * 2005-11-10 2007-05-10 Toukhy Medhat A Developable undercoating composition for thick photoresist layers
US7601482B2 (en) * 2006-03-28 2009-10-13 Az Electronic Materials Usa Corp. Negative photoresist compositions
JP4881692B2 (ja) * 2006-10-23 2012-02-22 富士フイルム株式会社 感光性組成物、該感光性組成物に用いられる化合物及び該感光性組成物を用いたパターン形成方法
US20080171270A1 (en) * 2007-01-16 2008-07-17 Munirathna Padmanaban Polymers Useful in Photoresist Compositions and Compositions Thereof
JP5364256B2 (ja) * 2007-06-13 2013-12-11 東京応化工業株式会社 化合物、酸発生剤、レジスト組成物およびレジストパターン形成方法
US8252503B2 (en) * 2007-08-24 2012-08-28 Az Electronic Materials Usa Corp. Photoresist compositions
US8088548B2 (en) * 2007-10-23 2012-01-03 Az Electronic Materials Usa Corp. Bottom antireflective coating compositions
US8455176B2 (en) 2008-11-12 2013-06-04 Az Electronic Materials Usa Corp. Coating composition
US8632948B2 (en) 2009-09-30 2014-01-21 Az Electronic Materials Usa Corp. Positive-working photoimageable bottom antireflective coating
US20110086312A1 (en) * 2009-10-09 2011-04-14 Dammel Ralph R Positive-Working Photoimageable Bottom Antireflective Coating
US9012126B2 (en) 2012-06-15 2015-04-21 Az Electronic Materials (Luxembourg) S.A.R.L. Positive photosensitive material
US8906594B2 (en) 2012-06-15 2014-12-09 Az Electronic Materials (Luxembourg) S.A.R.L. Negative-working thick film photoresist
TWI498675B (zh) * 2012-09-15 2015-09-01 羅門哈斯電子材料有限公司 酸產生劑化合物及含該化合物之光阻劑
JP6442271B2 (ja) * 2014-12-22 2018-12-19 デクセリアルズ株式会社 化合物、熱硬化性樹脂組成物、及び熱硬化性シート
TWI731961B (zh) 2016-04-19 2021-07-01 德商馬克專利公司 正向感光材料及形成正向凸紋影像之方法
JP6782569B2 (ja) 2016-06-28 2020-11-11 東京応化工業株式会社 レジスト組成物及びレジストパターン形成方法
JP6818888B2 (ja) 2016-08-09 2021-01-20 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングＭｅｒｃｋ Ｐａｔｅｎｔ Ｇｅｓｅｌｌｓｃｈａｆｔ ｍｉｔ ｂｅｓｃｈｒａｅｎｋｔｅｒ Ｈａｆｔｕｎｇ 環境的に安定した厚膜化学増幅レジスト
CN112654928B (zh) 2018-09-05 2024-09-24 默克专利股份有限公司 正型光敏材料

Family Cites Families (23)

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Publication number Priority date Publication date Assignee Title
US5021197A (en) * 1988-06-16 1991-06-04 Mitsubishi Gas Chemical Company, Inc. Process for production of sulfonium compounds
DE3902114A1 (de) * 1989-01-25 1990-08-02 Basf Ag Strahlungsempfindliche, ethylenisch ungesaettigte, copolymerisierbare sulfoniumsalze und verfahren zu deren herstellung
US5075476A (en) * 1989-06-07 1991-12-24 Mitsubishi Gas Chemical Company, Inc. Process for production of sulfonium compounds and novel methylthiphenol derivatives
US5252436A (en) * 1989-12-15 1993-10-12 Basf Aktiengesellschaft Process for developing a positive-working photoresist containing poly(p-hydroxystyrene) and sulfonium salt with an aqueous developer containing basic organic compounds
US5274148A (en) * 1992-08-10 1993-12-28 Isp Investments, Inc. Dialky alkoxy phenyl sulfonium salt cationic initiators
EP0751124B1 (en) * 1994-03-09 2000-12-13 Nippon Soda Co., Ltd. Sulfonium salt compound and polymerization initiator
JP2770740B2 (ja) * 1994-07-14 1998-07-02 日本電気株式会社 橋かけ環式アルキル基を有するスルホニウム塩化合物および光酸発生剤
WO1997008141A1 (fr) * 1995-08-22 1997-03-06 Nippon Soda Co., Ltd. Nouveaux composes a base de sel de sulfonium, initiateur de polymerisation, composition solidifiable et procede de durcissement
JP3587325B2 (ja) * 1996-03-08 2004-11-10 富士写真フイルム株式会社 ポジ型感光性組成物
US5693903A (en) * 1996-04-04 1997-12-02 Coda Music Technology, Inc. Apparatus and method for analyzing vocal audio data to provide accompaniment to a vocalist
JP4226803B2 (ja) * 2000-08-08 2009-02-18 富士フイルム株式会社 ポジ型感光性組成物
EP1179750B1 (en) * 2000-08-08 2012-07-25 FUJIFILM Corporation Positive photosensitive composition and method for producing a precision integrated circuit element using the same
US6749987B2 (en) * 2000-10-20 2004-06-15 Fuji Photo Film Co., Ltd. Positive photosensitive composition
JP4150509B2 (ja) * 2000-11-20 2008-09-17 富士フイルム株式会社 ポジ型感光性組成物
US6855476B2 (en) * 2001-04-05 2005-02-15 Arch Specialty Chemicals, Inc. Photoacid generators for use in photoresist compositions
US7105267B2 (en) * 2001-08-24 2006-09-12 Shin-Etsu Chemical Co., Ltd. Resist compositions and patterning process
JP4054978B2 (ja) * 2001-08-24 2008-03-05 信越化学工業株式会社 レジスト材料及びパターン形成方法
JP2003228167A (ja) * 2002-02-01 2003-08-15 Fuji Photo Film Co Ltd ネガ型レジスト組成物
JP3841399B2 (ja) * 2002-02-21 2006-11-01 富士写真フイルム株式会社 ポジ型レジスト組成物
TWI284779B (en) * 2002-06-07 2007-08-01 Fujifilm Corp Photosensitive resin composition
US20030235775A1 (en) * 2002-06-13 2003-12-25 Munirathna Padmanaban Photoresist composition for deep ultraviolet lithography comprising a mixture of photoactive compounds
US6841333B2 (en) * 2002-11-01 2005-01-11 3M Innovative Properties Company Ionic photoacid generators with segmented hydrocarbon-fluorocarbon sulfonate anions
US7358408B2 (en) * 2003-05-16 2008-04-15 Az Electronic Materials Usa Corp. Photoactive compounds

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101778818B (zh) * 2007-08-07 2014-01-08 株式会社Adeka 芳香族硫鎓盐化合物
CN105143291A (zh) * 2013-04-23 2015-12-09 三菱瓦斯化学株式会社 新型脂环式酯化合物、(甲基)丙烯酸类共聚物以及包含它的感光性树脂组合物
US9477151B2 (en) 2013-04-23 2016-10-25 Mitsubishi Gas Chemical Company, Inc. Alicyclic ester compound, and (meth)acrylic copolymer and photosensitive resin composition containing same

Also Published As

Publication number Publication date
WO2005121894A3 (en) 2006-03-30
KR20070030200A (ko) 2007-03-15
JP2008501779A (ja) 2008-01-24
US20050271974A1 (en) 2005-12-08
EP1766474A2 (en) 2007-03-28
TW200613256A (en) 2006-05-01
WO2005121894A2 (en) 2005-12-22

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Open date: 20070509